公开(公告)号：US09618412B2

公开(公告)日：2017-04-11

申请号：US14913158

申请日：2014-08-08

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Kazushi Kataoka ,  Jun Ogihara ,  Naoki Ushiyama ,  Hisanori Shiroishi

IPC: G01L9/00 ,  B81B7/00 ,  B81B3/00

CPC classification number: G01L9/0072 ,  B81B3/00 ,  B81B7/0029

Abstract: A semiconductor physical quantity sensor includes: a first base material; an electrode formed on the first base material; a diaphragm which bends in accordance with a physical quantity applied from the outside; a second base material fixed to the first base material and supporting the diaphragm such that the diaphragm is opposed to the electrode with a space (S) in between; and an insulator formed on a surface on the first base material side of the diaphragm. Moreover, a wall portion to define the space (S) is formed between the insulator and the electrode.

公开(公告)号：US11156520B2

公开(公告)日：2021-10-26

申请号：US16671738

申请日：2019-11-01

Applicant: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.

Inventor： Hisanori Siroisi ,  Jun Ogihara ,  Naoki Ushiyama

IPC: G01L9/00

Abstract: A physical quantity sensor includes a first substrate, an electrode provided on the first substrate, a diaphragm made of semiconductor material, a second substrate fixed to the first substrate, a dielectric film provided on the diaphragm, and a wall provided between the dielectric film and the electrode. The second substrate supports the diaphragm such that the diaphragm has an opposing surface facing the electrode across a space. The dielectric film is provided on the opposing surface of the diaphragm. The dielectric film has a surface facing the electrode across the space. The wall includes a first protrusion and a second protrusion. The first protrusion protrudes toward the electrode from the surface of the dielectric film. The second protrusion protrudes toward the electrode from the first protrusion, and contacts the electrode. The second protrusion is made of material which is different from material of the dielectric film.

公开(公告)号：US10458941B2

公开(公告)日：2019-10-29

申请号：US15606553

申请日：2017-05-26

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Jun Ogihara ,  Sumihiro Otsuka ,  Noriteru Furumoto ,  Masahiro Yasumi ,  Atsushi Shunori

IPC: G01N27/28 ,  G01N27/416 ,  G01N33/483

Abstract: Provided is an electrochemical measurement device capable of measuring more accurately and an electrochemical measurement apparatus provided with the electrochemical measurement device. The electrochemical measurement device includes a base part, and a placement part on which an object to be measured is placed, the placement part being provided to the base part. The electrochemical measurement device also includes an electrode part provided near the placement part on the base part, a wiring part provided on a surface of the base part and electrically connected to the electrode part, and an insulator that covers the wiring part. Further, a protruding part is provided on the base part of the electrochemical measurement device so as to protrude past the insulator.