LOW DARK CURRENT RADIATION DETECTOR AND METHOD OF MAKING THE SAME

    公开(公告)号:US20220107431A1

    公开(公告)日:2022-04-07

    申请号:US17064089

    申请日:2020-10-06

    IPC分类号: G01T1/24 H01L27/146

    摘要: A radiation sensor includes a radiation-sensitive semiconductor layer, a cathode electrode disposed over a front side of the radiation-sensitive semiconductor layer that is configured to be exposed to radiation, at least one anode electrode disposed over a backside of the radiation-sensitive semiconductor layer, and a potential barrier layer located between the cathode electrode and the front side of the radiation-sensitive semiconductor layer.