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公开(公告)号:US11353883B2
公开(公告)日:2022-06-07
申请号:US16243376
申请日:2019-01-09
Inventor: Yoshihiro Ikawa , Hiroshi Shirouzu , Osamu Mizuno
Abstract: A carrier includes a body, a sensor, and an output unit. The body has the ability to travel autonomously and includes a holding mechanism for holding a burden. The sensor is provided for the body and detects a situation surrounding the body. The output unit outputs detected information, collected by the sensor, about the situation to a management device that manages operation of another carrier.
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公开(公告)号:US12228912B2
公开(公告)日:2025-02-18
申请号:US17658674
申请日:2022-04-11
Inventor: Hiroshi Shirouzu
IPC: G05B19/418 , G06F18/214 , G06Q50/04
Abstract: A production equipment monitoring system 20 including: an anomaly index determination unit 23 determining an anomaly index a of a production equipment 10, based on a feature quantity obtained from an equipment information on the production equipment 10; a relevance determination unit 24 determining a degree of relevance D between each of anomalous conditions predicable to occur in the production equipment 10 and an observed condition of the production equipment 10; a detection threshold determination unit 25 determining a single detection threshold th for detecting a degree of anomaly A of the production equipment 10, based on anomaly thresholds at which are thresholds of the anomaly index a corresponding respectively to the anomalous conditions, and on the degree of relevance D; and an anomaly degree detection unit 26 detecting the degree of anomaly A of the production equipment 10, based on the anomaly index a and the detection threshold th.
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公开(公告)号:US12009190B2
公开(公告)日:2024-06-11
申请号:US17658670
申请日:2022-04-11
Inventor: Hiroshi Shirouzu
IPC: H01J37/32
CPC classification number: H01J37/32935 , H01J37/32082 , H01J37/32926
Abstract: A disclosed plasma processing system 10 includes: a plasma processing apparatus 100 including a processing chamber 100a for plasma processing an object 400 to be processed, and at least one component 122, 131 which is at least partially disposed in the processing chamber 100a; a storage unit 301 for storing a recipe including a set value specifying a plasma processing condition; a tolerance determination unit 302 that determines a tolerance of the set value, based on a degree of deterioration of the at least one component 122, 131; and a recipe modification unit 303 that modifies the recipe such that the set value falls within the tolerance, when the set value is outside the tolerance.
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公开(公告)号:US11827449B2
公开(公告)日:2023-11-28
申请号:US16430571
申请日:2019-06-04
Inventor: Hiroshi Shirouzu , Osamu Mizuno
IPC: B65G1/06 , B65G1/04 , G05B19/418 , B62D57/024 , B62D57/04 , H01F7/02 , B62D63/04 , H01F7/20
CPC classification number: B65G1/065 , B62D57/024 , B62D57/04 , B62D63/04 , B65G1/0485 , B65G1/0492 , G05B19/41895 , H01F7/02 , H01F7/206
Abstract: A mover according to the present disclosure includes: a body to move; a second member; a suction unit; a location detection unit; a first moving part, and a second moving part. The second member moves in a state where the second member is combined with a first member provided for an object, as the body is displaced relative to the object. The suction unit is sucked to the object in the state where the second member is combined with the first member. The location detection unit detects a location of the body with respect to the object by detecting movement of the second member. The first moving part moves the body until the state where the second member is combined with the first member is established. The second moving part displaces the body relative to the object in the state where the second member is combined with the first member.
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公开(公告)号:US11370398B2
公开(公告)日:2022-06-28
申请号:US16237846
申请日:2019-01-02
Inventor: Hiroshi Shirouzu , Tohru Nakamura
Abstract: Disclosed herein is a mover including a plurality of wheels, a body, and a friction braking mechanism. The body has a bottom surface. The body is supported by the plurality of wheels with the bottom surface facing a traveling surface, and travels on the traveling surface by turning the plurality of wheels. The friction braking mechanism applies a brake on the body with at least a portion of the bottom surface or at least a portion of a movable body brought into contact with the traveling surface by switching, while the body is traveling, a state of the movable body from a first state into a second state. The second state is a state where the movable body protrudes from the bottom surface to a different height from in the first state.
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公开(公告)号:US11320831B2
公开(公告)日:2022-05-03
申请号:US16221649
申请日:2018-12-17
Inventor: Hiroshi Shirouzu , Yoshihiro Ikawa , Osamu Mizuno
Abstract: Disclosed herein is a mover including an object detecting unit and either a masking processing unit or a transmission restricting unit as an additional processing unit. The object detecting unit detects an object based on a reception signal output from a receiver unit by having a transmitter unit transmit a scanning wave and by having the receiver unit receive a reflected wave, which is a component, reflected from the object, of the scanning wave. The masking processing unit performs masking processing of masking, in accordance with a timing at which, and/or a direction of incidence in which, a disturbance wave, not depending on the scanning wave, is incident on the receiver unit, a portion of the reception signal output from the receiver unit. The transmission restricting unit restricts a transmission range in which the transmitter unit transmits the scanning wave.
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