公开(公告)号：US11906546B2

公开(公告)日：2024-02-20

申请号：US17623789

申请日：2020-07-06

申请人： MASSACHUSETTS INSTITUTE OF TECHNOLOGY ,  NANO ANALYTIK GMBH ,  SYNFUELS AMERICAS CORPORATION

发明人： Fangzhou Xia ,  Chen Yang ,  Yi Wang ,  Kamal Youcef-Toumi ,  Christoph Reuter ,  Tzvetan Ivanov ,  Mathias Holz ,  Ivo Rangelow

IPC分类号： G01Q10/04 ,  G01Q20/04 ,  G01Q30/14 ,  G01Q70/14 ,  G01Q70/08

CPC分类号： G01Q10/045 ,  G01Q20/04 ,  G01Q30/14 ,  G01Q70/08

摘要： Active cantilever probes having a thin coating incorporated into their design are disclosed. The probes can be operated in opaque and/or chemically harsh environments without the need of a light source or optical system and without being significantly negatively impacted by corrosion. The probes include a substrate that has a cantilever, a thermomechanical actuator associated with the cantilever, a piezoresistive stress sensor disposed on the cantilever, and a thin coating disposed on the cantilever and the piezoresistive stress sensor. The coating is bonded to the substrate, is thermally conductive, and has a low thermal resistance. Further, the thin coating is configured to have little to no impact on one or more of a mass of the active probe, a residual stress of the cantilever, or a stiffness of the active probe. Techniques for performing topography and making other measurements in an opaque and/or chemically harsh environment are also provided.

公开(公告)号：US20170343580A1

公开(公告)日：2017-11-30

申请号：US15533535

申请日：2014-12-24

申请人： HITACHI, LTD.

发明人： Sanato NAGATA ,  Tomihiro HASHIZUME ,  Akira NAMBU ,  Hideaki KOIZUMI

IPC分类号： G01Q30/20 ,  G01Q30/14

CPC分类号： G01Q30/20 ,  G01Q30/14 ,  G01Q60/18 ,  G01Q60/24

摘要： This sample holder for a scanning probe microscope is constituted of (1) a container that retains a liquid and (2) a flat-plate-shaped upper cover that covers an upper opening of the container and that has a narrow slit above the position where a sample is placed. In the upper cover, the slit has a slit width with which a thin film of the liquid is formed over the upper surface of the sample when the liquid fills the space between the container and the upper cover. The thin film of the liquid has a film thickness smaller than the distance between the upper surface of the sample and the upper cover.

公开(公告)号：US09140720B2

公开(公告)日：2015-09-22

申请号：US13935706

申请日：2013-07-05

申请人： Boise State University

发明人： Byung I. Kim

IPC分类号： G01Q20/00 ,  G01Q20/02 ,  G01Q60/32 ,  G01Q60/36 ,  G01Q30/14 ,  G01Q60/38 ,  G01Q70/10 ,  B82Y35/00

CPC分类号： G01Q20/02 ,  B82Y35/00 ,  G01Q30/14 ,  G01Q60/32 ,  G01Q60/36 ,  G01Q60/38 ,  G01Q70/10

摘要： A method of measuring properties of a sample, the method comprising: measuring a deflection of a cantilever of a COIFM; measuring a voltage at an actuator contacting the cantilever and configured to counteract the deflection of the cantilever; measuring a voltage at a scan signal source, wherein the scan signal source is communicably coupled to the piezotube and configured to move the piezotube along an X- and a Y-axis; measuring a voltage at a feedback controller, wherein the feedback controller is communicably coupled to the piezotube and configured to move the piezotube along a Z-axis; switching a switch from a first position to a second position; switching the switch to a third position; correlating at least one of the measurements to (i) a repulsive force, and (ii) an attractive force.

