USE OF FLUORESCING DYE IN PRETREATMENT TO IMPROVE APPLICATION AND RINSING PROCESS
    1.
    发明申请
    USE OF FLUORESCING DYE IN PRETREATMENT TO IMPROVE APPLICATION AND RINSING PROCESS 审中-公开
    荧光染料在预处理中的应用和应用和研磨过程的应用

    公开(公告)号:US20110223316A1

    公开(公告)日:2011-09-15

    申请号:US12722054

    申请日:2010-03-11

    IPC分类号: B05D5/06 C09K11/08 C09K11/70

    CPC分类号: C23C22/08 C23C22/77

    摘要: A process for pretreating a substrate is disclosed. The process includes applying a composition comprising a fluorescing agent to treat an area of the substrate. The treated substrate area is then rinsed to remove excess composition. The rinsed substrate area is exposed to an energy source whereby the fluorescing agent exhibits a color upon exposure to the energy source to detect excess composition remaining on the rinsed substrate.

    摘要翻译: 公开了一种用于预处理衬底的方法。 该方法包括施加包含荧光剂的组合物以处理底物的区域。 然后漂洗经处理的基底区域以除去过量的组合物。 冲洗的基底区域暴露于能量源,由此荧光剂在暴露于能量源时显示颜色,以检测残留在漂洗的基底上的过量组合物。