APPARATUS FOR PRODUCING ULTRAPURE WATER
    1.
    发明公开

    公开(公告)号:US20230271138A1

    公开(公告)日:2023-08-31

    申请号:US18015436

    申请日:2021-06-11

    摘要: An apparatus for producing ultrapure water: first ultrafiltration membrane that is connected to point of use and that supplies ultrapure water to point of use; first concentrated water return line that returns concentrated water of first ultrafiltration membrane to an upstream side of first ultrafiltration membrane; pressure gauge that measures pressure at an outlet of first ultrafiltration membrane; and means for adjusting flow rate of the concentrated water (first valve). Means for adjusting the flow rate of the concentrated water can be operated such that when the flow rate of the concentrated water is changed, a change in the pressure at the outlet of first ultrafiltration membrane that is measured by pressure gauge is kept within a predetermined range.

    PARTICLE CAPTURE FILTRATION FILM AND MANUFACTURING METHOD THEREOF, AND POROUS FILM AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20190076788A1

    公开(公告)日:2019-03-14

    申请号:US16082758

    申请日:2017-03-03

    摘要: A particle capture filtration film with communication pores formed by anode oxidization of an aluminum material includes a small pore diameter part having communication pores formed to open to one surface of the filtration film, an intermediate pore part having communication pores to which the communication pores of the small pore diameter part are connected and that have a larger diameter than a diameter of the communication pores in the small pore diameter part, and a large pore diameter part having communication pores to which the communication pores of the intermediate pore part are connected and which have a larger diameter than a diameter of the communication pores in the intermediate pore part and are formed to open to the other surface of the filtration film.

    CENTRIFUGAL FILTRATION DEVICE AND METHOD OF CAPTURING AND OBSERVING FINE PARTICLES IN LIQUID USING THE SAME

    公开(公告)号:US20200003661A1

    公开(公告)日:2020-01-02

    申请号:US16482467

    申请日:2018-01-10

    摘要: A centrifugal filtration device is provided. The centrifugal filtration device has filtration membrane that filtrates liquid; cartridge that supports filtration membrane and that forms liquid chamber together with filtration membrane, wherein liquid chamber holds the liquid therein; and rotating member that rotates around rotation center and that supports cartridge such that filtration membrane is positioned outward of liquid chamber with respect to rotation center. Rotating member has a path that is connected to liquid chamber, and at least a part of a liquid contact part of the path that is in contact with the liquid is formed of titanium or a titanium alloy.

    ULTRAPURE WATER PRODUCTION SYSTEM AND METHOD FOR PRODUCING ULTRAPURE WATER

    公开(公告)号:US20230416120A1

    公开(公告)日:2023-12-28

    申请号:US18038050

    申请日:2021-08-04

    IPC分类号: C02F1/42 C02F1/44

    摘要: An ultrapure water production system that has a simplified configuration and that can efficiently remove fine particles that are contained in ultrapure water is provided. Ultrapure water production system has ultrapure water supply line that is connected to point of use and that supplies ultrapure water to point of use; return line that returns the ultrapure water that has not been used at point of use to ultrapure water supply line; and at least one ion exchange apparatus that is provided on ultrapure water supply line. Space velocity of water to be treated that flows in final-stage ion exchange apparatus is 170 (1/hr) or more, and wherein final-stage ion exchange apparatus is an ion exchange apparatus that is closest to point of use from among at least one ion exchange apparatus.

    ULTRAPURE WATER PRODUCTION SYSTEM AND METHOD OF PRODUCING ULTRAPURE WATER

    公开(公告)号:US20220234931A1

    公开(公告)日:2022-07-28

    申请号:US17613731

    申请日:2020-05-22

    IPC分类号: C02F9/00 C02F1/42 C02F1/44

    摘要: Fine particles that are contained in ultrapure water supplied to a point of use is further reduced.
    Ultrapure water production system has ultrapure water supply line that is connected to point of uses, wherein ultrapure water flows through ultrapure water supply line; and first ion exchange apparatus, membrane filtration apparatus and second ion exchange apparatus that are arranged in series on ultrapure water supply line. Membrane filtration apparatus is arranged between first ion exchange apparatus and second ion exchange apparatus. At least a part of the ultrapure water that flows out from membrane filtration apparatus is treated by second ion exchange apparatus before the at least a part of the ultrapure water is supplied to point of uses.