公开(公告)号：US20050118529A1

公开(公告)日：2005-06-02

申请号：US11005452

申请日：2004-12-06

申请人： Paul Dentinger ,  Karen Krafcik ,  Kelby Simison

发明人： Paul Dentinger ,  Karen Krafcik ,  Kelby Simison

IPC分类号： C07C381/12 ,  G03C1/492 ,  G03C1/73 ,  G03C1/76 ,  G03F7/004 ,  G03F7/038 ,  G03F7/40

CPC分类号： G03F7/038 ,  C07C381/12 ,  G03F7/0045 ,  G03F7/0046 ,  G03F7/40 ,  Y10S430/115 ,  Y10S430/126

摘要： The use of photoacid generators including an alkoxyphenylphenyliodonium salt and/or bis(t-butylphenyl)iodonium salt in a photoimageable composition helps improve resolution. Suitable photoimageable compositions includes: (a) a multifunctional polymeric epoxy resin that is dissolved in an organic solvent wherein the epoxy resin comprises oligomers of bisphenyl A that is quantitatively protected by glycidyl ether and wherein the oligomers have an average functionality that ranges from about 3 to 12; and a photoacid generator comprising an alkoxyphenylphenyliodonium salt and/or bis(t-butylphenyl)iodonium salt. Preferred alkoxyphenylphenyliodonium salts include 4-octyloxyphenyl phenyliodonium hexafluoroantimonate and 4-methoxyphenyl phenyliodonium hexafluoroantimonate. The photoimageable composition is particularly suited for producing high aspect ration microstructure.

摘要翻译： 在光致成像组合物中使用包含烷氧基苯基苯基碘鎓盐和/或双（叔丁基苯基）碘鎓盐的光酸产生剂有助于提高分辨率。 合适的可光成像组合物包括：（a）溶解在有机溶剂中的多官能聚合物环氧树脂，其中环氧树脂包含由缩水甘油醚定量保护的双苯基A的低聚物，其中低聚物的平均官能度为约3至 12; 和含有烷氧基苯基苯基碘鎓盐和/或双（叔丁基苯基）碘鎓盐的光酸产生剂。 优选的烷氧基苯基碘鎓盐包括六氟锑酸4-辛氧基苯基苯基碘鎓和六氟锑酸4-甲氧基苯基苯基碘鎓。 可光成像组合物特别适用于生产高纵横比微观结构。

公开(公告)号：US20050164125A1

公开(公告)日：2005-07-28

申请号：US11030254

申请日：2005-01-06

申请人： Paul Dentinger ,  Karen Krafcik ,  Kelby Simison

发明人： Paul Dentinger ,  Karen Krafcik ,  Kelby Simison

IPC分类号： C07C381/12 ,  G03C1/492 ,  G03C1/73 ,  G03C1/76 ,  G03F7/004 ,  G03F7/038 ,  G03F7/40

CPC分类号： G03F7/038 ,  C07C381/12 ,  G03F7/0045 ,  G03F7/0046 ,  G03F7/40 ,  Y10S430/115 ,  Y10S430/126

摘要： The use of photoacid generators including an alkoxyphenylphenyliodonium salt and/or bis(t-butylphenyl)iodonium salt in a photoimageable composition helps improve resolution. Suitable photoimageable compositions includes: (a) a multifunctional polymeric epoxy resin that is dissolved in an organic solvent wherein the epoxy resin comprises oligomers of bisphenol A that is quantitatively protected by glycidyl ether and wherein the oligomers have an average functionality that ranges from about 3 to 12; and a photoacid generator comprising an alkoxyphenylphenyliodonium salt and/or bis(t-butylphenyl)iodonium salt. Preferred alkoxyphenylphenyliodonium salts include 4-octyloxyphenyl phenyliodonium hexafluoroantimonate and 4-methoxyphenyl phenyliodonium hexafluoroantimonate. The photoimageable composition is particularly suited for producing high aspect ration microstructure.

摘要翻译： 在光致成像组合物中使用包含烷氧基苯基苯基碘鎓盐和/或双（叔丁基苯基）碘鎓盐的光酸产生剂有助于提高分辨率。 合适的可光成像组合物包括：（a）溶解在有机溶剂中的多官能聚合环氧树脂，其中环氧树脂包含由缩水甘油醚定量保护的双酚A的低聚物，其中低聚物的平均官能度为约3至 12; 和含有烷氧基苯基苯基碘鎓盐和/或双（叔丁基苯基）碘鎓盐的光酸产生剂。 优选的烷氧基苯基碘鎓盐包括六氟锑酸4-辛氧基苯基苯基碘鎓和六氟锑酸4-甲氧基苯基苯基碘鎓。 可光成像组合物特别适用于生产高纵横比微观结构。