公开(公告)号：US09478449B2

公开(公告)日：2016-10-25

申请号：US14232901

申请日：2012-07-13

申请人： Pascal Gustaaf Vermont ,  Wilhelmus Gerardus Van Velzen ,  Vladimir Ivanovich Kuznetsov ,  Ernst Hendrik August Granneman ,  Gonzalo Felipe Ramirez Troxler

发明人： Pascal Gustaaf Vermont ,  Wilhelmus Gerardus Van Velzen ,  Vladimir Ivanovich Kuznetsov ,  Ernst Hendrik August Granneman ,  Gonzalo Felipe Ramirez Troxler

IPC分类号： H01L21/67 ,  H01L21/66 ,  H01L21/677 ,  C23C16/54 ,  C23C16/52 ,  C23C16/455 ,  C23C16/40

CPC分类号： H01L21/67276 ,  C23C16/403 ,  C23C16/45551 ,  C23C16/52 ,  C23C16/54 ,  H01L21/67259 ,  H01L21/6776 ,  H01L21/67784 ,  H01L22/26

摘要： Disclosed is a process tunnel (102) through which substrates (140) may be transported in a floating condition between two gas bearings (124, 134). To monitor the transport of the substrates through the process tunnel, the upper and lower walls (120, 130) of the tunnel are fitted with at least one substrate detection sensor (S1, . . . , S6) at a respective substrate detection sensor location, said substrate detection sensor being configured to generate a reference signal reflecting a presence of a substrate between said first and second walls near and/or at said substrate detection sensor location. Also provided is a monitoring and control unit (160) that is operably connected to the at least one substrate detection sensor (S1, . . . , S6), and that is configured to record said reference signal as a function of time and to process said reference signal.

摘要翻译： 公开了一种工艺通道（102），衬底（140）可以在浮动状态下在两个气体轴承（124,134）之间传送。 为了监测基板通过处理隧道的输送，隧道的上壁和下壁（120,130）在相应的基板检测传感器位置装配有至少一个基板检测传感器（S1，...，S6） 所述衬底检测传感器被配置为产生反映在所述衬底检测传感器位置附近和/或所述第一和第二壁之间的衬底的存在的参考信号。 还提供了可操作地连接到至少一个基板检测传感器（S1，...，S6）的监视和控制单元（160），并且被配置为记录作为时间的函数的所述参考信号并且处理 所述参考信号。

公开(公告)号：US20140199788A1

公开(公告)日：2014-07-17

申请号：US14232901

申请日：2012-07-13

申请人： Pascal Gustaaf Vermont ,  Wilhelmus Gerardus Van Velzen ,  Vladimir Ivanovich Kuznetsov ,  Ernst Hendrik August Granneman ,  Gonzalo Felipe Ramirez Troxler

发明人： Pascal Gustaaf Vermont ,  Wilhelmus Gerardus Van Velzen ,  Vladimir Ivanovich Kuznetsov ,  Ernst Hendrik August Granneman ,  Gonzalo Felipe Ramirez Troxler

IPC分类号： H01L21/67 ,  C23C16/52 ,  H01L21/66

CPC分类号： H01L21/67276 ,  C23C16/403 ,  C23C16/45551 ,  C23C16/52 ,  C23C16/54 ,  H01L21/67259 ,  H01L21/6776 ,  H01L21/67784 ,  H01L22/26

摘要： Disclosed is a process tunnel (102) through which substrates (140) may be transported in a floating condition between two gas bearings (124, 134). To monitor the transport of the substrates through the process tunnel, the upper and lower walls (120, 130) of the tunnel are fitted with at least one substrate detection sensor (S1, . . . , S6) at a respective substrate detection sensor location, said substrate detection sensor being configured to generate a reference signal reflecting a presence of a substrate between said first and second walls near and/or at said substrate detection sensor location. Also provided is a monitoring and control unit (160) that is operably connected to the at least one substrate detection sensor (S1, . . . , S6), and that is configured to record said reference signal as a function of time and to process said reference signal.

摘要翻译： 公开了一种工艺通道（102），衬底（140）可以在浮动状态下在两个气体轴承（124,134）之间传送。 为了监测基板通过处理隧道的输送，隧道的上壁和下壁（120,130）在相应的基板检测传感器位置装配有至少一个基板检测传感器（S1，...，S6） 所述衬底检测传感器被配置为产生反映在所述衬底检测传感器位置附近和/或所述第一和第二壁之间的衬底的存在的参考信号。 还提供了可操作地连接到至少一个基板检测传感器（S1，...，S6）的监视和控制单元（160），并且被配置为记录作为时间的函数的所述参考信号并且处理 所述参考信号。