公开(公告)号：US20100249967A1

公开(公告)日：2010-09-30

申请号：US12415258

申请日：2009-03-31

申请人： Robert Barlovic ,  Uwe Schulze ,  Jan Raebiger ,  Joerg Weigang ,  Jens Busch ,  Rolf Seltmann

发明人： Robert Barlovic ,  Uwe Schulze ,  Jan Raebiger ,  Joerg Weigang ,  Jens Busch ,  Rolf Seltmann

IPC分类号： G06F17/00

CPC分类号： G05B19/41865 ,  G05B2219/31459 ,  G05B2219/32269 ,  Y02P90/20 ,  Y10T83/0457 ,  Y10T83/155 ,  Y10T483/1712

摘要： Metrology data associated with a plurality of workpieces processed at a selected operation in the process flow including a plurality of operations is retrieved. A processing context associated with each of the workpieces is determined. The processing context identifies at least one previous tool used to perform an operation on the associated workpiece prior to the selected operation. A plurality of performance metrics is determined for a plurality of tools capable of performing the selected operation based on the metrology data. Each performance metric is associated with a particular tool and a particular processing context. A set of the performance metrics is identified for the plurality of tools having a processing context matching a processing context of a selected workpiece awaiting performance of the selected operation. The selected workpiece is dispatched for processing in a selected one of the plurality of tools based on the set of performance metrics.

摘要翻译： 检索与在包括多个操作的处理流程中的所选操作处理的多个工件相关联的计量数据。 确定与每个工件相关联的处理上下文。 处理上下文在所选择的操作之前识别用于对相关联的工件执行操作的至少一个先前的工具。 针对能够基于测量数据执行所选择的操作的多个工具确定多个性能度量。 每个性能度量与特定工具和特定的处理环境相关联。 针对具有与所选择的工件等待执行所选择的操作的所选择的工件的处理环境匹配的处理环境的多个工具识别出一组性能度量。 基于所述一组性能度量，在所述多个工具中选择的一个工具中调度所选择的工件以进行处理。

公开(公告)号：US08155770B2

公开(公告)日：2012-04-10

申请号：US12415258

申请日：2009-03-31

申请人： Robert Barlovic ,  Uwe Schulze ,  Jan Raebiger ,  Joerg Weigang ,  Jens Busch ,  Rolf Seltmann

发明人： Robert Barlovic ,  Uwe Schulze ,  Jan Raebiger ,  Joerg Weigang ,  Jens Busch ,  Rolf Seltmann

IPC分类号： B26D5/00 ,  G06F19/00 ,  B31B1/00 ,  B31B1/28 ,  B26D7/06

CPC分类号： G05B19/41865 ,  G05B2219/31459 ,  G05B2219/32269 ,  Y02P90/20 ,  Y10T83/0457 ,  Y10T83/155 ,  Y10T483/1712

摘要： Metrology data associated with a plurality of workpieces processed at a selected operation in the process flow including a plurality of operations is retrieved. A processing context associated with each of the workpieces is determined. The processing context identifies at least one previous tool used to perform an operation on the associated workpiece prior to the selected operation. A plurality of performance metrics is determined for a plurality of tools capable of performing the selected operation based on the metrology data. Each performance metric is associated with a particular tool and a particular processing context. A set of the performance metrics is identified for the plurality of tools having a processing context matching a processing context of a selected workpiece awaiting performance of the selected operation. The selected workpiece is dispatched for processing in a selected one of the plurality of tools based on the set of performance metrics.

摘要翻译： 检索与在包括多个操作的处理流程中的所选操作处理的多个工件相关联的计量数据。 确定与每个工件相关联的处理上下文。 处理上下文在所选择的操作之前识别用于对相关联的工件执行操作的至少一个先前的工具。 针对能够基于测量数据执行所选择的操作的多个工具确定多个性能度量。 每个性能度量与特定工具和特定的处理环境相关联。 针对具有与所选择的工件等待执行所选择的操作的所选择的工件的处理环境匹配的处理环境的多个工具识别出一组性能度量。 基于所述一组性能度量，在所述多个工具中选择的一个工具中调度所选择的工件以进行处理。

公开(公告)号：US20090037012A1

公开(公告)日：2009-02-05

申请号：US12119042

申请日：2008-05-12

申请人： Joerg Weigang ,  Robert Ringel ,  Steffen Kalisch ,  Thomas Quarg

发明人： Joerg Weigang ,  Robert Ringel ,  Steffen Kalisch ,  Thomas Quarg

IPC分类号： G06F17/00

CPC分类号： G05B19/41865 ,  G05B2219/31449 ,  G05B2219/32266 ,  G05B2219/32293 ,  G05B2219/45031 ,  Y02P90/20

摘要： By defining a section-related WIP limit or a throughput-related WIP limit, an efficient “look ahead” characteristic may be established to efficiently control the WIP in a complex manufacturing environment, such as a semiconductor facility. The respective critical WIP values may enable efficient reduction of priority of products moving towards an increased WIP queue, thereby reducing or substantially avoiding the release of products that are expected to run into the WIP queue. In this way, the efficiency of shared tools may be increased, since process capacity no longer required for the processing products running into WIP queues may be allocated for other operations.

