INSPECTION APPARATUS AND INSPECTION METHOD

    公开(公告)号:US20230098041A1

    公开(公告)日:2023-03-30

    申请号:US17954362

    申请日:2022-09-28

    IPC分类号: G01N25/72 G01N21/88

    摘要: An inspection apparatus includes: a light emitter to emit light to a sealing portion of a package containing a light energy absorbing material, the light having a wavelength absorbable by the light energy absorbing material; a light receiver to receive thermal radiation from the sealing portion as thermal information; and circuitry including multiple image processing algorithms, the circuitry to: acquire the thermal information on the sealing portion from the light receiving unit as a two-dimensional image; determine whether the sealing portion is pass or fail based on the two-dimensional image acquired; and discriminate a type of a sealing defect from other types of sealing defects previously set in the multiple image processing algorithms in response to a determination that the sealing portion is fail.