公开(公告)号：US20240428997A1

公开(公告)日：2024-12-26

申请号：US18824492

申请日：2024-09-04

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Naomi KURIHARA ,  Akihiro YAMAGUCHI ,  Mitsuhisa YOSHIMURA ,  Miwa OGAWA

IPC: H01G9/00 ,  C23C16/02 ,  C23C16/40 ,  H01G9/055 ,  H01G13/00

Abstract: A film production method for producing a layer containing a metal oxide, the film production method including: a heating step of heating a metal foil containing a first metal by bringing a part of the metal foil into contact with at least one heat generator; a first contact step of letting first gas containing a second metal to be in contact with both surfaces of the metal foil in a state where the part of the metal foil is supported; and a second contact step of letting second gas containing an oxidant to be in contact with the both surfaces of the metal foil in a state where the part of the metal foil is supported.

公开(公告)号：US20230360864A1

公开(公告)日：2023-11-09

申请号：US18246091

申请日：2021-09-27

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Mitsuhisa YOSHIMURA ,  Naomi KURIHARA ,  Miwa OGAWA ,  Akihiro YAMAGUCHI

IPC: H01G13/00 ,  H01G9/07 ,  H01G9/00

CPC classification number: H01G13/00 ,  H01G9/07 ,  H01G9/0032

Abstract: A film-forming device disclosed is a film-forming device for forming a film on a metal foil having a porous portion on a main surface thereof by a gas phase method, and includes a film-forming region in which the film is formed on the metal foil, conveyors to provided downstream of the film-forming region and drawing the metal foil from the film-forming region, and a control unit that controls the stress applied to the metal foil from the conveyors to 21 N/mm2 or less. This provides a film-forming device which does not cause defects easily on a film-forming target metal foil.