公开(公告)号：US08492696B2

公开(公告)日：2013-07-23

申请号：US12945908

申请日：2010-11-15

申请人： Ronen Akerman ,  Dudu Voschina ,  Niv Galezer ,  Yoed Arieli ,  Tomer Segev ,  Zafrir Mor ,  Alexander Shpunt

发明人： Ronen Akerman ,  Dudu Voschina ,  Niv Galezer ,  Yoed Arieli ,  Tomer Segev ,  Zafrir Mor ,  Alexander Shpunt

IPC分类号： H01L27/00

CPC分类号： H01L31/14 ,  G02B5/1842 ,  H01L31/0203 ,  H01L31/0232 ,  H01L31/02325

摘要： Optical apparatus includes a device package, with a radiation source contained in the package and configured to emit a beam of coherent radiation. A diffractive optical element (DOE) is mounted in the package so as to receive and diffract the radiation from the radiation source into a predefined pattern comprising multiple diffraction orders. An optical detector is positioned in the package so as to receive and sense an intensity of a selected diffraction order of the DOE.

摘要翻译： 光学设备包括器件封装，其中包含在封装中的辐射源并且被配置为发射相干辐射束。 衍射光学元件（DOE）安装在封装中，以将辐射源的辐射接收并衍射成包括多个衍射级的预定图案。 光学检测器位于封装中，以便接收和感测DOE的选定衍射级的强度。

公开(公告)号：US20110114857A1

公开(公告)日：2011-05-19

申请号：US12945908

申请日：2010-11-15

申请人： Ronen Akerman ,  Dudu Voschina ,  Niv Galezer ,  Yoed Arieli ,  Tomer Segev ,  Zafrir Mor ,  Alexander Shpunt

发明人： Ronen Akerman ,  Dudu Voschina ,  Niv Galezer ,  Yoed Arieli ,  Tomer Segev ,  Zafrir Mor ,  Alexander Shpunt

IPC分类号： G01B11/25 ,  G01B9/02

CPC分类号： H01L31/14 ,  G02B5/1842 ,  H01L31/0203 ,  H01L31/0232 ,  H01L31/02325

摘要： Optical apparatus includes a device package, with a radiation source contained in the package and configured to emit a beam of coherent radiation. A diffractive optical element (DOE) is mounted in the package so as to receive and diffract the radiation from the radiation source into a predefined pattern comprising multiple diffraction orders. An optical detector is positioned in the package so as to receive and sense an intensity of a selected diffraction order of the DOE.

摘要翻译： 光学设备包括器件封装，其中包含在封装中的辐射源并且被配置为发射相干辐射束。 衍射光学元件（DOE）安装在封装中，以将辐射源的辐射接收并衍射成包括多个衍射级的预定图案。 光学检测器位于封装中，以便接收和感测DOE的选定衍射级的强度。

公开(公告)号：US20130177698A1

公开(公告)日：2013-07-11

申请号：US13545014

申请日：2012-07-10

申请人： Yosi Cherbis ,  Noam Rozenshtein ,  Tomer Segev ,  Avi Levy

发明人： Yosi Cherbis ,  Noam Rozenshtein ,  Tomer Segev ,  Avi Levy

IPC分类号： H05K3/22

CPC分类号： H05K3/22 ,  H05K3/1233 ,  H05K3/225 ,  H05K3/3484 ,  H05K13/08 ,  H05K2203/163

摘要： A system and a method for inspection aided printing, the method may include printing, by a printing unit of a system, a pattern on an area of a substrate, during a printing process; inspecting, by an inspection unit of the system, the area to provide inspection results; searching, by a processor of the system, for a defect, based upon the inspection results; and wherein if a defect is found—determining whether to (a) repair the substrate, (b) perform a corrective measure for improving the printing process, or (c) perform no corrective measure in response to the defect.

摘要翻译： 一种用于检查辅助印刷的系统和方法，所述方法可以包括在印刷过程中由系统的印刷单元在基板的区域上印刷图案; 由系统的检查单位检查提供检验结果的地区; 基于检查结果，由系统的处理器搜索缺陷; 并且其中如果发现缺陷 - 确定是否（a）修复所述基板，（b）执行改进所述印刷过程的校正措施，或（c）不执行所述缺陷的校正措施。

公开(公告)号：US09661755B2

公开(公告)日：2017-05-23

申请号：US13545014

申请日：2012-07-10

申请人： Yosi Cherbis ,  Noam Rozenshtein ,  Tomer Segev ,  Avi Levy

发明人： Yosi Cherbis ,  Noam Rozenshtein ,  Tomer Segev ,  Avi Levy

IPC分类号： H05K3/22 ,  H05K3/12 ,  H05K3/34 ,  H05K13/08

CPC分类号： H05K3/22 ,  H05K3/1233 ,  H05K3/225 ,  H05K3/3484 ,  H05K13/08 ,  H05K2203/163

摘要： A system and a method for inspection aided printing, the method may include printing, by a printing unit of a system, a pattern on an area of a substrate, during a printing process; inspecting, by an inspection unit of the system, the area to provide inspection results; searching, by a processor of the system, for a defect, based upon the inspection results; and wherein if a defect is found—determining whether to (a) repair the substrate, (b) perform a corrective measure for improving the printing process, or (c) perform no corrective measure in response to the defect.