摘要翻译： 通过定义与部分相关的WIP限制或吞吐量相关的WIP限制，可以建立有效的“展望”特性，以在诸如半导体设施的复杂制造环境中有效地控制WIP。 相应的关键WIP值可以有效地降低向增加的WIP队列移动的产品的优先级，从而减少或基本上避免预期进入WIP队列的产品的释放。 以这种方式，可以增加共享工具的效率，这是因为处理产品不再需要进行WIP队列的处理能力可能被分配给其他操作。

公开(公告)号：US08185226B2

公开(公告)日：2012-05-22

申请号：US12119042

申请日：2008-05-12

申请人： Joerg Weigang ,  Robert Ringel ,  Steffen Kalisch ,  Thomas Quarg

发明人： Joerg Weigang ,  Robert Ringel ,  Steffen Kalisch ,  Thomas Quarg

IPC分类号： G06F19/00

CPC分类号： G05B19/41865 ,  G05B2219/31449 ,  G05B2219/32266 ,  G05B2219/32293 ,  G05B2219/45031 ,  Y02P90/20

摘要： By defining a section-related WIP limit or a throughput-related WIP limit, an efficient “look ahead” characteristic may be established to efficiently control the WIP in a complex manufacturing environment, such as a semiconductor facility. The respective critical WIP values may enable efficient reduction of priority of products moving towards an increased WIP queue, thereby reducing or substantially avoiding the release of products that are expected to run into the WIP queue. In this way, the efficiency of shared tools may be increased, since process capacity no longer required for the processing products running into WIP queues may be allocated for other operations.

摘要翻译： 通过定义与部分相关的WIP限制或吞吐量相关的WIP限制，可以建立有效的“展望”特性，以在诸如半导体设施的复杂制造环境中有效地控制WIP。 相应的关键WIP值可以有效地降低向增加的WIP队列移动的产品的优先级，从而减少或基本上避免预期进入WIP队列的产品的释放。 以这种方式，可以增加共享工具的效率，这是因为处理产品不再需要进行WIP队列的处理能力可能被分配给其他操作。

公开(公告)号：US07908127B2

公开(公告)日：2011-03-15

申请号：US11538588

申请日：2006-10-04

申请人： Joerg Weigang ,  Robert Ringel ,  Arndt Herrmann

发明人： Joerg Weigang ,  Robert Ringel ,  Arndt Herrmann

IPC分类号： G06G7/48

CPC分类号： G05B19/41865 ,  G05B2219/32301 ,  G05B2219/45031 ,  Y02P90/20 ,  Y02P90/26 ,  Y02P90/86

摘要： By simulating a manufacturing environment on the basis of appropriate simulation models, a schedule may be established in which process restrictions, tool availability and product entity status are automatically taken into consideration. Moreover, by estimating the process flow efficiency provided by a simulated time progression of the process flow in the environment, an optimized schedule may be established, which may be accomplished by identifying less efficient product entities and re-scheduling one or more product entities in order to obtain an enhanced process flow efficiency. The technique of the present invention may be advantageously applied to the processing of advanced mass products requiring sophisticated process tools and process sequences, such as the processing of semiconductor devices.

摘要翻译： 通过在适当的仿真模型的基础上模拟制造环境，可以建立一个自动考虑过程限制，工具可用性和产品实体状态的时间表。 此外，通过估计由环境中的过程流程的模拟时间进度提供的过程流动效率，可以建立优化的时间表，其可以通过识别较不有效的产品实体并且按顺序重新调度一个或多个产品实体来实现 以获得增强的工艺流动效率。 本发明的技术可以有利地应用于需要复杂的工艺工具和工艺顺序的先进的大量产品的处理，例如半导体器件的处理。

公开(公告)号：US20070179652A1

公开(公告)日：2007-08-02

申请号：US11538588

申请日：2006-10-04

申请人： Joerg Weigang ,  Robert Ringel ,  Arndt Herrmann

发明人： Joerg Weigang ,  Robert Ringel ,  Arndt Herrmann

IPC分类号： G06F19/00

CPC分类号： G05B19/41865 ,  G05B2219/32301 ,  G05B2219/45031 ,  Y02P90/20 ,  Y02P90/26 ,  Y02P90/86

摘要： By simulating a manufacturing environment on the basis of appropriate simulation models, a schedule may be established in which process restrictions, tool availability and product entity status are automatically taken into consideration. Moreover, by estimating the process flow efficiency provided by a simulated time progression of the process flow in the environment, an optimized schedule may be established, which may be accomplished by identifying less efficient product entities and re-scheduling one or more product entities in order to obtain an enhanced process flow efficiency. The technique of the present invention may be advantageously applied to the processing of advanced mass products requiring sophisticated process tools and process sequences, such as the processing of semiconductor devices.

摘要翻译： 通过在适当的仿真模型的基础上模拟制造环境，可以建立一个自动考虑过程限制，工具可用性和产品实体状态的时间表。 此外，通过估计由环境中的过程流程的模拟时间进度提供的过程流动效率，可以建立优化的时间表，其可以通过识别较不有效的产品实体并按顺序重新调度一个或多个产品实体来实现 以获得增强的工艺流动效率。 本发明的技术可以有利地应用于需要复杂的工艺工具和工艺顺序的先进的大量产品的处理，例如半导体器件的处理。