WAFER-LEVEL METHOD FOR FABRICATING AN OPTICAL CHANNEL AND APERTURE STRUCTURE IN MAGNETIC RECORDING HEAD SLIDERS FOR USE IN THERMALLY-ASSISTED RECORDING (TAR)
    1.
    发明申请
    WAFER-LEVEL METHOD FOR FABRICATING AN OPTICAL CHANNEL AND APERTURE STRUCTURE IN MAGNETIC RECORDING HEAD SLIDERS FOR USE IN THERMALLY-ASSISTED RECORDING (TAR) 审中-公开
    用于制作用于热辅助记录(TAR)的磁记录头滑块中的光通道和光孔结构的波形方法

    公开(公告)号:US20090258186A1

    公开(公告)日:2009-10-15

    申请号:US12101066

    申请日:2008-04-10

    IPC分类号: G03F7/00 B32B3/10

    摘要: A process for forming a plurality of sliders for use in thermally-assisted recording (TAR) disk drives includes a wafer-level process for forming a plurality of aperture structures, and optionally abutting optical channels, on a wafer surface prior to cutting the wafer into individual sliders. The wafer has a generally planar surface arranged into a plurality of rectangularly-shaped regions. In each rectangular region a first metal layer is deposited on the wafer surface, followed by a layer of radiation-transmissive aperture material, which is then lithographically patterned to define the width of the aperture, the aperture width being parallel to the length of the rectangularly-shaped region. A second metal layer is deposited over the patterned layer of aperture material. The resulting structure is then lithographically patterned to define an aperture structure comprising aperture material surrounded by metal and having parallel radiation entrance and exit faces orthogonal to the wafer surface.

    摘要翻译: 用于形成用于热辅助记录(TAR)盘驱动器中的多个滑动件的方法包括在将晶片切割成晶片之前在晶片表面上形成多个孔结构和可选地邻接的光通道的晶片级工艺 个人滑块 晶片具有布置成多个矩形区域的大致平坦的表面。 在每个矩形区域中,第一金属层沉积在晶片表面上,随后是一层辐射透射的孔隙材料,然后将其光刻图案化以限定孔的宽度,孔的宽度平行于矩形的长度 形状区域。 在孔材料的图案化层上沉积第二金属层。 然后将所得结构光刻图案化以限定孔结构,该孔结构包括由金属包围并具有与晶片表面正交的平行辐射入射面和出射面的孔隙材料。

    Thermally assisted recording head having recessed waveguide with near field transducer and methods of making same
    4.
    发明授权
    Thermally assisted recording head having recessed waveguide with near field transducer and methods of making same 有权
    带有近场传感器的凹槽波导的热辅助记录头及其制造方法

    公开(公告)号:US08169881B2

    公开(公告)日:2012-05-01

    申请号:US12347084

    申请日:2008-12-31

    IPC分类号: G11B7/135

    摘要: According to one embodiment, an apparatus includes a near field transducer comprising a conductive metal film having a main body and a ridge extending from the main body and an optical waveguide for illumination of the near field transducer, a light guiding core layer of the optical waveguide being spaced from the near field transducer by less than about 100 nanometers and greater than 0 nanometers. In another embodiment, a method includes forming a near field transducer structure and removing a portion of the near field transducer structure. The method also includes forming a cladding layer adjacent a remaining portion of the near field transducer structure, wherein a portion of the cladding layer extends along the remaining portion of the near field transducer structure and forming a core layer above the cladding layer. Other apparatuses and methods are also included in the invention.

