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公开(公告)号：US5012618A
公开(公告)日：1991-05-07
申请号：US454284
申请日：1989-12-21
摘要： Method and apparatus for treating the surface of a magnetic disc to remove surface asperities and loosely bound material. The disc is alternatively treated by contact with a pair of moving belt-like tapes, a pair of flying heads, and second contact with the belt-like tape, with the disc carried at a fixed position for rotation in a vertical plane throughout, but rotated at a higher speed during the intermediate flying waffling step. The first and/or second tape-treatment steps can be used to apply a lubricant film to the disc surface.
摘要翻译： 用于处理磁盘表面以去除表面粗糙度和松散结合的材料的方法和设备。 通过与一对移动的带状带，一对飞头和与带状带的第二接触接触来处理该盘，该盘被带入固定位置，以便在整个垂直平面中旋转，但是 在中间飞行华夫饼步骤期间以更高的速度旋转。 第一和/或第二带处理步骤可以用于将润滑剂膜施加到盘表面。
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公开(公告)号：US4604179A
公开(公告)日：1986-08-05
申请号：US706737
申请日：1985-02-28
申请人： Atef Eltoukhy , Rick C. Price
发明人： Atef Eltoukhy , Rick C. Price
CPC分类号： G11B5/64 , C23C14/044 , G11B5/84 , G11B5/851 , Y10T428/12535 , Y10T428/12854
摘要： A baffle for use in achieving a substantially isotropic grain structure in a crystalline layer which is sputtered onto a substrate by moving the substrate linearly, and without rotation, in a front-to-back direction below a sputtering target. The baffle has front and back shields which are adapted to limit deposition of sputtered material onto the moving substrate substantially to substrate regions which directly underlie the target. A pair of strips in the baffle are constructed to effect substantially symmetrical sputtering of material onto the substrate surface from opposite target side directions, to produce an isotropic crystal structure during early phases of film deposition.
摘要翻译： 一种挡板，用于通过在垂直于溅射靶的前后方向上直线运动并且不旋转地将衬底溅射到基底上而实现基本上各向同性的晶粒结构。 挡板具有前屏蔽和后屏蔽，其适于限制将溅射的材料沉积到移动的基板上，基本上直接位于靶的正下方的基底区域上。 挡板中的一对条被构造成使材料从相对的目标侧面方向基本上对称地溅射到基板表面上，以在膜沉积的早期阶段产生各向同性的晶体结构。
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