Evacuated hybrid ovenized oscillator
    1.
    发明授权
    Evacuated hybrid ovenized oscillator 有权
    抽真空混合烘箱

    公开(公告)号:US06731180B1

    公开(公告)日:2004-05-04

    申请号:US10056958

    申请日:2001-10-22

    IPC分类号: H03B532

    CPC分类号: H03B5/326 H03L1/04

    摘要: The present invention is for a thermally controlled package for oscillators, particularly evacuated miniature surface acoustical wave oscillators (EMSO) devices. In a preferred embodiment the surface acoustical wave device is bonded directly to a heated substrate. The package is evacuated to improve temperature characteristics. A temperature heater, sensor, and control controller are utilized to maintain the internal package temperature above ambient. In one embodiment there is an additional substrate layer that house components that are not sensitive to temperature with interconnects electrically connecting the heated substrate and the additional substrates.

    摘要翻译: 本发明是用于振荡器的热控封装,特别是抽真空的微型表面声波振荡器(EMSO)装置。 在优选实施例中,表面声波装置直接结合到加热的基底上。 将包装抽真空以改善温度特性。 利用温度加热器,传感器和控制控制器将内部封装温度保持在环境温度以上。 在一个实施例中,存在另外的衬底层,其容纳对温度不敏感的组件,互连件将电连接被加热的衬底和附加衬底。