公开(公告)号：US20110310368A1

公开(公告)日：2011-12-22

申请号：US12996945

申请日：2009-05-20

申请人： Roger Wilhelmus Antonius Henricus Schmitz ,  Tjarko Adriaan Rudolf Van Empel ,  Marcel Johannus Elisabeth Hubertus Muitjens ,  Lun Cheng ,  Franciscus Johannes Joseph Janssen ,  William Arie Van Helden ,  Richard Versluis ,  Paulus Bartholomeus Johannes Schaareman ,  Axel Sebastiaan Lexmond ,  Evert Nieuwkoop ,  Charles William Barras Potts ,  Martinus Henricus Johannes Lemmen ,  Frederik Van Der Graaf ,  Mathilde Gertrudis Maria De Kroon ,  Johannes Fransiscus Maria Velthuis

发明人： Roger Wilhelmus Antonius Henricus Schmitz ,  Tjarko Adriaan Rudolf Van Empel ,  Marcel Johannus Elisabeth Hubertus Muitjens ,  Lun Cheng ,  Franciscus Johannes Joseph Janssen ,  William Arie Van Helden ,  Richard Versluis ,  Paulus Bartholomeus Johannes Schaareman ,  Axel Sebastiaan Lexmond ,  Evert Nieuwkoop ,  Charles William Barras Potts ,  Martinus Henricus Johannes Lemmen ,  Frederik Van Der Graaf ,  Mathilde Gertrudis Maria De Kroon ,  Johannes Fransiscus Maria Velthuis

IPC分类号： G03B27/42 ,  G03F7/20

CPC分类号： G03F7/70891 ,  G02B7/008 ,  G03F7/70875 ,  G03F7/709 ,  G03F7/70983 ,  G21K2201/067

摘要： A method for thermally conditioning an optical element includes irradiating the optical element with radiation, not-irradiating the optical element with the radiation, allowing heat flow between the optical element and a conditioning fluid that is held in a conditioning fluid reservoir, and providing a fluid flow of the conditioning fluid, to supply thermally conditioned fluid to the reservoir. A flow rate of the fluid during the irradiating of the optical element is lower than a flow rate of the fluid when the optical element is not-irradiated.

摘要翻译： 用于热调节光学元件的方法包括用辐射照射光学元件，不用辐射照射光学元件，允许光学元件和保持在调节液体储存器中的调节流体之间的热流动，并且提供流体 调节流体的流动，以将热调节的流体供应到储存器。 在光学元件的照射期间，流体的流量比不照射光学元件时的流体的流量低。