Partial coherence mitigation in video measurement systems via illumination apodization

    公开(公告)号:US11835330B2

    公开(公告)日:2023-12-05

    申请号:US17166239

    申请日:2021-02-03

    IPC分类号: G01B11/02 G02B5/02 G02B26/08

    摘要: A video measurement system for measuring a test object comprising an imaging system comprising an imager having an imaging pupil, the imager arranged for viewing at least a portion of a silhouette of the test object by receiving light transmitted by the test object over a first angular extent; and an illumination system comprising (i) an illumination source; (ii) output having a second angular extent in object space that is larger than the first angular extent received by the imaging pupil; and (iii) a substrate arranged to diffuse light from the illumination source, the substrate having an axial centerline and a light obscuration element, wherein the light obscuration element is at least approximately coaxial to the axial centerline of the substrate, and wherein the pupils of the illumination and imaging systems are in at least approximately conjugate image planes.

    NON-INVASIVE ALIGNMENT METHOD AND SYSTEM FOR IMAGER-ILLUMINATOR OPTICAL MEASUREMENT MACHINES

    公开(公告)号:US20220341725A1

    公开(公告)日:2022-10-27

    申请号:US17240345

    申请日:2021-04-26

    IPC分类号: G01B11/02 G01B11/00 G02B27/30

    摘要: A backlight optical alignment system comprises an illumination system having an illumination pupil and an illuminator configured to generate an output, wherein the illumination system includes a rotationally symmetric illumination distribution having an illumination axis, an imaging system having an imaging sensor comprising at least one detector element, an imaging pupil, and an acceptance cone in object space of the imaging system having an optical axis, wherein at least a portion of the imaging pupil is filled by the illumination system output when a portion of the illumination distribution overlaps with the acceptance cone, and a first substrate disposed in object space between the illumination system and the imaging system, wherein the solid substrate is adjustable to generate a change in signal intensity from the imaging sensor when the illumination axis of the illumination distribution is misaligned with the optical axis of the acceptance cone.

    MULTIPLE BEAM SCANNING SYSTEM FOR MEASURING MACHINE

    公开(公告)号:US20190145757A1

    公开(公告)日:2019-05-16

    申请号:US15814525

    申请日:2017-11-16

    IPC分类号: G01B11/24 G01B9/02

    摘要: An optical measuring system for a measuring machine includes at least two scanning devices for intermittently moving through alternately timed sequences of static measuring positions at which a measuring beam is directed to and from a test object. An optical switch selectively routes the measuring beam through any one of the scanning devices that has settled into one of the static measuring positions.

    METHOD FOR FIELD-DEPENDENT ALIGNMENT OF IMAGING OPTICS TO SIMILAR-APERTURE ILLUMINATION SYSTEM

    公开(公告)号:US20240080570A1

    公开(公告)日:2024-03-07

    申请号:US18201417

    申请日:2023-05-24

    摘要: An optical alignment system having a field of view comprising an illumination system having an illumination pupil and a light source, wherein the illumination system produces a first illumination angular distribution having a first illumination axis, an imaging system having an imaging sensor comprising at least one detector element, and an imaging pupil, and an acceptance cone of the imaging system having an optical axis, wherein at least a portion of the imaging pupil is filled by the illumination system output when a portion of the first illumination angular distribution overlaps with the acceptance cone, and a first tapered substrate having a first tapered and transmissive surface, the first tapered substrate removably disposed in object space between the illumination system and the imaging system, wherein the tapered substrate is rotated and a change in signal intensity is monitored to quantify field dependent alignment between the illumination system and the imaging system.

    PARTIAL COHERENCE MITIGATION IN VIDEO MEASUREMENT SYSTEMS VIA ILLUMINATION APODIZATION

    公开(公告)号:US20220244038A1

    公开(公告)日:2022-08-04

    申请号:US17166239

    申请日:2021-02-03

    IPC分类号: G01B11/02 G02B26/08 G02B5/02

    摘要: A video measurement system for measuring a test object comprising an imaging system comprising an imager having an imaging pupil, the imager arranged for viewing at least a portion of a silhouette of the test object by receiving light transmitted by the test object over a first angular extent; and an illumination system comprising (i) an illumination source; (ii) output having a second angular extent in object space that is larger than the first angular extent received by the imaging pupil; and (iii) a substrate arranged to diffuse light from the illumination source, the substrate having an axial centerline and a light obscuration element, wherein the light obscuration element is at least approximately coaxial to the axial centerline of the substrate, and wherein the pupils of the illumination and imaging systems are in at least approximately conjugate image planes.