公开(公告)号：US20050003098A1

公开(公告)日：2005-01-06

申请号：US10909735

申请日：2004-08-02

申请人： Qunter Kohler ,  William Esswein ,  Seth Kirk ,  Brian Gates

发明人： Qunter Kohler ,  William Esswein ,  Seth Kirk ,  Brian Gates

IPC分类号： C23C16/50 ,  B05D7/24 ,  C23C16/448 ,  C23C16/513 ,  H01J37/32 ,  C08F2/46 ,  H05H1/00

CPC分类号： B05D1/62 ,  C23C16/4485 ,  C23C16/513 ,  Y10T428/269 ,  Y10T428/273 ,  Y10T428/31663

摘要： The present invention provides a method for the formation of an organic coating on a substrate. The method includes: providing a substrate in a vacuum; providing at least one vaporized organic material comprising at least one component from at least one source, wherein the vaporized organic material is capable of condensing in a vacuum of less than about 130 Pa; providing a plasma from at least one source other than the source of the vaporized organic material; directing the vaporized organic material and the plasma toward the substrate; and causing the vaporized organic material to condense and polymerize on the substrate in the presence of the plasma to form an organic coating.

摘要翻译： 本发明提供了在基材上形成有机涂层的方法。 该方法包括：在真空中提供衬底; 提供至少一种包含至少一种来自至少一种源的组分的汽化有机材料，其中所述蒸发的有机材料能够在小于约130Pa的真空中冷凝; 从除蒸发的有机材料的源之外的至少一个源提供等离子体; 将蒸发的有机材料和等离子体引向衬底; 并使蒸发的有机材料在等离子体存在下在衬底上冷凝和聚合以形成有机涂层。