公开(公告)号：US06315834B1

公开(公告)日：2001-11-13

申请号：US09427201

申请日：1999-10-25

申请人： Ping-Chung Chung ,  Tsung-Lin Lu ,  Hunter Chung ,  Chin-Hsien Chen ,  Weng-Yi Chen ,  Jack Yao ,  Chienfeng Chen

发明人： Ping-Chung Chung ,  Tsung-Lin Lu ,  Hunter Chung ,  Chin-Hsien Chen ,  Weng-Yi Chen ,  Jack Yao ,  Chienfeng Chen

IPC分类号： C03C2300

CPC分类号： C23C16/4407 ,  C23G1/24

摘要： A method for removing extraneous matters from a stainless device is provided. The method includes the steps of (a) providing a container for holding a fluorine-containing neutral solution therein, (b) immersing said stainless device in said fluorine-containing neutral solution to remove said extraneous matters from said stainless device, and (c) heating and swirling said fluorine-containing solution. The fluorine-containing neutral solution is made from neutralizing hydrofluoric acid (HF) with ammonium hydroxide (NH4OH), neutralizing hydrofluoric acid (HF) with ammonium fluoride (NH4F), or dissolving ammonium acid fluoride (NH4F) in a deionized water (DIW).

摘要翻译： 提供了从不锈钢装置中除去外来物质的方法。 该方法包括以下步骤：（a）在其中提供用于保持含氟中性溶液的容器，（b）将所述不锈钢装置浸入所述含氟中性溶液中以从所述不锈钢装置中除去所述外来物质;（c） 加热和旋转所述含氟溶液。 含氟中性溶液是用氢氧化铵（NH 4 OH）中和氢氟酸（HF），中和氢氟酸（HF）与氟化铵（NH4F）或将铵态氟化铵（NH4F）溶解在去离子水（DIW）中制成的， 。

公开(公告)号：US06187080B1

公开(公告)日：2001-02-13

申请号：US09370487

申请日：1999-08-09

申请人： Chung Ping-Chung ,  Lu Tsung-Lin ,  Chi-Hsien Chen ,  Jing-Yi Huang ,  Ju-Long Lee ,  Hunter Chung ,  Chien-Feng Chen

发明人： Chung Ping-Chung ,  Lu Tsung-Lin ,  Chi-Hsien Chen ,  Jing-Yi Huang ,  Ju-Long Lee ,  Hunter Chung ,  Chien-Feng Chen

IPC分类号： B01D5314

CPC分类号： B01D46/0065 ,  B01D53/68 ,  B01D53/74 ,  B01D2257/204 ,  B08B9/00 ,  C23C16/4412 ,  Y02C20/30

摘要： An exhaust gas treatment apparatus for treating exhaust gas generated in semiconductor manufacturing processes. It includes a main pipe, a gas vortex means, a water vortex means, an U pipe and a discharge pipe. The main pipe transforms the exhaust gases to waste powder which are discharged out through the U pipe and the discharge pipe. The gas vortex means and water vortex means are located below the main pipe for generating annular and even downward gas flow and water flow at the outlet of the main pipe for preventing reflux of waste powder from entering into the main pipe. Waste powder thus won't deposit around the outlet. Scraper in the main pipe won't be stuck or deformed. Waste powder may be discharged out through the U pipe and discharge pipe smoothly and efficiently.

摘要翻译： 一种用于处理在半导体制造工艺中产生的废气的排气处理装置。 它包括主管，气体涡流装置，水涡流装置，U型管和排放管。 主管将废气转换成通过U管和排放管排出的废粉。 气体涡流装置和水涡流装置位于主管下方，用于在主管出口处产生环形和均匀的向下气流和水流，以防止废粉回流进入主管。 因此，废粉不会在出口附近沉积。 主管中的刮刀不会卡住或变形。 废粉可以通过U型管和排水管顺畅，高效地排出。

公开(公告)号：US6095063A

公开(公告)日：2000-08-01

申请号：US383649

申请日：1999-08-26

申请人： Ju-Long Lee ,  Hunter Chung

发明人： Ju-Long Lee ,  Hunter Chung

IPC分类号： F23G7/06 ,  F23J1/00 ,  F23J15/00 ,  F23J11/00

CPC分类号： F23J1/00 ,  F23G7/065 ,  F23G2207/60 ,  F23J2217/60

摘要： An exhaust treatment machine. The exhaust treatment machine has a burning chamber and a wet chamber. Water is injected into the wet chamber by a water inlet at a bottom portion of the wet chamber. At least two rotor blades are installed over the bottom of the wet chamber to generate a vortex flow of the water. Thus, the vortex flow of the water acentrically flushes away the product produced in the burning chamber and removes it via a drainpipe. Furthermore, those clots agglomerated from the powers produced in the burning chamber are fragmented by the rotor blades. The problems of blocking the drainpipe is thus resolved.

摘要翻译： 排气处理机。 废气处理机具有燃烧室和湿室。 水通过湿室底部的进水口注入湿室。 至少两个转子叶片安装在湿室底部以产生水的涡流。 因此，水的旋涡流动地冲洗掉在燃烧室中产生的产品并通过排水管去除它。 此外，从燃烧室产生的功率聚集的那些凝块被转子叶片分段。 因此解决了阻塞排水管的问题。