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1.发明授权Apparatus for producing thin film, process for producing thin film and guide roller 失效薄膜制造装置，薄膜和导辊的制造方法公开(公告)号：US06319325B1
公开(公告)日：2001-11-20
申请号：US09505185
申请日：2000-02-16
IPC分类号： C23C1600
CPC分类号： C23C16/545 , G11B5/85
摘要： It is to provide an apparatus for producing a thin film, a process for producing a thin film and a guide roller, in which an arc resistant property is provided, and the film formation can be stably conducted with preventing damage of the thin film thus formed. In an apparatus for producing a thin film, such as a plasma CVD apparatus, comprising a vacuum chamber, means for generating a plasma in the vacuum chamber, means for introducing a gas to the vacuum chamber, and a guide roller for running a material to be treated by winding and supporting in the vacuum chamber, an outer peripheral surface of the guide roller in contact and sliding with the material to be treated comprises an electric conductor on both end parts in a width direction of the guide roller, and an electric insulator on a central part thereof.
摘要翻译： 本发明提供一种薄膜制造装置，制造耐电弧性能的薄膜和导向辊的制造方法，能够稳定地进行成膜，同时防止由此形成的薄膜的损伤 。 在用于制造薄膜的设备中，诸如等离子体CVD装置，包括真空室，用于在真空室中产生等离子体的装置，用于将气体引入真空室的装置，以及用于将材料运送到 通过在真空室中卷绕和支撑来处理，导辊的外周表面与待处理的材料接触并滑动，包括在引导辊的宽度方向上的两个端部上的电导体和电绝缘体 在其中央部分。
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公开(公告)号：US07214436B2
公开(公告)日：2007-05-08
申请号：US10439196
申请日：2003-05-15
申请人： Ryoichi Hiratsuka , Tomoe Ozaki , Taketoshi Sato , Miho Abiko , Ichiro Kanagawa , Kasumi Suzuki
发明人： Ryoichi Hiratsuka , Tomoe Ozaki , Taketoshi Sato , Miho Abiko , Ichiro Kanagawa , Kasumi Suzuki
IPC分类号： G11B5/66
CPC分类号： G11B5/72 , G11B5/8408
摘要： A magnetic recording medium of a metal thin-film type, which includes a magnetic layer and a carbon protective layer on a non-magnetic support member, and in which a non-magnetic metal thin-film is provided between the magnetic layer and the carbon protective layer, is provided. The magnetic recording medium thus produced can be run stably.
摘要翻译： 一种金属薄膜型的磁记录介质，其在非磁性支撑构件上包括磁性层和碳保护层，并且其中在磁性层和碳之间提供非磁性金属薄膜 提供保护层。 这样制造的磁记录媒体可以稳定地运行。
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公开(公告)号：US6110584A
公开(公告)日：2000-08-29
申请号：US149863
申请日：1998-09-09
申请人： Ryoichi Hiratsuka , Yuka Ito , Kazuo Hoshi
发明人： Ryoichi Hiratsuka , Yuka Ito , Kazuo Hoshi
CPC分类号： G11B5/72 , Y10T428/265 , Y10T428/30
摘要： A magnetic recording medium having an excellent sliding durability, and including a magnetic layer of a metal magnetic thin film formed on a non-magnetic support body and a carbon protection film formed on the magnetic layer. Recording and/or reproduction is carried out by sliding a magnetic head. The carbon protection film shows, in a Raman spectrum obtained by Raman spectrum analysis using an argon ion laser having a wavelength of 514.5 nm, an intensity ratio A/B of 2 or above for a main peak intensity A appearing in the vicinity of wave number 1550 cm.sup.-1 with respect to a background intensity B.
摘要翻译： 具有优异的滑动耐久性的磁记录介质，并且包括形成在非磁性支撑体上的金属磁性薄膜的磁性层和形成在磁性层上的碳保护膜。 通过滑动磁头进行记录和/或再现。 碳保护膜在使用波长为514.5nm的氩离子激光器的拉曼光谱分析获得的拉曼光谱中，对于出现在波数附近的主峰强度A，强度比A / B为2以上 1550厘米-1相对于背景强度B.
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公开(公告)号：US5968609A
公开(公告)日：1999-10-19
申请号：US69625
申请日：1998-04-29
CPC分类号： G11B5/725 , G11B5/72 , G11B5/722 , G11B5/8408 , Y10S428/90 , Y10T428/30 , Y10T428/31678
摘要： A magnetic recording medium having at least a thin magnetic metal film and a carbon protective film formed on a non-magnetic substrate, wherein lubricating properties are afforded to a surface portion of the carbon protective film. Specifically, the carbon protective film having a lower layer exhibiting rust-proofing properties and/or an upper layer exhibiting lubricating properties is formed on the thin magnetic metal film. The magnetic recording medium has a good running performance, durability and preservability.
