公开(公告)号：US06862307B2

公开(公告)日：2005-03-01

申请号：US09858147

申请日：2001-05-14

申请人： Rustem Osmanow ,  Uwe Stamm ,  Andreas Targsdorg

发明人： Rustem Osmanow ,  Uwe Stamm ,  Andreas Targsdorg

IPC分类号： H01S3/097 ,  H01S3/08 ,  H01S3/0975 ,  H01S3/098 ,  H01S3/225 ,  H01S3/00 ,  H01S3/22

CPC分类号： H01S3/225 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08031 ,  H01S3/0975

摘要： Method and system for providing an excimer or molecular fluorine laser including a laser tube filled with a laser gas surrounded by an optical resonator, where the laser tube has multiple electrodes including a pair of main discharge electrodes connected to a discharge circuit for exciting the laser gas to produce a laser output beam. The discharge circuit has an all solid state switch and preferably does not include a transformer. The solid state switch includes multiple solid state devices that may be capable of switching voltages in excess of 12 kV, such as 14-32 kV or more, or the voltage needed to switch the laser. The series of switches has a rise time of approximately less than 300 ns, and preferably around 100 ns or less. The switch may be capable of switching voltages of slightly more than half, but less than the entire voltage needed to produce laser pulses of desired energies, and a voltage doubling circuit may be used to produce the voltage required to produce the desired output pulse energies. An oscillator-amplifier configuration may be used, wherein an oscillator switch may be capable of switching voltages less than the entire voltage needed to produce the desired laser pulse energies, while the amplifier amplifies the pulses to the desired pulse energies.

摘要翻译： 用于提供准分子或分子氟激光的方法和系统，其包括填充有由光学谐振器包围的激光气体的激光管，其中激光管具有多个电极，其包括连接到用于激发激光气体的放电电路的一对主放电电极 以产生激光输出光束。 放电电路具有全固态开关，并且优选地不包括变压器。 固态开关包括多个固态器件，其能够切换超过12kV的电压，例如14-32kV或更高，或切换激光所需的电压。 该系列开关具有大约小于300ns的上升时间，优选地在约100ns以下。 该开关可能能够切换稍大于一半但小于产生所需能量的激光脉冲所需的整个电压的电压，并且可以使用倍压电路来产生产生所需输出脉冲能量所需的电压。 可以使用振荡器放大器配置，其中振荡器开关可以能够切换小于产生所需激光脉冲能量所需的整个电压的电压，而放大器将脉冲放大到期望的脉冲能量。