Production equipment monitoring system and production equipment monitoring method

    公开(公告)号:US12228912B2

    公开(公告)日:2025-02-18

    申请号:US17658674

    申请日:2022-04-11

    Inventor: Hiroshi Shirouzu

    Abstract: A production equipment monitoring system 20 including: an anomaly index determination unit 23 determining an anomaly index a of a production equipment 10, based on a feature quantity obtained from an equipment information on the production equipment 10; a relevance determination unit 24 determining a degree of relevance D between each of anomalous conditions predicable to occur in the production equipment 10 and an observed condition of the production equipment 10; a detection threshold determination unit 25 determining a single detection threshold th for detecting a degree of anomaly A of the production equipment 10, based on anomaly thresholds at which are thresholds of the anomaly index a corresponding respectively to the anomalous conditions, and on the degree of relevance D; and an anomaly degree detection unit 26 detecting the degree of anomaly A of the production equipment 10, based on the anomaly index a and the detection threshold th.

    Plasma processing system and plasma processing method

    公开(公告)号:US12009190B2

    公开(公告)日:2024-06-11

    申请号:US17658670

    申请日:2022-04-11

    Inventor: Hiroshi Shirouzu

    CPC classification number: H01J37/32935 H01J37/32082 H01J37/32926

    Abstract: A disclosed plasma processing system 10 includes: a plasma processing apparatus 100 including a processing chamber 100a for plasma processing an object 400 to be processed, and at least one component 122, 131 which is at least partially disposed in the processing chamber 100a; a storage unit 301 for storing a recipe including a set value specifying a plasma processing condition; a tolerance determination unit 302 that determines a tolerance of the set value, based on a degree of deterioration of the at least one component 122, 131; and a recipe modification unit 303 that modifies the recipe such that the set value falls within the tolerance, when the set value is outside the tolerance.

    Mover and method for controlling the mover

    公开(公告)号:US11370398B2

    公开(公告)日:2022-06-28

    申请号:US16237846

    申请日:2019-01-02

    Abstract: Disclosed herein is a mover including a plurality of wheels, a body, and a friction braking mechanism. The body has a bottom surface. The body is supported by the plurality of wheels with the bottom surface facing a traveling surface, and travels on the traveling surface by turning the plurality of wheels. The friction braking mechanism applies a brake on the body with at least a portion of the bottom surface or at least a portion of a movable body brought into contact with the traveling surface by switching, while the body is traveling, a state of the movable body from a first state into a second state. The second state is a state where the movable body protrudes from the bottom surface to a different height from in the first state.

    Mover, mover control system, method of detecting object by mover, moving system, and method of controlling mover

    公开(公告)号:US11320831B2

    公开(公告)日:2022-05-03

    申请号:US16221649

    申请日:2018-12-17

    Abstract: Disclosed herein is a mover including an object detecting unit and either a masking processing unit or a transmission restricting unit as an additional processing unit. The object detecting unit detects an object based on a reception signal output from a receiver unit by having a transmitter unit transmit a scanning wave and by having the receiver unit receive a reflected wave, which is a component, reflected from the object, of the scanning wave. The masking processing unit performs masking processing of masking, in accordance with a timing at which, and/or a direction of incidence in which, a disturbance wave, not depending on the scanning wave, is incident on the receiver unit, a portion of the reception signal output from the receiver unit. The transmission restricting unit restricts a transmission range in which the transmitter unit transmits the scanning wave.

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