公开(公告)号：US20050276726A1

公开(公告)日：2005-12-15

申请号：US11136763

申请日：2005-05-25

申请人： Robert McGill ,  Ioana Voiculescu ,  Gary Fedder

发明人： Robert McGill ,  Ioana Voiculescu ,  Gary Fedder

IPC分类号： G01N27/00 ,  G01N27/16

CPC分类号： G01N29/036 ,  G01N2291/0256 ,  G01N2291/0257

摘要： A microelectro-mechanical chemical sensor includes an active cantilever beam having a chemically selective material layer disposed thereon and at least one, preferably two, resistors with the resistance corresponding to the cantilever beam deflection. The sensor also has at least two, and preferably four, auxiliary cantilever beams adjacent to the active cantilever and attached to the same substrate, each having a piezoresistor disposed thereon. The piezoresistors are elements of a Wheatstone bridge, and the Wheatstone bridge output indicates the amount of a predetermined target chemical sorbed by the chemically selective material layer. The sensor is electrostatically actuated in order to monitor the resonant frequency.

摘要翻译： 微电子机械化学传感器包括具有设置在其上的化学选择性材料层的主动悬臂梁和至少一个，优选两个电阻器，其电阻对应于悬臂梁偏转。 传感器还具有与主动悬臂相邻并附接到相同基板的至少两个，优选为四个辅助悬臂梁，每个悬臂梁上设置有压电电阻器。 压电电阻是惠斯通电桥的元件，惠斯通电桥输出表示由化学选择性材料层吸收的预定目标化学物质的量。 为了监测谐振频率，传感器被静电驱动。

公开(公告)号：US07556775B2

公开(公告)日：2009-07-07

申请号：US11136763

申请日：2005-05-25

申请人： Robert Andrew McGill ,  Ioana Voiculescu ,  Gary K. Fedder

发明人： Robert Andrew McGill ,  Ioana Voiculescu ,  Gary K. Fedder

IPC分类号： G01N27/00 ,  G01N27/04 ,  G01N27/12

CPC分类号： G01N29/036 ,  G01N2291/0256 ,  G01N2291/0257

摘要： A microelectro-mechanical chemical sensor includes an active cantilever beam having a chemically selective material layer disposed thereon and at least one, preferably two, resistors with the resistance corresponding to the cantilever beam deflection. The sensor also has at least two, and preferably four, auxiliary cantilever beams adjacent to the active cantilever and attached to the same substrate, each having a piezoresistor disposed thereon. The piezoresistors are elements of a Wheatstone bridge, and the Wheatstone bridge output indicates the amount of a predetermined target chemical sorbed by the chemically selective material layer. The sensor is electrostatically actuated in order to monitor the resonant frequency.

摘要翻译： 微电子机械化学传感器包括具有设置在其上的化学选择性材料层的主动悬臂梁和至少一个，优选两个电阻器，其电阻对应于悬臂梁偏转。 传感器还具有与主动悬臂相邻并附接到相同基板的至少两个，优选为四个辅助悬臂梁，每个悬臂梁上设置有压电电阻器。 压电电阻是惠斯通电桥的元件，惠斯通电桥输出表示由化学选择性材料层吸收的预定目标化学物质的量。 为了监测谐振频率，传感器被静电驱动。