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39 条记录 (耗时 0.021 秒)

    Reduction of sulfur emissions from crude fractions
    5.
    发明授权
    Reduction of sulfur emissions from crude fractions 失效
    减少粗馏分的硫排放

    公开(公告)号：US07544239B2

    公开(公告)日：2009-06-09

    申请号：US11250665

    申请日：2005-10-14

    申请人： Paul J. Buras ,  William D. Lee ,  James R. Butler

    发明人： Paul J. Buras ,  William D. Lee ,  James R. Butler

    IPC分类号： C08L95/00

    CPC分类号： C08L95/00 ,  C08L9/06 ,  C08L81/04 ,  E01C7/18 ,  C08L2666/08

    摘要： Methods of modifying crude fractions are described herein. The methods generally include blending a crude fraction with an emissions reducing additive to form a modified crude fraction, wherein the modified crude fraction exhibits reduced sulfur emissions. The emissions reducing additive generally includes a dispersion of a metal oxide.

    摘要翻译： 本文描述了改性粗馏分的方法。 所述方法通常包括将粗馏分与排放减少添加剂混合以形成改性的粗馏分，其中改性的粗馏分表现出减少的硫排放。 减排添加剂通常包括金属氧化物的分散体。

    Electrostatic chuck with compliant coat
    7.
    发明授权
    Electrostatic chuck with compliant coat 有权
    静电卡盘兼容外套

    公开(公告)号：US08023247B2

    公开(公告)日：2011-09-20

    申请号：US12331813

    申请日：2008-12-10

    申请人： Ashwin M. Purohit ,  Marvin R. LaFontaine ,  William D. Lee ,  Richard J. Rzeszut

    发明人： Ashwin M. Purohit ,  Marvin R. LaFontaine ,  William D. Lee ,  Richard J. Rzeszut

    IPC分类号： H01L21/683 ,  C23C16/42

    CPC分类号： H01L21/6831 ,  H02N13/00

    摘要： The present invention is directed to an electrostatic chuck (ESC) with a compliant layer formed from TT-Kote® and a method of forming a clamping plate for an ESC. The ESC comprises a compliant layer having a low friction surface for reducing or eliminating particulates generated from thermal expansion. The method comprises forming a clamping member for a substrate comprising a ceramic material and a ceramic surface, and coating the ceramic surface with a compliant layer comprising an organic silicide or TT-Kote®.

    摘要翻译： 本发明涉及一种具有由TT-Kote制成的顺应层的静电卡盘（ESC）和形成ESC用夹板的方法。 ESC包括具有低摩擦表面的柔顺层，用于减少或消除由热膨胀产生的微粒。 该方法包括形成用于包括陶瓷材料和陶瓷表面的基底的夹紧构件，并且用包含有机硅化物或TT-Kote的柔性层涂覆陶瓷表面。

    ELECTROSTATIC CHUCK GROUND PUNCH
    8.
    发明申请
    ELECTROSTATIC CHUCK GROUND PUNCH 有权
    静电式地埋式挖掘机

    公开(公告)号：US20100110604A1

    公开(公告)日：2010-05-06

    申请号：US12262990

    申请日：2008-10-31

    申请人： David B. Smith ,  William D. Lee ,  Marvin R. LaFontaine ,  Ashwin M. Purohit

    发明人： David B. Smith ,  William D. Lee ,  Marvin R. LaFontaine ,  Ashwin M. Purohit

    IPC分类号： H01L21/683

    CPC分类号： H01L21/6831

    摘要： An electrostatic chuck and method for clamping a workpiece is provided. The ESC comprises a clamping plate having a clamping surface, and one or more electrodes. An electric potential applied to the one or more electrodes selectively clamps the workpiece to the clamping surface. A punch is operably coupled to the clamping plate and an electrical ground, wherein the punch comprises a trigger mechanism and a punch tip. The punch tip translates between extended and retracted positions, wherein a point of the punch tip is proud of the clamping surface when the punch tip is in the extended position. The punch tip is configured to translate toward the clamping surface upon clamping the workpiece to the clamping plate. Upon reaching the retracted position, the trigger mechanism imparts an impact force to the punch tip, forcing the punch tip into the workpiece and providing an electrical ground connection to the workpiece.

    摘要翻译： 提供一种用于夹持工件的静电卡盘和方法。 ESC包括具有夹紧表面的夹板和一个或多个电极。 施加到一个或多个电极的电位选择性地将工件夹紧到夹紧表面。 冲头可操作地联接到夹板和电接地，其中冲头包括扳机机构和冲头。 冲头顶端在延伸位置和缩回位置之间平移，其中当冲头顶端处于延伸位置时，冲头尖端的点对夹紧表面感到骄傲。 冲压头被配置成在将工件夹紧到夹紧板上时朝向夹紧表面平移。 在到达缩回位置时，触发机构向冲头提供冲击力，迫使冲头尖端进入工件并提供与工件的电接地连接。

    Annulus clamping and backside gas cooled electrostatic chuck
    9.
    发明申请
    Annulus clamping and backside gas cooled electrostatic chuck 有权
    环形夹紧和背面气体冷却静电卡盘

    公开(公告)号：US20080144251A1

    公开(公告)日：2008-06-19

    申请号：US11641334

    申请日：2006-12-19

    申请人： Teng Chao D. Tao ,  William D. Lee ,  Marvin R. LaFontaine ,  Ashwin M. Purohit

    发明人： Teng Chao D. Tao ,  William D. Lee ,  Marvin R. LaFontaine ,  Ashwin M. Purohit

    IPC分类号： H01L21/687 ,  H01T23/00

    CPC分类号： H01L21/6833

    摘要： An electrostatic clamp (ESC), system, and method for clamping a workpiece is provided. A clamping plate of the ESC has central disk and an annulus encircling the central disk, wherein the central disk is recessed from the annulus by a gap distance, therein defining a volume. Backside gas delivery apertures are positioned proximate to an interface between the annulus and the central disk. A first voltage to a first electrode of the annulus clamps a peripheral region of the workpiece to a first layer. A second voltage to a second electrode of the central disk generally compensates for a pressure of a backside gas within the volume. The ESC can be formed of J-R- or Coulombic-type materials. A cooling plate associated with the clamping plate further provides cooling by one or more cooling channels configured to route a cooling fluid therethrough.

    摘要翻译： 提供了用于夹紧工件的静电夹（ESC），系统和方法。 ESC的夹紧板具有中心盘和围绕中心盘的环形空间，其中中心盘从环形空间中间隙距离定义一个体积。 背侧气体输送孔位于环形区域与中央盘之间的界面附近。 环形物的第一电极的第一电压将工件的周边区域夹持到第一层。 中心盘的第二电极的第二电压通常补偿体积内的背侧气体的压力。 ESC可由J-R-或库仑型材料形成。 与夹紧板相关联的冷却板还通过一个或多个冷却通道提供冷却，所述冷却通道被配置成使冷却流体从其中引导。