Laser thermal imaging
    1.
    发明授权
    Laser thermal imaging 失效
    激光热成像

    公开(公告)号:US08563928B2

    公开(公告)日:2013-10-22

    申请号:US12913679

    申请日:2010-10-27

    申请人: Robert Aaron Falk

    发明人: Robert Aaron Falk

    IPC分类号: G02F1/01

    CPC分类号: G01R31/311

    摘要: Methods and apparatus for producing sub-diffraction limited images utilizing an exponential scaling effect. An exemplary system provides an optical source that focuses an optical beam onto a target. The focused optical beam has sufficient optical intensity to induce an exponential signal response within the target. A detection device detects the exponential signal response. A scanning device scans the focused optical source and another device records the detection of the exponential signal response for purposes of producing a sub-diffraction limited image. The system further includes a display device that displays at least a portion of the recorded detection.

    摘要翻译: 使用指数缩放效应产生亚衍射限制图像的方法和装置。 示例性系统提供将光束聚焦到目标上的光源。 聚焦光束具有足够的光强度以在目标内诱发指数信号响应。 检测装置检测指数信号响应。 为了产生副衍射限制图像,扫描装置扫描聚焦的光源,另一个装置记录指数信号响应的检测。 该系统还包括显示记录检测的至少一部分的显示装置。

    Schlieren method for imaging semiconductor device properties
    2.
    发明授权
    Schlieren method for imaging semiconductor device properties 失效
    Schlieren方法对半导体器件性能进行成像

    公开(公告)号:US06181416B2

    公开(公告)日:2001-01-30

    申请号:US09292101

    申请日:1999-04-14

    申请人: Robert Aaron Falk

    发明人: Robert Aaron Falk

    IPC分类号: G01N2141

    CPC分类号: G01N21/455

    摘要: An optical beam (3) passes through an illuminator (18), a semiconductor device (70), and an imager (20) to form a test object image (17) on a camera (16). Intensity variations in the object image (17) correspond to carrier density and temperature gradients inside the semiconductor device (70).

    摘要翻译: 光束(3)通过照明器(18),半导体器件(70)和成像器(20),以在相机(16)上形成测试对象图像(17)。 对象图像(17)中的强度变化对应于半导体器件(70)内的载流子密度和温度梯度。

    Laser Thermal Imaging
    3.
    发明申请
    Laser Thermal Imaging 失效
    激光热成像

    公开(公告)号:US20110095186A1

    公开(公告)日:2011-04-28

    申请号:US12913679

    申请日:2010-10-27

    申请人: Robert Aaron Falk

    发明人: Robert Aaron Falk

    CPC分类号: G01R31/311

    摘要: Methods and apparatus for producing sub-diffraction limited images utilizing an exponential scaling effect. An exemplary system provides an optical source that focuses an optical beam onto a target. The focused optical beam has sufficient optical intensity to induce an exponential signal response within the target. A detection device detects the exponential signal response. A scanning device scans the focused optical source and another device records the detection of the exponential signal response for purposes of producing a sub-diffraction limited image. The system further includes a display device that displays at least a portion of the recorded detection.

    摘要翻译: 使用指数缩放效应产生亚衍射限制图像的方法和装置。 示例性系统提供将光束聚焦到目标上的光源。 聚焦光束具有足够的光强度以在目标内诱发指数信号响应。 检测装置检测指数信号响应。 为了产生副衍射限制图像,扫描装置扫描聚焦的光源,另一个装置记录指数信号响应的检测。 该系统还包括显示记录检测的至少一部分的显示装置。

    Method and apparatus for imaging semiconductor device properties
    4.
    发明授权
    Method and apparatus for imaging semiconductor device properties 失效
    用于成像半导体器件特性的方法和装置

    公开(公告)号:US5754298A

    公开(公告)日:1998-05-19

    申请号:US711420

    申请日:1996-09-05

    申请人: Robert Aaron Falk

    发明人: Robert Aaron Falk

    CPC分类号: G01R31/311 G01N21/95623

    摘要: A radiant energy point source (10) generates radiant energy, and a mechanism (12, 15, 16) focuses the radiant energy generated by the point source onto a target (18) and scans the target with the focused radiant energy. A collector (16, 14) collects the focused radiant energy that is scattered from the target and a splitter (22) splits the collected radiant energy into two paths. Each of the two paths of the collected radiant energy is focused onto separate focal spots by a focusing mechanism (24). A pair of spatial filters (26, 28) filter the collected radiant energy at the focal spots. The spatial filters are offset from each other along the path of the focused radiant energy. Detectors (30, 32) separately detect the focused radiant energy which passes through each of the spatial filters and produce signals proportional to the quantity of detected focused radiant energy present. Finally, the produced signals are combined into an image signal related to the distance traveled by the radiant energy from the focusing mechanism to the target and back to the collector.

    摘要翻译: 辐射能源源(10)产生辐射能,并且机构(12,15,16)将由点源产生的辐射能量聚焦到目标(18)上,并用聚焦辐射能扫描目标。 收集器(16,14)收集从目标物散射的聚焦的辐射能,并且分离器(22)将所收集的辐射能分成两条路径。 收集的辐射能的两个路径中的每一个通过聚焦机构(24)聚焦到分离的焦点上。 一对空间滤波器(26,28)对聚焦点处的收集的辐射能进行滤波。 空间滤波器沿着聚焦辐射能的路径彼此偏移。 检测器(30,32)分别检测穿过每个空间滤波器的聚焦辐射能并产生与存在的检测到的聚焦辐射能量成比例的信号。 最后,产生的信号被组合成与由聚焦机构到目标和收集器的辐射能量行进的距离有关的图像信号。