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公开(公告)号:US09698267B2
公开(公告)日:2017-07-04
申请号:US14320897
申请日:2014-07-01
Applicant: QUALCOMM Incorporated
Inventor: Stanley Seungchul Song , Mohamed Hassan Abu-Rahma , Beom-Mo Han
IPC: H01L29/786 , H01L29/78 , H01L27/108 , H01L29/66 , G11C11/40
CPC classification number: H01L29/785 , G11C11/40 , H01L27/108 , H01L27/10802 , H01L27/10826 , H01L27/10879 , H01L29/66795 , H01L29/7831 , H01L29/7841 , H01L29/7855 , H01L29/78648
Abstract: A transistor is disclosed and includes forming a gate of a transistor within a substrate having a surface and a buried oxide (BOX) layer within the substrate and adjacent to the gate at a first BOX layer face. The method also includes a raised source-drain channel (“fin”), where at least a portion of the fin extends from the surface of the substrate, and where the fin has a first fin face adjacent to a second BOX layer face of the BOX layer.