公开(公告)号：US11567069B2

公开(公告)日：2023-01-31

申请号：US17071578

申请日：2020-10-15

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Takashi Kanno ,  Hiroto Yanagawa

IPC: G01N33/543 ,  G01N21/64 ,  G01N33/553 ,  B82Y15/00 ,  G02B5/00

Abstract: One non-limiting and exemplary embodiment provides a metal microscopic structure capable of detecting a low-concentration analyte with high sensitivity. The metal microscopic structure includes a base member including multiple protrusions arrayed at predetermined intervals, and multiple projections made of a metal film covering the base member and configured to generate surface plasmons upon irradiation with light. A film thickness of the metal film positioned in a bottom portion of a gap between every adjacent two of the multiple projections is greater than a height of the multiple protrusions and is more than or equal to 90% and less than or equal to 100% of a film thickness of the metal film deposited on top portions of the multiple protrusions.