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公开(公告)号：US10161959B2
公开(公告)日：2018-12-25
申请号：US15848217
申请日：2017-12-20
申请人： OLYMPUS CORPORATION
发明人： Nobuaki Sakai
摘要： An atomic force microscope acquires sample information by performing relative raster scanning between a cantilever and a sample across an XY-plane, while causing an interaction to be generated between a probe provided at a free end of the cantilever and the sample. The atomic force microscope includes a raster-scanning-information generator to generate raster scanning information, a raster-scanning controller to control the raster scanning based on the raster scanning information, and an interaction controller to control strength of the interaction based on the raster scanning information. The interaction controller relatively reduces the strength of the interaction, when a relative speed between the cantilever and the sample across the XY-plane of the raster scanning relatively decreases.
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公开(公告)号：US09170272B2
公开(公告)日：2015-10-27
申请号：US14505942
申请日：2014-10-03
申请人： OLYMPUS CORPORATION
发明人： Nobuaki Sakai
CPC分类号： G01Q10/00 , G01Q10/04 , G01Q20/02 , G01Q30/025
摘要： A scanning mechanism includes a cantilever, an XY movable portion movable in X and Y directions parallel to an X-Y plane, an XY actuator to scan the XY movable portion in the X and Y directions, a Z actuator to scan the cantilever in a Z direction perpendicular to the X-Y plane, and a light condensing portion to cause light for detecting a displacement of the cantilever to enter the cantilever. The Z actuator and the light condensing portion are held by the XY movable portion and arranged side by side in projection to the X-Y plane.
摘要翻译： 扫描机构包括悬臂，XY平面的X方向和Y方向移动的XY可动部，XY方向扫描XY可动部的XY致动器，沿Z方向扫描悬臂的Z致动器 垂直于XY平面，以及聚光部分，用于引起光检测悬臂的位移进入悬臂。 Z致动器和聚光部分由XY可移动部分保持，并且并排设置在X-Y平面上。
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公开(公告)号：US09625491B2
公开(公告)日：2017-04-18
申请号：US14614550
申请日：2015-02-05
申请人： OLYMPUS CORPORATION
发明人： Nobuaki Sakai , Yoshitsugu Uekusa
摘要： A scanning mechanism includes a movable portion to which a scanning target object is attached, and an X-Y actuator to scan the movable portion in an X direction and a Y direction perpendicular to the X direction. The X-Y actuator is symmetrical with respect to a straight line parallel to the Y direction and asymmetrical with respect to a straight line parallel to the X direction.
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公开(公告)号：US09347969B2
公开(公告)日：2016-05-24
申请号：US14518040
申请日：2014-10-20
申请人： OLYMPUS CORPORATION
发明人： Nobuaki Sakai , Yoshitsugu Uekusa
CPC分类号： G01Q10/00 , G01Q30/025 , G02B21/0004 , G02B21/0088 , G02B21/06
摘要： A compound microscope of an optical microscope and a scanning probe microscope includes a stage to support a sample substrate holding a sample, and a cantilever chip having a substrate, a cantilever supported by the substrate, and a probe provided at the free end of the cantilever. The compound microscope further includes a scanner to hold the cantilever chip so that the probe faces the sample substrate and so that the substrate is inclined with respect to the sample substrate and to three-dimensionally scan the cantilever chip with respect to the sample substrate, a displacement sensor to optically detect the displacement of the cantilever, and an illumination light source to apply illumination light for observation by the optical microscope to the sample through the space between the substrate and the sample substrate.
摘要翻译： 光学显微镜和扫描探针显微镜的复合显微镜包括支撑保持样品的样品基底的台和具有基底的悬臂式芯片，由基底支撑的悬臂和设置在悬臂的自由端的探针 。 复合显微镜还包括扫描器，用于保持悬臂芯片，使得探针面向样品基底，使得基底相对于样品基底倾斜，并相对于样品基底三维扫描悬臂芯片， 位移传感器，以光学检测悬臂的位移;以及照明光源，用于通过光学显微镜向基板和样品基板之间的空间向样品施加用于观察的照明光。
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公开(公告)号：US20160011230A1
公开(公告)日：2016-01-14
申请号：US14862538
申请日：2015-09-23
申请人： OLYMPUS CORPORATION
发明人： Nobuaki Sakai
IPC分类号： G01Q10/00
CPC分类号： G01Q10/00 , G01Q10/04 , G01Q20/02 , G01Q30/025
摘要： A scanning mechanism includes a cantilever, an XY movable portion movable in X and Y directions parallel to an X-Y plane, an XY actuator to scan the XY movable portion in the X and Y directions, a Z actuator to scan the cantilever in a Z direction perpendicular to the X-Y plane, and a light condensing portion to cause light for detecting a displacement of the cantilever to enter the cantilever. The Z actuator and the light condensing portion are held by the XY movable portion and arranged side by side in projection to the X-Y plane.
