公开(公告)号：US20180048280A1

公开(公告)日：2018-02-15

申请号：US15334459

申请日：2016-10-26

Applicant: Qorvo US, Inc.

Inventor： Matthew Ryder ,  Rio Rivas ,  Thayne Edwards

IPC: H03H9/02 ,  G01N33/536 ,  H03H3/02 ,  H03H9/17 ,  H03H9/13

CPC classification number: H03H9/02015 ,  G01N29/022 ,  G01N29/036 ,  G01N33/536 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0426 ,  H03H3/02 ,  H03H9/131 ,  H03H9/175 ,  H03H2003/027 ,  H03H2009/155

Abstract: A micro-electrical-mechanical system (MEMS) resonator device includes at least one functionalization material arranged over at least a central portion, but less than an entirety, of a top side electrode. For an active region exhibiting greatest sensitivity at a center point and reduced sensitivity along its periphery, omitting functionalization material over at least one peripheral portion of a resonator active region prevents analyte binding in regions of lowest sensitivity. The at least one functionalization material extends a maximum length in a range of from about 20% to about 95% of an active area length and extends a maximum width in a range of from about 50% to 100% of an active area width. Methods for fabricating MEMS resonator devices are also provided.