公开(公告)号：US10036712B2

公开(公告)日：2018-07-31

申请号：US15029472

申请日：2014-10-13

Applicant: PHILIPS LIGHTING HOLDING B.V.

Inventor： Shuguang Kuai ,  Mark Christoph Jaeger ,  Weixi Zhou

IPC: G01N21/88 ,  H04N5/225

CPC classification number: G01N21/8806 ,  G01N21/8803 ,  G01N2021/8809 ,  G01N2201/0633 ,  G01N2201/12 ,  H04N5/225

Abstract: A defect inspection system is provided for inspection of defects in the surface of a sample. An array of light sources is used, with different light sources providing light to the sample from different directions. A main direction of illumination is defined with highest intensity, and this direction evolves over time. By providing varying directional illumination instead of blanket illumination, it becomes easier to detect defects.