摘要翻译： 一种测量样品性质的方法，所述方法包括：测量COIFM的悬臂的偏转; 测量与所述悬臂接触的致动器的电压并且构造成抵消所述悬臂的偏转; 测量扫描信号源处的电压，其中所述扫描信号源可通信地耦合到所述压电管并且被配置为沿X轴和Y轴移动所述压电管; 测量反馈控制器处的电压，其中所述反馈控制器可通信地耦合到所述压电管并且被配置为沿Z轴移动所述压电管; 将开关从第一位置切换到第二位置; 将开关切换到第三位置; 将至少一个测量值与（i）排斥力相关联，和（ii）吸引力。

公开(公告)号：US20150192604A1

公开(公告)日：2015-07-09

申请号：US14417407

申请日：2012-07-27

申请人： Tsuyoshi Yamamoto ,  Seiji Heike ,  Akira Nambu ,  Tomihiro Hashizume ,  Hideaki Koizumi

发明人： Tsuyoshi Yamamoto ,  Seiji Heike ,  Akira Nambu ,  Tomihiro Hashizume ,  Hideaki Koizumi

IPC分类号： G01Q30/20 ,  G01Q60/24

CPC分类号： G01Q30/20 ,  G01Q30/02 ,  G01Q30/10 ,  G01Q30/14 ,  G01Q60/24

摘要： At the time of carrying out measurement of a biological tissue with a probe microscope, measurement is to be realized while maintain survival conditions for a cell.As a holder for the probe microscope, a measurement holder including: a container in which a measurement object is housed; a first cover section which covers at least a part of the measurement object and has an aperture for inserting a measurement probe; and a second cover section which is connected to the first cover section, covers the container, and has an aperture for inserting the measurement probe, is used.

摘要翻译： 在用探针显微镜进行生物体组织的测定时，要保持细胞的生存条件，进行测定。 作为探针显微镜的保持器，测量保持器包括：容纳测量对象的容器; 第一覆盖部分，其覆盖所述测量对象的至少一部分并且具有用于插入测量探针的孔; 并且连接到第一盖部分的第二盖部分覆盖容器，并且具有用于插入测量探针的孔。

公开(公告)号：US09075082B2

公开(公告)日：2015-07-07

申请号：US13904892

申请日：2013-05-29

申请人： Victor B. Kley

发明人： Victor B. Kley

IPC分类号： G01Q60/00 ,  G01Q30/12 ,  G01Q30/14 ,  B82Y35/00 ,  G01Q80/00 ,  B82Y99/00

CPC分类号： G01Q60/00 ,  B82Y35/00 ,  B82Y99/00 ,  G01Q30/12 ,  G01Q30/14 ,  G01Q80/00 ,  Y10S977/849 ,  Y10S977/856 ,  Y10S977/902 ,  Y10T29/53

摘要： A gas (or fluid) is introduced around an SPM probe or Nanotool™ to control chemical activity e.g., oxygen to promote oxidation, argon to inhibit oxidation or clean dry air (CDA) to inhibit moisture to control static charging due to the action of the probe or nanotools and to provide vacuum at and around the tip and substrate area. Electrical current can be produced for use with active electronic devices on, in or near the body of the device. In addition by use of a fluid like water, certain oils, and other liquids in conjunction with specific tip structure either electric discharge machining can be used at the tip area on the tip itself (in conjunction with a form structure on the work piece) or on a work piece beneath the tip to shape, polish and remove material at very small scales (10 microns to 1 nm or less).

摘要翻译： 在SPM探针或Nanotool™周围引入气体（或流体）以控制化学活性，例如氧气以促进氧化，氩气以抑制氧化或清洁干燥空气（CDA），以抑制湿气以控制由于 探针或纳米工具，并在尖端和基底区域周围提供真空。 可以产生电流，用于与设备的主体中，外部或附近的有源电子设备一起使用。 此外，通过使用像水一样的流体，某些油和其他液体结合特定的尖端结构，可以在尖端本身的尖端区域（结合工件上的形式结构）或 在尖端下方的工件上以非常小的尺度（10微米至1纳米或更小）成型，抛光和去除材料。

