Abstract:
This disclosure provides devices and methods of reducing stiction during a fluid-filling process. A device can include two substrates with movable MEMS components on at least one of the substrates. The device can include a fluid between the two substrates and surrounding or at least partially surrounding the movable MEMS components, where the fluid can serve as a lubricant for the movable MEMS components. The fluid can be a liquid solution doped with a surface energy modifier, where the surface energy modifier includes a nonpolar functional group R. In some implementations, the nonpolar functional group R can be selected from the group consisting of: alkyl, aryl and naphthenic.
Abstract:
This disclosure provides systems, methods and apparatus for packaging a display device, such as an electromechanical systems (EMS) device, with a seal. In one aspect, the display device includes a seal or sealant surrounding a display region of the display device in contact with and between two substrates. The sealant can include an epoxy matrix with a plurality of first spacers and a plurality of second spacers. In some implementations, the first spacers can be about the same size and define a substrate-to-substrate gap between the two substrates. In some implementations, each of the second spacers can be smaller than the first spacers, where the second spacers have a water vapor transmission rate less than the epoxy.