公开(公告)号：US20220234931A1

公开(公告)日：2022-07-28

申请号：US17613731

申请日：2020-05-22

Applicant: ORGANO CORPORATION

Inventor： Fumitaka ICHIHARA ,  Tsukasa KONDO ,  Hiroshi SUGAWARA ,  Koichiro HASHIMOTO

IPC: C02F9/00 ,  C02F1/42 ,  C02F1/44

Abstract: Fine particles that are contained in ultrapure water supplied to a point of use is further reduced.
Ultrapure water production system has ultrapure water supply line that is connected to point of uses, wherein ultrapure water flows through ultrapure water supply line; and first ion exchange apparatus, membrane filtration apparatus and second ion exchange apparatus that are arranged in series on ultrapure water supply line. Membrane filtration apparatus is arranged between first ion exchange apparatus and second ion exchange apparatus. At least a part of the ultrapure water that flows out from membrane filtration apparatus is treated by second ion exchange apparatus before the at least a part of the ultrapure water is supplied to point of uses.