公开(公告)号：US20150135374A1

公开(公告)日：2015-05-14

申请号：US14603260

申请日：2015-01-22

申请人： OLYMPUS CORPORATION

发明人： Nobuaki SAKAI ,  Yoshitsugu UEKUSA

IPC分类号： G01Q10/00

CPC分类号： G01Q10/00 ,  G01Q20/02 ,  G01Q30/025 ,  G01Q30/14

摘要： A scanning probe microscope to measure a sample set on a sample mount in liquid includes a scanning mechanism to scan a cantilever provided with a probe at a free end along an X-axis, a Y-axis, and a Z-axis perpendicular to each other, and a liquid contact member including an optical transmission portion to transmit detection light for detecting a displacement of the cantilever, and arranged at least partially in contact with the liquid. The liquid contact member is not scanned by the scanning mechanism.

摘要翻译： 扫描探针显微镜，用于测量液体上的样品载体上的样品组，包括扫描机构，用于沿着X轴，Y轴和垂直于每个的Z轴的自由端扫描设置有探针的悬臂 以及液体接触构件，其包括光传输部分，用于传输用于检测悬臂的位移的检测光，并且至少部分地与液体接触。 液体接触构件不被扫描机构扫描。

公开(公告)号：US08746039B2

公开(公告)日：2014-06-10

申请号：US13417939

申请日：2012-03-12

申请人： Jesse D. Adams ,  Benjamin S. Rogers ,  Todd A. Sulchek

发明人： Jesse D. Adams ,  Benjamin S. Rogers ,  Todd A. Sulchek

IPC分类号： G01N7/00

CPC分类号： G01Q30/14 ,  G01Q60/42

摘要： The invention provides a liquid cell for an atomic force microscope. The liquid cell includes a liquid cell housing with an internal cavity to contain a fluid, a plurality of conductive feedthroughs traversing the liquid cell housing between the internal cavity and a dry side of the liquid cell, a cantilevered probe coupled to the liquid cell housing, and a piezoelectric drive element disposed on the cantilevered probe. The cantilevered probe is actuated when a drive voltage is applied to the piezoelectric drive element through at least one of the conductive feedthroughs. A method of imaging an object in a liquid medium and a method of sensing a target species with the liquid cell are also disclosed.

摘要翻译： 本发明提供一种用于原子力显微镜的液体池。 液体池包括具有内部空腔以容纳流体的液体单元壳体，在液体单元的内部空腔和干燥侧之间穿过液体单元壳体的多个导电馈通件，连接到液体单元壳体的悬臂式探针， 以及设置在悬臂式探头上的压电驱动元件。 当通过至少一个导电馈通将驱动电压施加到压电驱动元件时，悬臂探针被致动。 还公开了一种在液体介质中成像物体的方法和用液体池检测目标物种的方法。

公开(公告)号：US20140123347A1

公开(公告)日：2014-05-01

申请号：US14146961

申请日：2014-01-03

申请人： The Regents of the University of California

发明人： James K. Gimzewski ,  Sarah E. Cross ,  Yusheng Jin ,  Jianyu Rao

IPC分类号： G01Q30/02 ,  G01Q20/00 ,  B82Y15/00

CPC分类号： G01Q30/025 ,  B82Y15/00 ,  B82Y35/00 ,  G01Q20/00 ,  G01Q30/14 ,  G01Q60/366 ,  Y10S977/92

摘要： Described herein is the analysis of nanomechanical characteristics of cells. In particular, changes in certain local nanomechanical characteristics of ex vivo human cells can correlate with presence of a human disease, such as cancer, as well as a particular stage of progression of the disease. Also, for human patients that are administered with a therapeutic agent, changes in local nanomechanical characteristics of ex vivo cells collected from the patients can correlate with effectiveness of the therapeutic agent in terms of impeding or reversing progression of the disease. By exploiting this correlation, systems and related methods can be advantageously implemented for disease state detection and therapeutic agent selection and monitoring.

