RESIN PRODUCTION METHOD, ULTRAPURE WATER PRODUCTION METHOD, AND ULTRAPURE WATER PRODUCTION APPARATUS

    公开(公告)号:US20240382940A1

    公开(公告)日:2024-11-21

    申请号:US18688824

    申请日:2022-08-08

    Abstract: A new catalytic metal supporting resin production method that can streamline the purification process, and an ultrapure water production method that uses the catalytic metal supporting resin production method are provided. The method for producing a resin includes first filling a single vessel with first anion exchange resin that supports a catalytic metal and second anion exchange resin that does not support a catalytic metal and then purifying together first anion exchange resin and second anion exchange resin that fill the vessel. The ultrapure water production method includes reducing the amount of hydrogen peroxide or dissolved oxygen by causing water being treated that contains hydrogen peroxide or dissolved oxygen to come into contact with an ion exchange resin that contains at least the resin and that is produced by the resin production method.

    APPARATUS FOR PRODUCING ULTRAPURE WATER
    2.
    发明公开

    公开(公告)号:US20230271138A1

    公开(公告)日:2023-08-31

    申请号:US18015436

    申请日:2021-06-11

    Abstract: An apparatus for producing ultrapure water: first ultrafiltration membrane that is connected to point of use and that supplies ultrapure water to point of use; first concentrated water return line that returns concentrated water of first ultrafiltration membrane to an upstream side of first ultrafiltration membrane; pressure gauge that measures pressure at an outlet of first ultrafiltration membrane; and means for adjusting flow rate of the concentrated water (first valve). Means for adjusting the flow rate of the concentrated water can be operated such that when the flow rate of the concentrated water is changed, a change in the pressure at the outlet of first ultrafiltration membrane that is measured by pressure gauge is kept within a predetermined range.

    ULTRAPURE WATER PRODUCTION SYSTEM AND METHOD FOR PRODUCING ULTRAPURE WATER

    公开(公告)号:US20230416120A1

    公开(公告)日:2023-12-28

    申请号:US18038050

    申请日:2021-08-04

    CPC classification number: C02F1/42 C02F1/444 C02F2103/04

    Abstract: An ultrapure water production system that has a simplified configuration and that can efficiently remove fine particles that are contained in ultrapure water is provided. Ultrapure water production system has ultrapure water supply line that is connected to point of use and that supplies ultrapure water to point of use; return line that returns the ultrapure water that has not been used at point of use to ultrapure water supply line; and at least one ion exchange apparatus that is provided on ultrapure water supply line. Space velocity of water to be treated that flows in final-stage ion exchange apparatus is 170 (1/hr) or more, and wherein final-stage ion exchange apparatus is an ion exchange apparatus that is closest to point of use from among at least one ion exchange apparatus.

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