    摘要翻译: 根据一个实施例,一种装置包括近场换能器,其包括具有主体和从主体延伸的脊的导电金属膜和用于照射近场换能器的光波导,光波导的导光芯层 与近场传感器间隔小于约100纳米且大于0纳米。 在另一实施例中,一种方法包括形成近场换能器结构并去除近场换能器结构的一部分。 该方法还包括在近场换能器结构的剩余部分附近形成包覆层,其中包层的一部分沿着近场换能器结构的剩余部分延伸并在包层上方形成芯层。 本发明还包括其他装置和方法。

    THERMALLY ASSISTED RECORDING HEAD HAVING RECESSED WAVEGUIDE WITH NEAR FIELD TRANSDUCER AND METHODS OF MAKING SAME
    7.
    发明申请
    THERMALLY ASSISTED RECORDING HEAD HAVING RECESSED WAVEGUIDE WITH NEAR FIELD TRANSDUCER AND METHODS OF MAKING SAME 有权
    具有近场传感器的受保护波形的热辅助记录头及其制造方法

    公开(公告)号:US20100165822A1

    公开(公告)日:2010-07-01

    申请号:US12347084

    申请日:2008-12-31

    IPC分类号: G11B7/00

    摘要: According to one embodiment, an apparatus includes a near field transducer comprising a conductive metal film having a main body and a ridge extending from the main body and an optical waveguide for illumination of the near field transducer, a light guiding core layer of the optical waveguide being spaced from the near field transducer by less than about 100 nanometers and greater than 0 nanometers. In another embodiment, a method includes forming a near field transducer structure and removing a portion of the near field transducer structure. The method also includes forming a cladding layer adjacent a remaining portion of the near field transducer structure, wherein a portion of the cladding layer extends along the remaining portion of the near field transducer structure and forming a core layer above the cladding layer. Other apparatuses and methods are also included in the invention.

    摘要翻译: 根据一个实施例,一种装置包括近场换能器,其包括具有主体和从主体延伸的脊的导电金属膜和用于照射近场换能器的光波导,光波导的导光芯层 与近场传感器间隔小于约100纳米且大于0纳米。 在另一实施例中,一种方法包括形成近场换能器结构并去除近场换能器结构的一部分。 该方法还包括在近场换能器结构的剩余部分附近形成包覆层,其中包层的一部分沿着近场换能器结构的剩余部分延伸并在包层上方形成芯层。 本发明还包括其他装置和方法。

    Magnetic recording disk drive with shingled writing and rectangular optical waveguide for wide-area thermal assistance
    8.
    发明授权
    Magnetic recording disk drive with shingled writing and rectangular optical waveguide for wide-area thermal assistance 有权
    磁记录磁盘驱动器带有写字和矩形光波导用于广域热辅助

    公开(公告)号:US08416646B2

    公开(公告)日:2013-04-09

    申请号:US13190410

    申请日:2011-07-25

    IPC分类号: G11B11/00

    摘要: A thermally-assisted recording (TAR) disk drive uses “shingled” recording and a rectangular waveguide as a “wide-area” heat source. The waveguide generates a generally elliptically-shaped optical spot that heats an area of the recording layer extending across multiple data tracks. The waveguide core has an aspect ratio (cross-track width to along-the track thickness) that achieves the desired size of the heated area while locating the peak optical intensity close to the trailing edge of the write pole tip where writing occurs. The large cross-track width of the waveguide core increases the volume of recording layer heated by the optical spot, which reduces the rate of cooling. This moves the peak temperature point of the heated area closer to the write pole tip and reduces the temperature drop between the peak temperature and the temperature at the trailing edge of the write pole tip where writing occurs.

    摘要翻译: 热辅助记录(TAR)磁盘驱动器使用带状闪烁的记录和矩形波导作为广域热源。 波导产生大致椭圆形的光点,其加热跨越多个数据轨道的记录层的区域。 波导芯具有实现加热区域的期望尺寸的纵横比(沿轨道厚度的横越轨道宽度),同时将峰值光强度定位在写入发生时写入磁极尖端的后缘附近。 波导芯的大的横向轨道宽度增加了由光点加热的记录层的体积,这降低了冷却速度。 这使得加热区域的峰值温度点更接近写极端,并且降低峰值温度与写入磁极尖端的后缘处的温度之间的温度下降。

