SAMPLE SHAPE MEASURING METHOD AND SAMPLE SHAPE MEASURING APPARATUS

    公开(公告)号:US20180073865A1

    公开(公告)日:2018-03-15

    申请号:US15815867

    申请日:2017-11-17

    IPC分类号: G01B11/25 G01B11/26 G02B21/08

    摘要: A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set so as not to include the optical axis at a pupil position of the illumination optical system and is set such that the illumination light is applied to part of the inside of the pupil and the outside of the pupil at a pupil position of the observation optical system. The predetermined processing step includes a step of receiving light, a step of obtaining the quantity of light, a step of calculating the difference or the ratio between the quantity of light and a reference quantity of light, and a step of calculating the amount of tilt in the surface of the sample from the difference or the ratio.

    OBJECTIVE LENS UNIT AND LIQUID IMMERSION MICROSCOPE

    公开(公告)号:US20170336615A1

    公开(公告)日:2017-11-23

    申请号:US15493800

    申请日:2017-04-21

    发明人: Tsuyoshi NAKAMURA

    IPC分类号: G02B21/33 G02B21/02 G02B21/00

    摘要: An objective lens unit for a liquid immersion microscope includes: a first liquid passage in a pipe shape including an opening disposed at a lens surface end as a lens surface of a lens at a closest side to an observing object, the first liquid passage being coupled to an outside of the objective lens unit, and a second liquid passage in a pipe shape disposed independently from the first liquid passage, the second liquid passage including an opening disposed at a position adjacent to the opening of the first liquid passage on the lens surface end, the second liquid passage being coupled to the outside of the objective lens unit.