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公开(公告)号：US09977049B2
公开(公告)日：2018-05-22
申请号：US15092027
申请日：2016-04-06
申请人： OLYMPUS CORPORATION
发明人： Nobuaki Sakai
CPC分类号： G01Q10/00 , B82Y35/00 , G01Q10/065 , G01Q60/32
摘要： A scanning probe microscope includes a cantilever having a probe at a free end thereof; a scanner to three-dimensionally relatively move the probe and a sample; a vibrator to vibrate the cantilever based on a vibrating signal; a displacement detector to detect a displacement of the cantilever and to output a displacement signal indicating the displacement; and a phase difference information detecting section to generate a phase signal including information of a phase difference between the vibrating signal and the displacement signal. The phase difference information detecting section includes a phase regulating portion to provide, to the phase difference, a phase offset to cancel an initial phase difference present in a state in which the probe is not in contact with the sample.
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公开(公告)号：US09519005B2
公开(公告)日：2016-12-13
申请号：US14862538
申请日：2015-09-23
申请人： OLYMPUS CORPORATION
发明人： Nobuaki Sakai
CPC分类号： G01Q10/00 , G01Q10/04 , G01Q20/02 , G01Q30/025
摘要： A scanning mechanism includes a cantilever, an XY movable portion movable in X and Y directions parallel to an X-Y plane, an XY actuator to scan the XY movable portion in the X and Y directions, a Z actuator to scan the cantilever in a Z direction perpendicular to the X-Y plane, and a light condensing portion to cause light for detecting a displacement of the cantilever to enter the cantilever. The Z actuator and the light condensing portion are held by the XY movable portion and arranged side by side in projection to the X-Y plane.
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公开(公告)号：US10928417B2
公开(公告)日：2021-02-23
申请号：US16682124
申请日：2019-11-13
申请人： OLYMPUS CORPORATION
发明人： Nobuaki Sakai
摘要： An atomic force microscope includes a raster scan control mechanism configured to perform a raster scan between a cantilever having a probe at a free end and a sample relative to each other across an XY plane in a fluid, an interaction control mechanism configured to vibrate the cantilever and to control an interaction generated between the probe and the sample, and a sample information acquisition circuit configured to acquire sample information including inclination information of a sample surface with respect to the XY plane based on a control result of the interaction control mechanism. The interaction control mechanism is configured to control the interaction generated between the probe and the sample in accordance with inclination of the sample surface with respect to the XY plane.
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公开(公告)号：US10107833B2
公开(公告)日：2018-10-23
申请号：US15863023
申请日：2018-01-05
申请人： OLYMPUS CORPORATION
发明人： Nobuaki Sakai
摘要： An atomic force microscope is to acquire sample information by a raster scanning of a cantilever with respect to a sample. The atomic force microscope includes a raster-scanning-information generator to generate raster scanning information including timing information. The timing information includes a first timing at which a relative speed between the cantilever and sample decreases lower than a threshold, and a second timing at which the relative speed increases higher than the threshold after the first timing. The atomic force microscope also includes a raster-scanning controller to control the raster scanning, and an interaction controller to decrease the strength of an interaction between the cantilever and sample at the first timing, and increase the strength of the interaction at the second timing.
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公开(公告)号：US09482690B2
公开(公告)日：2016-11-01
申请号：US14603260
申请日：2015-01-22
申请人： OLYMPUS CORPORATION
发明人： Nobuaki Sakai , Yoshitsugu Uekusa
CPC分类号： G01Q10/00 , G01Q20/02 , G01Q30/025 , G01Q30/14
摘要： A scanning probe microscope to measure a sample set on a sample mount in liquid includes a scanning mechanism to scan a cantilever provided with a probe at a free end along an X-axis, a Y-axis, and a Z-axis perpendicular to each other, and a liquid contact member including an optical transmission portion to transmit detection light for detecting a displacement of the cantilever, and arranged at least partially in contact with the liquid. The liquid contact member is not scanned by the scanning mechanism.
摘要翻译： 扫描探针显微镜，用于测量液体上的样品载体上的样品组，包括扫描机构，用于沿着X轴，Y轴和垂直于每个的Z轴的自由端扫描设置有探针的悬臂 以及液体接触构件，其包括光传输部分，用于传输用于检测悬臂的位移的检测光，并且至少部分地与液体接触。 液体接触构件不被扫描机构扫描。
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