公开(公告)号：US20160332341A1

公开(公告)日：2016-11-17

申请号：US14997535

申请日：2016-01-17

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： TEPPEI IWASE ,  AKIHIRO ISHIKAWA ,  TOSHIHIKO WADA

IPC: B29C43/50 ,  B29C35/08

CPC classification number: B29C35/0805 ,  B29C37/0003 ,  B29C43/021 ,  B29C2035/0827 ,  B29C2059/023 ,  G03F7/0002

Abstract: An imprinting method includes a resin application process of applying a light curing resin so that the resin covers a surface of the substrate and protrudes from an outer periphery of the substrate to contact an adhesive sheet in a state where a reverse surface of the substrate is adhered to the adhesive sheet, an advance curing process of curing the light curing resin contacting the adhesive sheet by irradiating the substrate with light from the reverse surface side, a pressurizing process of pressing a fine pattern formed in a mold onto the light curing resin on the surface of the substrate, a curing process of curing the light curing resin on the surface of the substrate by irradiating the substrate with light from the surface side and a mold releasing process of releasing the mold from the light curing resin by performing peeling from a portion cured on the adhesive sheet.

Abstract translation: 压印方法包括施加光固化树脂的树脂施加过程，使得树脂覆盖基板的表面并且在基板的相反表面粘附的状态下从基板的外周突出以接触粘合片 通过对来自反面侧的光照射基板来固化与粘合片接触的光固化树脂的预固化工序，将形成在模具中的精细图案压在光固化树脂上的加压工序 基板的表面，通过从表面侧照射基板来固化基板表面上的光固化树脂的固化工序，以及通过从光固化树脂剥离来从光固化树脂脱模的脱模工艺 在粘合片上固化。

公开(公告)号：US20180267209A1

公开(公告)日：2018-09-20

申请号：US15901004

申请日：2018-02-21

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： KEITARO FUJII ,  TEPPEI IWASE ,  YUJI YAMAMOTO ,  NOBUYUKI KAMIKIHARA

IPC: G02B1/11 ,  G06F3/044

CPC classification number: G02B1/11 ,  G02B5/0226 ,  G06F3/041 ,  G06F3/044 ,  G06F2203/04102

Abstract: A film structural member includes a recessed portion formed on a transparent substrate, metal wiring provided on a base of the recessed portion, and a particle layer that is provided on the metal wiring and is configured as an aggregate of particles having an average particle diameter of 300 nm or smaller.

公开(公告)号：US20180321584A1

公开(公告)日：2018-11-08

申请号：US15768030

申请日：2017-06-09

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： AKIHIRO ISHIKAWA ,  TOSIHIKO WADA ,  TEPPEI IWASE

IPC: G03F7/00

CPC classification number: G03F7/0002 ,  B29C33/42 ,  B29C59/02 ,  H01L21/027

Abstract: A mold includes a rugged pattern layer, an inorganic sheet layer, and an elastic sheet layer. The inorganic sheet layer is formed of an inorganic material and supports the rugged pattern layer. The elastic sheet layer supports the inorganic sheet layer.

公开(公告)号：US20160257062A1

公开(公告)日：2016-09-08

申请号：US14990785

申请日：2016-01-07

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： AKIHIRO ISHIKAWA ,  TEPPEI IWASE ,  TOSHIHIKO WADA

IPC: B29C59/04 ,  B29C59/00 ,  B29C59/02

CPC classification number: B29C59/046 ,  B29C37/0003 ,  B29C59/00 ,  B29C59/002 ,  B29C59/02 ,  B29C59/022 ,  B29C59/04 ,  B29C2035/0827 ,  B29C2059/023 ,  B29K2101/12 ,  B29K2105/24 ,  G03F7/0002

Abstract: An imprinting device capable of realizing uniform transfer regardless of the thickness of a substrate includes a stage having a placement area for placing a substrate to which a transferred object is applied, a thin-plate mold with flexibility having a fine pattern on a first surface facing the placement area of the stage, which is held with a predetermined tension and a pressing roll which can press a second surface opposite to the first surface of the mold, in which the stage has plural adsorption holes around the placement area, and the adsorption holes start adsorption in synchronization with movement of the pressing roll.

Abstract translation: 能够实现均匀转印的压印装置，无论衬底的厚度如何，均包括具有用于放置被转印物体的基板的放置区域的台阶，具有微细图案的柔性的薄板模具， 以预定张力保持的台架的放置面积和能够按压与模具的第一面相反的第二面的压辊，其中台架在放置区域周围具有多个吸附孔，吸附孔 与按压辊的移动同步开始吸附。