公开(公告)号：US08338194B2

公开(公告)日：2012-12-25

申请号：US12669714

申请日：2008-07-09

申请人： Raik Hesse ,  Hans-Werner Schock ,  Daniel Abou-Ras ,  Thomas Unold

发明人： Raik Hesse ,  Hans-Werner Schock ,  Daniel Abou-Ras ,  Thomas Unold

IPC分类号： H01L21/66

CPC分类号： G01N21/00 ,  G01B11/0625 ,  G01B11/0683 ,  G01N21/45 ,  G01N21/8422

摘要： A method for in situ determination of a material composition of optically thin layers deposited from a vapor phase onto a substrate includes irradiating the substrate with incoherent light of at least three different wavelengths, optically detecting in a spatially resolved manner a reflection intensity of a diffuse or a direct light scattering emanating from a deposited layer outside of a total reflection, concurrently providing numerical values of the detected reflection intensity to an optical layer model based on general line transmission theory, ascertaining values for the optical layer parameters of the deposited layer from the optical layer model for the at least three different wavelengths by numerically adapting the optical layer model to a time characteristic of the detected reflection intensities, and quantitatively determining a material composition of the deposited layer from the ascertained values by comparing the ascertained values to standard values.

摘要翻译： 用于原位测定从气相沉积到衬底上的光学薄层的材料组成的方法包括用至少三种不同波长的非相干光照射衬底，以空间分辨的方式光学地检测扩散的或 从全反射之外的沉积层发出的直接光散射，同时基于通用线传输理论将检测到的反射强度的数值提供给光学层模型，从光学上确定沉积层的光学层参数的值 通过将光学层模型数值地适应于所检测的反射强度的时间特性，并且通过将确定的值与标准值进行比较，从确定的值定量地确定沉积层的材料组成，从而对至少三种不同波长的层模型进行定量确定。

公开(公告)号：US20100291714A1

公开(公告)日：2010-11-18

申请号：US12669714

申请日：2008-07-09

申请人： Raik Hesse ,  Hans-Werner Schock ,  Daniel Abou-Ras ,  Thomas Unold

发明人： Raik Hesse ,  Hans-Werner Schock ,  Daniel Abou-Ras ,  Thomas Unold

IPC分类号： H01L21/66 ,  G01N21/00 ,  G01B11/06 ,  G01N21/45 ,  G01N21/55 ,  G01N21/47

CPC分类号： G01N21/00 ,  G01B11/0625 ,  G01B11/0683 ,  G01N21/45 ,  G01N21/8422

摘要： A system and method for in situ determination of a material composition of optically thin layers deposited from a vapor phase onto a substrate includes irradiating the substrate with incoherent light of at least three different wavelengths, optically detecting in a spatially resolved manner a reflection intensity of a diffuse or a direct light scattering emanating from a deposited layer outside of a total reflection, concurrently providing numerical values of the detected reflection intensity to an optical layer model based on general line transmission theory, ascertaining values for the optical layer parameters of the deposited layer from the optical layer model for the at least three different wavelengths by numerically adapting the optical layer model to a time characteristic of the detected reflection intensities, and quantitatively determining a material composition of the deposited layer from the ascertained values by comparing the ascertained values to standard values.

摘要翻译： 用于原位测定从气相沉积到衬底上的光学薄层的材料组成的系统和方法包括用至少三种不同波长的非相干光照射衬底，以空间分辨的方式光学检测反射强度 扩散或从全反射之外的沉积层发出的直接光散射，同时基于通用线传输理论将检测到的反射强度的数值提供给光学层模型，从而确定沉积层的光学层参数的值 通过将光学层模型数值地适应于所检测的反射强度的时间特性，并且通过将确定的值与标准值进行比较来定量地确定沉积层的材料成分，从而确定至少三种不同波长的光学层模型 。