公开(公告)号：US11112344B2

公开(公告)日：2021-09-07

申请号：US16807459

申请日：2020-03-03

Applicant: Kioxia Corporation ,  RION Co., Ltd.

Inventor： Hiroshi Tomita ,  Hidekazu Hayashi ,  Eishi Shiobara ,  Kaoru Kondo ,  Takuya Tabuchi ,  Kazuna Bando ,  Sota Kondo

IPC: G01N15/14 ,  G01N15/02 ,  G01N21/53 ,  G01N15/00

Abstract: According to one embodiment, a particle measuring method is disclosed. The method includes irradiating a detection liquid with light. The detection liquid contains methyl salicylate. The method further includes converting scattered light from the detection liquid into an electric signal by using photoelectric conversion after irradiating the detection liquid with the light. The method further includes performing a particle measurement on the detection liquid by using the electric signal.

公开(公告)号：US12265008B2

公开(公告)日：2025-04-01

申请号：US17642940

申请日：2020-12-17

Applicant: RION CO., LTD.

Inventor： Kaoru Kondo ,  Kazuna Bando ,  Takuya Tabuchi ,  Sota Kondo

IPC: G01N15/0227 ,  G01N21/05 ,  G01N21/01

Abstract: Provided is a particle measurement device in which irradiation light emitted by a light source is expanded by an expander in a shape satisfying the requirements of a diffractive optical element, converted into parallel light, and made to enter the diffractive optical element. The diffractive optical element shapes the irradiation light entering therein into a flat top beam in which the cross section in the focal position thereof has an elongate rectangle shape. The intensity distribution of light can be made substantially uniform in a detection area formed by the shaped irradiation light.