公开(公告)号：US06238850B1

公开(公告)日：2001-05-29

申请号：US09379454

申请日：1999-08-23

申请人： Orest Bula ,  Daniel Cole ,  Edward Winston Conrad ,  William Charles Leipold

发明人： Orest Bula ,  Daniel Cole ,  Edward Winston Conrad ,  William Charles Leipold

IPC分类号： G03C500

CPC分类号： G03F7/70433 ,  G03F7/203 ,  G03F7/70466

摘要： A method of forming an image having reduced comer rounding in a photoresist layer is provided which comprises exposing a photoresist layer to a first mask having a first image, said first image having at least two edges; exposing said photoresist layer to a second mask having a second image, said second image having at least two edges, the second image edges being substantially rotated relative to the first image edges to produce a latent image in said photoresist layer having edges substantially rotated relative to the first and second image edges; and developing the photoresist layer to produce said image.

摘要翻译： 提供了一种在光致抗蚀剂层中形成具有减角的图像的方法，其包括将光致抗蚀剂层暴露于具有第一图像的第一掩模，所述第一图像具有至少两个边缘; 将所述光致抗蚀剂层暴露于具有第二图像的第二掩模，所述第二图像具有至少两个边缘，所述第二图像边缘相对于所述第一图像边缘基本旋转，以在所述光致抗蚀剂层中产生潜像，所述潜像基本上相对于 第一和第二图像边缘; 并显影光致抗蚀剂层以产生所述图像。