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公开(公告)号：US4918930A
公开(公告)日：1990-04-24
申请号：US243707
申请日：1988-09-13
申请人： Peter W. Gaudet , Donald A. Olsen , Michael J. Eacobacci , John T. Harvell , Robert J. Lepofsky , David E. Roche , Steven A. Bender
发明人： Peter W. Gaudet , Donald A. Olsen , Michael J. Eacobacci , John T. Harvell , Robert J. Lepofsky , David E. Roche , Steven A. Bender
CPC分类号： F04D19/04 , F04B37/08 , F04D27/00 , Y10S417/901
摘要： A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.
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公开(公告)号：US06755028B2
公开(公告)日：2004-06-29
申请号：US10225485
申请日：2002-08-20
IPC分类号： B01D800
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04 , Y10S417/901
摘要： In a cryogenic vacuum pump, after determining that a power fail recovery mode is on, and that the temperature is below a setpoint, the cryopump is automatically cooled. If the power fail recovery mode is on, and the temperature is above the setpoint, a regeneration cycle is started automatically. If the power fail recovery mode is off, the cryopump may be maintained in an off state. When a command to turn on a pressure sensing thermocouple (TC) gauge is received, the TC gauge is turned on only if there is not a sufficient amount of gas to ignite. When a command to turn on a roughing valve is received, an additional command must be received before the roughing valve is turned on. When a temperature-sensing diode is faulty, temperature control is automatically turned off. During a regeneration cycle, a purge test is performed. If the purge test passes, heaters are turned on. If the purge test fails, the heaters are turned on only if the temperature reaches a threshold within a predetermined period. Otherwise, the regeneration is aborted.
摘要翻译： 在低温真空泵中，在确定电源故障恢复模式打开并且温度低于设定值之后，低温泵自动冷却。 如果电源故障恢复模式打开，温度高于设定值，则会自动启动再生循环。 如果电源故障恢复模式关闭，则低温泵可能保持在关闭状态。 当接收到打开压力感应热电偶（TC）规格的命令时，只有在没有足够量的气体点燃时，才会打开TC表。 当接收到打开粗加工阀的命令时，在粗加油阀打开之前必须接收附加命令。 当温度感应二极管故障时，温度控制自动关闭。 在再生循环中，进行清洗试验。 如果吹扫测试通过，加热器将打开。 如果吹扫测试失败，则只有在预定时间内温度达到阈值时，加热器才会打开。 否则，再生中止。
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公开(公告)号：US5157928A
公开(公告)日：1992-10-27
申请号：US704664
申请日：1991-05-20
申请人： Peter W. Gaudet , Donald A. Olsen , Michael J. Eacobacci , John T. Harvell , Robert J. Lepofsky , David E. Roche , Steven A. Bender
发明人： Peter W. Gaudet , Donald A. Olsen , Michael J. Eacobacci , John T. Harvell , Robert J. Lepofsky , David E. Roche , Steven A. Bender
CPC分类号： F04D19/04 , F04B37/08 , F04D27/00 , Y10S417/901
摘要： A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.
摘要翻译： 低温真空泵在整体组件中包括与低温泵阵列的第一级和第二级相关联的温度传感器和加热器，粗抽阀和净化阀。 可拆卸地联接在组件中的电子模块响应所有传感器并控制低温泵的所有操作，包括其再生。 系统参数存储在模块中的非易失性存储器中。 在再生程序中包括压力表的自动调零，粗糙泵送时阵列的加热，以及压力比测试的变化，以确定粗抽泵中的失速。 电子模块还在断电后重新启动系统，将压力表的使用限制在安全条件下，在低温泵运行时允许打开阀门之前提供警告并存储传感器校准信息。 通过泵上的控制盘的控制可能受到密码要求的限制。 还提供密码覆盖。
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公开(公告)号：US4577465A
公开(公告)日：1986-03-25
申请号：US609481
申请日：1984-05-11
CPC分类号： F04B37/08 , Y10S417/901
摘要： An oil free vacuum system 10 which comprises a high thermal capacitance cryopump 12 and air ejector 38. The air ejector 38 is used to reduce load lock chamber 16 pressure to an intermediate vacuum. Cryopump 12 further evacuates chamber 12 to the operating vacuum of a work chamber 14. The work chamber 14 is maintained at high vacuum by a main cryopump 20. The main cryopump can be started in an oil free manner through the use of air ejector 38 and high thermal capacitance cryopump 12. A high themal capacitance, high thermal conductance cryopanel is formed of a lead/copper sandwich.
摘要翻译： 无油真空系统10，其包括高热容性低温泵12和空气喷射器38.空气喷射器38用于将负载锁定室16的压力减小到中间真空。 低温泵12进一步将室12抽空到工作室14的操作真空。工作室14由主低温泵20保持在高真空。主低温泵可以通过使用空气喷射器38和 高热电容低温泵12.高导电电容，高导热低温板由铅/铜三明治形成。
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公开(公告)号：US4546613A
公开(公告)日：1985-10-15
申请号：US684967
申请日：1984-12-20
CPC分类号： F04B37/08 , Y10S417/901
摘要： In a cryopump, condensation of gases such as argon, oxygen and nitrogen on surfaces other than the second stage array 38, 40 is avoided to prevent cross over hang up and pressure instability. To prevent condensation of argon, oxygen and nitrogen on the frontal cryopumping array 46, that array is held to a temperature of at least 50.degree. K. A heat load to the first stage increases as the temperature of the first stage drops. That heat load is provided by a high emissivity radiation shield 44 or by a thermal switch 56, 58. Condensation of argon and other gases on the second stage refrigerator cylinder 32 is avoided by a close fitting sleeve 52 positioned over the refrigerator cylinder 32 in thermal contact with the second stage heat sink 30 but out of thermal contact with the cylinder 32.
