公开(公告)号：US11112344B2

公开(公告)日：2021-09-07

申请号：US16807459

申请日：2020-03-03

Applicant: Kioxia Corporation ,  RION Co., Ltd.

Inventor： Hiroshi Tomita ,  Hidekazu Hayashi ,  Eishi Shiobara ,  Kaoru Kondo ,  Takuya Tabuchi ,  Kazuna Bando ,  Sota Kondo

IPC: G01N15/14 ,  G01N15/02 ,  G01N21/53 ,  G01N15/00

Abstract: According to one embodiment, a particle measuring method is disclosed. The method includes irradiating a detection liquid with light. The detection liquid contains methyl salicylate. The method further includes converting scattered light from the detection liquid into an electric signal by using photoelectric conversion after irradiating the detection liquid with the light. The method further includes performing a particle measurement on the detection liquid by using the electric signal.

公开(公告)号：US12265008B2

公开(公告)日：2025-04-01

申请号：US17642940

申请日：2020-12-17

Applicant: RION CO., LTD.

Inventor： Kaoru Kondo ,  Kazuna Bando ,  Takuya Tabuchi ,  Sota Kondo

IPC: G01N15/0227 ,  G01N21/05 ,  G01N21/01

Abstract: Provided is a particle measurement device in which irradiation light emitted by a light source is expanded by an expander in a shape satisfying the requirements of a diffractive optical element, converted into parallel light, and made to enter the diffractive optical element. The diffractive optical element shapes the irradiation light entering therein into a flat top beam in which the cross section in the focal position thereof has an elongate rectangle shape. The intensity distribution of light can be made substantially uniform in a detection area formed by the shaped irradiation light.

公开(公告)号：US11774340B2

公开(公告)日：2023-10-03

申请号：US17276847

申请日：2019-09-30

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY ,  RION Co., Ltd. ,  Kioxia Corporation

Inventor： Haruhisa Kato ,  Yusuke Matsuura ,  Ayako Nakamura ,  Kaoru Kondo ,  Takuya Tabuchi ,  Hiroshi Tomita ,  Hidekazu Hayashi

IPC: G01N15/02 ,  G06T7/80 ,  G06T7/20 ,  G06T7/60

CPC classification number: G01N15/0227 ,  G06T7/20 ,  G06T7/60 ,  G06T7/80 ,  G06T2207/10016

Abstract: For an easy calibration using calibration particles, provided is a measuring device to capture images of target objects. An image analyzer acquires multiple images obtained at a predetermined time interval, (a) specifies the mean-square displacement of a bright point of a calibration particle based on the displacement of the bright point of the calibration particle in the multiple images in a calibration mode, and (b) specifies the mean-square displacement of a bright point of the target particle based on the displacement of the bright point of the target particle in the multiple images in a measurement mode. A particle size analyzer (c) derives the particle size of the target particle from the mean-square displacement of the bright point of the target particle based on the mean-square displacement of the bright point of the calibration particle and the particle size of the calibration particle in an analysis mode.