Semiconductor encapsulation method
    3.
    发明授权
    Semiconductor encapsulation method 失效
    半导体封装方法

    公开(公告)号:US5930652A

    公开(公告)日:1999-07-27

    申请号:US654364

    申请日:1996-05-28

    摘要: An encapsulant (17) is applied to a semiconductor wafer (16). The bottom surface (28) of the wafer (16) is held substantially planar while curing the encapsulant (17). The bottom surface (28) is held against a substantially planar support plate (12) to facilitate holding the wafer (16) substantially planar. A polisher plate (18) is pressed against the encapsulant (17) to assist ensuring that the encapsulant has a substantially smooth surface and substantially uniform thickness.

    摘要翻译: 将密封剂(17)施加到半导体晶片(16)。 晶片(16)的底表面(28)在固化密封剂(17)的同时被保持为基本平坦的。 底表面(28)被保持抵靠基本上平面的支撑板(12),以便于将晶片(16)保持基本平坦。 抛光板(18)被压靠在密封剂(17)上,以帮助确保密封剂具有基本平滑的表面和基本均匀的厚度。