公开(公告)号：US20160021459A1

公开(公告)日：2016-01-21

申请号：US14773451

申请日：2013-09-09

Applicant: OMRON CORPORATION

Inventor： Tadashi INOUE ,  Takashi KASAI ,  Yuki UCHIDA

IPC: H04R7/18 ,  H04R19/04

CPC classification number: H04R7/18 ,  B81B7/0006 ,  B81B2201/0257 ,  B81B2203/0127 ,  B81B2203/0307 ,  B81B2207/07 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2924/15151 ,  H01L2924/16152 ,  H04R19/005 ,  H04R19/04 ,  H04R2410/03 ,  H01L2924/00014

Abstract: A diaphragm is arranged on the upper surface of a silicon substrate so as to cover a chamber in the silicon substrate. Multiple anchors are provided on the upper surface of the silicon substrate, and the lower surfaces of corner portions of the diaphragm are supported by the anchors. Also, a fixed electrode plate is provided above the diaphragm with an air gap therebetween. In a view from a direction perpendicular to the upper surface of the silicon substrate, the entire length of the outer edge of the diaphragm located between adjacent anchors is located outward of a line segment that circumscribes the edges of the adjacent anchors on the side distant from the center of the diaphragm. Also, one or two or more through-holes are formed in the diaphragm in the vicinity of the anchors.

Abstract translation: 在硅衬底的上表面上设置隔膜以覆盖硅衬底中的室。 在硅基板的上表面上设置有多个锚，并且隔膜的角部的下表面被锚固件支撑。 此外，固定电极板设置在隔膜的上方，其间具有气隙。 在从垂直于硅衬底的上表面的方向看来，位于相邻锚固件之间的隔膜的外边缘的整个长度位于一个线段的外侧，该线段在相邻的锚定件的边缘远离 隔膜的中心。 此外，在隔膜附近形成有一个或两个以上的通孔。

公开(公告)号：US20150369653A1

公开(公告)日：2015-12-24

申请号：US14842871

申请日：2015-09-02

Applicant: OMRON Corporation

Inventor： Tadashi INOUE

IPC: G01H11/06 ,  H04R19/04

CPC classification number: G01H11/06 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2924/15151 ,  H01L2924/16152 ,  H04R19/005 ,  H04R19/04 ,  H01L2924/00014

Abstract: A chamber that penetrates vertically is formed in a silicon substrate. A diaphragm is arranged on the upper surface of the silicon substrate so as to cover the upper opening of the chamber. Leg pieces are provided in corner portions of the diaphragm, within the diaphragm. The diaphragm and the leg pieces are separated by slits, and the leg pieces extend in the diagonal directions of the diaphragm. The leg pieces are connected to the diaphragm at the ends on the outer peripheral side of the diaphragm, and the ends on the central side of the diaphragm are supported by anchors provided on the upper surface of the silicon substrate. A back plate is provided above the silicon substrate so as to cover the diaphragm, and a fixed electrode plate is provided on the lower surface of the back plate so as to oppose the diaphragm.

Abstract translation: 在硅衬底中形成垂直穿透的室。 在硅衬底的上表面上设置隔膜以覆盖室的上开口。 腿片设置在隔膜的角膜部分内。 隔膜和腿片由狭缝分开，并且腿片沿隔膜的对角线方向延伸。 腿片在隔膜的外周侧的端部连接到隔膜，并且隔膜的中心侧的端部由设置在硅基板的上表面上的锚固件支撑。 在硅基板的上方设置有背板以覆盖隔膜，并且在背板的下表面上设置固定电极板以与隔膜相对。