摘要翻译： 这里描述的是细胞的纳米机械特性的分析。 特别地，离体人细胞的某些局部纳米机械特征的变化可以与人类疾病如癌症的存在以及疾病进展的特定阶段相关联。 此外，对于施用治疗剂的人类患者，从患者收集的离体细胞的局部纳米机械特征的变化可以与治疗剂在阻碍或逆转疾病进展方面的有效性相关。 通过利用这种相关性，系统和相关方法可以有利地实现用于疾病状态检测和治疗剂选择和监测。

公开(公告)号：US08479309B2

公开(公告)日：2013-07-02

申请号：US13096378

申请日：2011-04-28

申请人： Min-Feng Yu ,  Majid Minary-Jolandan

发明人： Min-Feng Yu ,  Majid Minary-Jolandan

IPC分类号： G01Q30/00

CPC分类号： G01Q30/14 ,  G01Q60/34 ,  G01Q70/12

摘要： Provided are methods and systems for high resolution imaging of a material immersed in liquid by scanning probe microscopy. The methods further relate to imaging a material submersed in liquid by tapping mode atomic force microscopy (AFM), wherein the AFM has a microfabricated AFM probe comprising a nanoneedle probe connected to a cantilever beam. The nanoneedle probe is immersed in the liquid, and the rest of the AFM probe, including the cantilever beam to which the nanoneedle probe is attached, remains outside the liquid. The cantilever is oscillated and the nanoneedle probe tip taps the material to image the material immersed in liquid. In an aspect, the material is supported on a shaped substrate to provide a spatially-varying immersion depth with specially defined regions for imaging by any of the methods and systems of the present invention.

摘要翻译： 提供了通过扫描探针显微镜对浸在液体中的材料进行高分辨率成像的方法和系统。 该方法还涉及通过攻丝模式原子力显微镜（AFM）对浸入液体的材料成像，其中AFM具有包含连接到悬臂梁的纳米针探针的微加工AFM探针。 将纳米针探针浸入液体中，其余的AFM探针（包括纳米针探针附着的悬臂梁）保留在液体外。 悬臂振荡，纳米针探针尖端敲击材料，使沉浸在液体中的材料成像。 在一方面，材料被支撑在成形基板上，以提供具有特定限定区域的空间变化的浸入深度，用于通过本发明的任何方法和系统进行成像。

公开(公告)号：US20120192320A1

公开(公告)日：2012-07-26

申请号：US13388504

申请日：2010-08-06

申请人： Hitoshi Asakawa ,  Takeshi Fukuma

发明人： Hitoshi Asakawa ,  Takeshi Fukuma

IPC分类号： G01Q70/00 ,  H01L41/22 ,  H01L41/053

CPC分类号： G01Q30/14 ,  G01Q60/32 ,  G01Q70/04 ,  Y10T29/42

摘要： Provided is a cantilever excitation device capable of preventing complication of resonance characteristics by a simple configuration. A cantilever excitation device (1) is provided with a cantilever (7), a cantilever holder (3) for holding the cantilever (7), and a piezoelectric vibrator (5) attached to the cantilever holder (3). The cantilever holder (3) includes a holder main part (11) (first part) having an acoustic impedance different from that of the piezoelectric vibrator (5) for transmitting vibration of the piezoelectric vibrator by elastic deformation and an attachment piece (13) (second part) having the acoustic impedance different from that of the first part for forming a material boundary to block propagation of an acoustic wave between the same and the first part. The first and second parts are interposed between the piezoelectric vibrator (5) and the cantilever (7).

摘要翻译： 提供了能够通过简单的结构来防止谐振特性的复杂化的悬臂激励装置。 悬臂激励装置（1）设置有悬臂（7），用于保持悬臂（7）的悬臂支架（3）和附接到悬臂支架（3）的压电振动器（5）。 悬臂支架（3）包括具有与用于通过弹性变形传递压电振动器的振动的压电振动器（5）的声阻抗不同的保持器主体部（11）（第一部分）和安装件（13）（ 第二部分）具有不同于用于形成材料边界的第一部分的声阻抗以阻止声波在其与第一部分之间的传播。 第一和第二部分介于压电振动器（5）和悬臂（7）之间。