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公开(公告)号：US10782221B2
公开(公告)日：2020-09-22
申请号：US16658532
申请日：2019-10-21
发明人： Stefan Weiss , Alexander Herrmann , Robert Wolf , Alexander Van Der Lee , Wolfram Johannes Martin Lyda , Balazs Jatekos , Robert Weiss , Sören Sofke , Hans Spruit , Jens-Alrik Adrian , Matthias Falk , Dominik Moser
摘要： A system for determining a particle contamination and a method for determining a particle contamination in a measurement environment is provided in which individual particles in the measurement environment are detected (S1), wherein a) an estimate of the number of particles per volume in the measurement environment is ascertained (S2), b) an estimate of the number of particles per volume and characterization information describing the particle source in the measurement information are taken as a basis for ascertaining an output value for the particle contamination in the measurement environment (S3), and c) context-related data are made available and the characterization information is estimated on the basis of the available context-related data (S4). The estimation of the characterization information on the basis of the available context-related data avoids the conventional restriction of the evaluable characterization information to firmly prescribed information and instead provides flexible adaptation of the characterization information to be evaluated to the context-related data.
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公开(公告)号：US20200132582A1
公开(公告)日：2020-04-30
申请号：US16658532
申请日：2019-10-21
发明人： Stefan Weiss , Alexander Herrmann , Robert Wolf , Alexander Van Der Lee , Wolfram Johannes Martin Lyda , Balazs Jatekos , Robert Weiss , Sören Sofke , Hans Spruit , Jens-Alrik Adrian , Matthias Falk , Dominik Moser
摘要： A system for determining a particle contamination and a method for determining a particle contamination in a measurement environment, is provided in which individual particles in the measurement environment are detected (S1), wherein a) an estimate of the number of particles per volume in the measurement environment is ascertained (S2), b) an estimate of the number of particles per volume and characterization information describing the particle source in the measurement information are taken as a basis for ascertaining an output value for the particle contamination in the measurement environment (S3), and c) context-related data are made available and the characterization information is estimated on the basis of the available context-related data (S4). The estimation of the characterization information on the basis of the available context-related data avoids the conventional restriction of the evaluable characterization information to firmly prescribed information and instead provides flexible adaptation of the characterization information to be evaluated to the context-related data.
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