    Slider with integrated thermally-assisted recording (TAR) head and integrated long laser diode
    9.
    发明授权
    Slider with integrated thermally-assisted recording (TAR) head and integrated long laser diode 有权
    滑块具有集成的热辅助记录(TAR)头和集成的长激光二极管

    公开(公告)号:US08107326B1

    公开(公告)日:2012-01-31

    申请号:US12946420

    申请日:2010-11-15

    IPC分类号: G11B11/00

    摘要: A thermally-assisted recording (TAR) slider has an integrated TAR head and an integrated laser diode. The laser diode may be an external-cavity VCSEL that includes a semiconductor substrate with the VCSEL formed on one surface, an external cavity on the opposite surface, and an output third mirror on the output surface of the external cavity. The TAR head is integrated with the slider at the trailing end and includes an optical waveguide having a grating coupler oriented in a plane generally parallel to the slider trailing end, and a near-field transducer (NFT) at the slider air-bearing surface (ABS) and coupled to the waveguide. A carrier is attached to the slider and has a base portion that supports the external-cavity VCSEL so that the linear path of its output laser beam is aligned with and oriented orthogonal to the plane of the grating coupler. The grating coupler receives the laser radiation and turns it 90 degrees into the waveguide, which directs the laser radiation to the NFT at the ABS.

    摘要翻译: 热辅助记录(TAR)滑块具有集成的TAR头和集成的激光二极管。 激光二极管可以是外腔VCSEL,其包括在一个表面上形成有VCSEL的半导体衬底,在相对表面上的外部空腔,以及在外部空腔的输出表面上的输出第三反射镜。 TAR头与后端的滑块一体化,并且包括光导体,其具有在大致平行于滑块后端的平面中定向的光栅耦合器,以及在滑块空气轴承表面处的近场换能器(NFT) ABS)并耦合到波导。 载体附接到滑块,并且具有支撑外腔VCSEL的基部,使得其输出激光束的线性路径与光栅耦合器的平面对齐并定向。 光栅耦合器接收激光辐射并将其转动90度到波导中,其将激光辐射引导到ABS处的NFT。

    Thermally-assisted perpendicular magnetic recording system with write pole surrounding an optical channel and having recessed pole tip
    10.
    发明授权
    Thermally-assisted perpendicular magnetic recording system with write pole surrounding an optical channel and having recessed pole tip 有权
    具有写入极的热辅助垂直磁记录系统,围绕光通道并具有凹入的极尖

    公开(公告)号:US07791839B2

    公开(公告)日:2010-09-07

    申请号:US11532084

    申请日:2006-09-14

    IPC分类号: G11B5/60 G11B5/127

    摘要: A thermally-assisted perpendicular magnetic recording head and system has a head carrier that supports an optical channel for the transmission of radiation to the recording layer, a write pole for directing a magnetic field to the recording layer, and an electrical coil for inducing the magnetic field from the write pole. The optical channel has a radiation exit face with an aperture at the recording-layer-facing surface of the head carrier. The write pole has a pole tip with an end face that is recessed from the recording-layer-facing surface. The write pole tip is tapered down to the end faces. The pole tip taper and the recession of the end face concentrates the write field at the middle of the perpendicular magnetic recording layer where the radiation from the optical channel is incident. The characteristic dimension of the aperture and the spacing between the aperture and the recording layer are both less than the wavelength of the radiation. The radiation source may be a laser diode mounted to the head carrier.

    摘要翻译: 热辅助垂直磁记录头和系统具有头托架,其支撑用于将辐射传输到记录层的光通道,用于将磁场引导到记录层的写磁极和用于引导磁场的电线圈 字段从写柱。 光通道具有在头托架的面向记录层的表面上具有孔的辐射出射面。 写极具有极尖,端面从面向记录层的表面凹入。 写磁极尖端朝向端面逐渐变细。 极尖锥度和端面的凹陷将写入场集中在垂直磁记录层的中心处,其中来自光通道的辐射入射。 孔径的特征尺寸和孔径与记录层之间的间距均小于辐射波长。 辐射源可以是安装到头部托架的激光二极管。