公开(公告)号：US5034199A

公开(公告)日：1991-07-23

申请号：US120015

申请日：1987-11-13

申请人： Paul M. Zavracky ,  Kevin J. O'Connos

发明人： Paul M. Zavracky ,  Kevin J. O'Connos

IPC分类号： C30B13/00 ,  C30B13/24 ,  C30B13/32 ,  C30B29/06 ,  C30B31/12 ,  H01L21/00 ,  H01L21/20 ,  H01L21/324

CPC分类号： H01L21/67115 ,  C30B13/00 ,  C30B13/24 ,  C30B13/32 ,  C30B31/12 ,  Y10S117/90 ,  Y10S117/911 ,  Y10T117/108

摘要： The improved zone-melt recrystallization apparatus is comprised of a port system for providing a thermal barrier between the recrystallization chamber and the loader assembly. A bellows system is used to lift a plurality of pins that support a silicon wafer being recrystallized. Flexure supports are designed to constrain the motion of the pins within the desired direction of motion of the wafer.

摘要翻译： 改进的区域 - 熔融重结晶装置包括用于在再结晶室和装载机组件之间提供热障的端口系统。 波纹管系统用于提升支撑待重结晶的硅晶片的多个销。 弯曲支撑被设计成将销的运动约束在晶片的期望的运动方向上。