摘要翻译： 在低温泵中，避免了气流如氩气，氧气和氮气在第二级阵列38,40以外的表面上的冷凝，以防止交叉悬挂和压力不稳定。 为了防止正面低温泵浦阵列46上的氩气，氧气和氮气的冷凝，该阵列被保持在至少50°K的温度。第一级的热负荷随着第一级的温度下降而增加。 该热负荷由高辐射辐射屏蔽44或热开关56,58提供。氩和其它气体在第二级冷藏箱32上的冷凝通过位于冷藏箱32上方的紧密配合的套筒52来避免 与第二级散热器30接触，但不与气缸32热接触。
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公开(公告)号：US06318093B2
公开(公告)日：2001-11-20
申请号：US09826692
申请日：2001-04-05
申请人： Peter W. Gaudet , Donald A. Olsen
发明人： Peter W. Gaudet , Donald A. Olsen
IPC分类号： B01D800
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04 , Y10S417/901
摘要： A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.
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公开(公告)号：US5343708A
公开(公告)日：1994-09-06
申请号：US944040
申请日：1992-09-11
申请人： Peter W. Gaudet , Donald A. Olsen
发明人： Peter W. Gaudet , Donald A. Olsen
CPC分类号： F04D19/04 , F04B37/08 , F04D27/00 , Y10S417/901
摘要： A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.
摘要翻译： 低温真空泵在整体组件中包括与低温泵阵列的第一级和第二级相关联的温度传感器和加热器，粗抽阀和净化阀。 可拆卸地联接在组件中的电子模块响应所有传感器并控制低温泵的所有操作，包括其再生。 系统参数存储在模块中的非易失性存储器中。 在再生程序中包括压力表的自动调零，粗糙泵送时阵列的加热，以及压力比测试的变化，以确定粗抽泵中的失速。 电子模块还在断电后重新启动系统，将压力表的使用限制在安全条件下，在低温泵运行时允许打开阀门之前提供警告并存储传感器校准信息。 通过泵上的控制盘的控制可能受到密码要求的限制。 还提供密码覆盖。
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公开(公告)号：US06460351B2
公开(公告)日：2002-10-08
申请号：US09977559
申请日：2001-10-15
申请人： Peter W. Gaudet , Donald A. Olsen
发明人： Peter W. Gaudet , Donald A. Olsen
IPC分类号： B01D800
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04 , Y10S417/901
摘要： A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.
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公开(公告)号：US5450316A
公开(公告)日：1995-09-12
申请号：US252886
申请日：1994-06-02
CPC分类号： F04D19/04 , F04B37/08 , F04D27/00 , Y10S417/901
摘要： A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.
摘要翻译： 低温真空泵在整体组件中包括与低温泵阵列的第一级和第二级相关联的温度传感器和加热器，粗抽阀和净化阀。 可拆卸地联接在组件中的电子模块响应所有传感器并控制低温泵的所有操作，包括其再生。 系统参数存储在模块中的非易失性存储器中。 在再生程序中包括压力表的自动调零，粗糙泵送时阵列的加热，以及压力比测试的变化，以确定粗抽泵中的失速。 电子模块还在断电后重新启动系统，将压力表的使用限制在安全条件下，在低温泵运行时允许打开阀门之前提供警告并存储传感器校准信息。 通过泵上的控制盘的控制可能受到密码要求的限制。 还提供密码覆盖。
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公开(公告)号：US4365225A
公开(公告)日：1982-12-21
申请号：US146979
申请日：1980-05-05
CPC分类号： H01H61/02 , H01H2037/5454
摘要： A time delay relay has a switch assembly, a spring terminal assembly, and an electrical resistance heater unit of an inexpensive construction held together in a reliable and economical manner by a pair of easily mounted metal spring clips. The clips have opposite ends each securely hooked over portions of the terminal assembly and resiliently engaged with respective, oppositely-facing surfaces of the switch and terminal assemblies so that the heater unit is firmly held in a predetermined position in the relay with opposite electrical poles of the unit resiliently engaged with respective terminals in the terminal assembly for directing electrical current through the heater, so that a thermally-responsive dished thermostatic disc is disposed in close heat-transfer relation to the heater unit at a location where it is free to move at a precisely predetermined temperature as it is heated by the heater unit, and so that a motion transfer pin is guided for free movement in response to the disc movement to provide snap-acting opening and closing of electrical contacts in the switch assembly.
摘要翻译： 时间延迟继电器具有开关组件，弹簧端子组件和廉价结构的电阻加热器单元，其通过一对易于安装的金属弹簧夹以可靠且经济的方式保持在一起。 夹具具有相对的端部，每个端部均牢固地钩在端子组件的部分上并与开关和端子组件的相应的相对面的表面弹性地接合，使得加热器单元牢固地保持在继电器中的预定位置， 该单元与端子组件中的各个端子弹性地接合以引导电流通过加热器，使得热响应的碟形恒温盘以与其自由移动的位置以更接近的热传递关系设置在加热器单元 在由加热器单元加热时精确地预定的温度，并且使得运动传递销被引导以响应于盘移动而自由运动，以提供开关组件中的电触点的卡扣动作的打开和关闭。
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