公开(公告)号：US11286189B2

公开(公告)日：2022-03-29

申请号：US16770901

申请日：2018-11-30

Applicant: Ovivo Inc.

Inventor： Philippe Rychen ,  Markus Duppel

IPC: C02F9/00 ,  B01D61/14 ,  B01D61/16 ,  B01D71/02 ,  C04B35/56 ,  C02F1/44 ,  C02F1/52 ,  C02F1/66 ,  B01J19/00 ,  C01B7/19 ,  C04B35/565 ,  C02F1/00 ,  C02F101/10 ,  C02F101/14 ,  C02F103/34

Abstract: The invention relates to a method for treating fluoride-containing, in particular HF containing wastewater to remove fluoride and to a corresponding apparatus. In the new method calcium carbonate is reacted in a reaction step at an acidic pH≤4 with the fluoride in the wastewater to form calcium fluoride particles. Then, in a subsequent filtration step said calcium fluoride particles are separated by a porous membrane from the treated wastewater. The inventive apparatus comprises at least one reaction container/tank for reacting calcium carbonate at an acidic pH≤4 with fluoride in the wastewater to form calcium fluoride particles, as well as at least one porous membrane, in particular at least one porous ceramic membrane for separating calcium fluoride particles from the treated wastewater in a filtration step.

公开(公告)号：US20250020566A1

公开(公告)日：2025-01-16

申请号：US18221263

申请日：2023-07-12

Applicant: Ovivo Inc.

Inventor： Najib Alia ,  Ian Briggs ,  Philippe Rychen

IPC: G01N15/10

Abstract: In semiconductor manufacture requiring ultra high purity water, particles of specified sizes are detected using acoustic particle detection capable of detecting nanoparticles. A sensor unit receives a flow of water, with the pressure and rate of flow to the sensor controlled closely. In each sensor unit is a measurement cell to receive a continuous flow of water, with a transducer module engaged with the cell to deliver an acoustic pulse at a known level of intensity as the liquid flows through the cells, the acoustic pulse acting on the liquid at a focus zone to cause cavitation in the event a particle of size detectable at that intensity is present. A waveform emitter/receiver connected to the sensor unit sends high-frequency, high-voltage signal to the transducer module to cause the acoustic pulse, and it also receives a waveform echo indicating a cavitation event. The system is controlled by a microprocessor.

公开(公告)号：US20210221705A1

公开(公告)日：2021-07-22

申请号：US17051356

申请日：2019-03-28

Applicant: Ovivo Inc.

Inventor： Philippe Rychen ,  Dominik Saladin ,  Sylvain Keav

IPC: C02F1/32 ,  C02F1/42 ,  C02F1/70

Abstract: The invention relates to an apparatus for providing ultrapure water, in particular ultrapure water for use in semiconductor fabrication.
This apparatus comprises at least one cylindrical reactor with an inner cylindrical shell, an outer cylindrical shell and a channel-like volume between inner shell and outer shell.
According to the invention said inner cylindrical shell houses at least one UV emission device, said outer cylindrical shell comprises at least one means for reflecting UV radiation, and said channel-like volume is provided for flowing water through the reactor.

公开(公告)号：US12077456B2

公开(公告)日：2024-09-03

申请号：US17051356

申请日：2019-03-28

Applicant: Ovivo Inc.

Inventor： Philippe Rychen ,  Dominik Saladin ,  Sylvain Keav

IPC: C02F1/32 ,  C02F1/42 ,  C02F1/70 ,  C02F103/04

CPC classification number: C02F1/325 ,  C02F1/42 ,  C02F1/705 ,  C02F2103/04 ,  C02F2201/002 ,  C02F2201/3223 ,  C02F2201/3228 ,  C02F2301/024

Abstract: The invention relates to an apparatus for providing ultrapure water, in particular ultrapure water for use in semiconductor fabrication.
This apparatus comprises at least one cylindrical reactor with an inner cylindrical shell, an outer cylindrical shell and a channel-like volume between inner shell and outer shell.
According to the invention



said inner cylindrical shell houses at least one UV emission device,
said outer cylindrical shell comprises at least one means for reflecting UV radiation, and
said channel-like volume is provided for flowing water through the reactor.

公开(公告)号：US20200317553A1

公开(公告)日：2020-10-08

申请号：US16770901

申请日：2018-11-30

Applicant: Ovivo Inc.

Inventor： Philippe Rychen ,  Markus Duppel

IPC: C02F9/00 ,  C04B35/565 ,  B01D61/14 ,  B01D61/16 ,  B01D71/02

Abstract: The invention relates to a method for treating fluoride-containing, in particular HF containing wastewater to remove fluoride and to a corresponding apparatus. In the new method calcium carbonate is reacted in a reaction step at an acidic pH≤4 with the fluoride in the wastewater to form calcium fluoride particles. Then, in a subsequent filtration step said calcium fluoride particles are separated by a porous membrane from the treated wastewater. The inventive apparatus comprises at least one reaction container/tank for reacting calcium carbonate at an acidic pH≤4 with fluoride in the wastewater to form calcium fluoride particles, as well as at least one porous membrane, in particular at least one porous ceramic membrane for separating calcium fluoride particles from the treated wastewater in a filtration step.