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5.发明授权公开(公告)号：US07449221B2
公开(公告)日：2008-11-11
申请号：US11427694
申请日：2006-06-29
申请人： Ryoichi Hiratsuka , Ichiro Kanagawa , Kasumi Suzuki , Tomoe Ozaki
发明人： Ryoichi Hiratsuka , Ichiro Kanagawa , Kasumi Suzuki , Tomoe Ozaki
CPC分类号： G11B5/7325 , G11B5/85
摘要： A method of manufacturing a metallic thin film type magnetic recording medium is provided. The method comprises the steps of arranging an initial substance of said recording medium in opposition to a plasma discharge electrode, said initial substance comprising a non-magnetic support base, a metallic layer capable of functioning as a metallic electrode formed on said non-magnetic support base and a metallic magnetic layer formed on said metallic layer, and forming a protection film on a surface of said initial substance of said recording medium by way of generating plasma discharge while feeding raw material gas between said metallic layer/said metallic magnetic layer and said plasma discharge electrode.
摘要翻译： 提供一种制造金属薄膜型磁记录介质的方法。 该方法包括以下步骤：将等离子体放电电极相对的所述记录介质的初始物质布置，所述初始物质包括非磁性支撑基底，能够用作形成在所述非磁性载体上的金属电极的金属层 基底和形成在所述金属层上的金属磁性层，并且通过在所述金属层/所述金属磁性层和所述金属磁性层之间供给原料气体的同时产生等离子体放电而在所述记录介质的所述初始物质的表面上形成保护膜 等离子体放电电极。
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公开(公告)号：US07070871B2
公开(公告)日：2006-07-04
申请号：US10183227
申请日：2002-06-27
申请人： Ryoichi Hiratsuka , Ichiro Kanagawa , Kasumi Suzuki , Tomoe Ozaki
发明人： Ryoichi Hiratsuka , Ichiro Kanagawa , Kasumi Suzuki , Tomoe Ozaki
IPC分类号： G11B5/66
CPC分类号： G11B5/7325 , G11B5/85
摘要： A method of manufacturing a metallic thin film type magnetic recording medium is provided. The method comprises the steps of arranging an initial substance of said recording medium in opposition to a plasma discharge electrode, said initial substance comprising a non-magnetic support base, a metallic layer capable of functioning as a metallic electrode formed on said non-magnetic support base and a metallic magnetic layer formed on said metallic layer, and forming a protection film on a surface of said initial substance of said recording medium by way of generating plasma discharge while feeding raw material gas between said metallic layer/said metallic magnetic layer and said plasma discharge electrode.
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7.发明授权Cleaning tape with surface protrusions formed by particles of predetermined size/density and non-magnetic metal evaporated film of predetermined thickness 失效具有由预定尺寸/密度的颗粒形成的表面突起和具有预定厚度的非磁性金属蒸镀膜的清洁带公开(公告)号：US06999278B2
公开(公告)日：2006-02-14
申请号：US10463370
申请日：2003-06-17
IPC分类号： G11B5/41
摘要： There is provided a cleaning tape capable of attaining sufficient cleaning effects while preventing electrostatic discharge damage to magnetoresistive heads or changes in reproduced output due to excessive head wear. The cleaning tape includes a non-magnetic substrate 1, surface protrusions 6 formed on the non-magnetic substrate 1 with particles 2 having a particle diameter of 10 to 40 nm at a density of 300×104 to 5000×104 mm2, a metal evaporated film 3 (preferably an electrically conductive layer such as an alloy layer containing Co as a primary component, an Al layer or the like) having a thickness of 10 to 200 nm and an inorganic protection film 4 having a thickness of 3 to 50 nm formed on the metal evaporated film 3.
摘要翻译： 提供了能够获得足够的清洁效果的清洁带，同时防止由于头部磨损过大而导致的磁阻头的静电放电损坏或再现输出的变化。 清洁带包括非磁性基板1，形成在非磁性基板1上的表面突起6，颗粒2的粒径为10至40nm，密度为300×10 4至5000×10 5， 金属蒸镀膜3（优选为含有Co作为主要成分的合金层的导电层，Al层等），具有厚度 在金属蒸镀膜3上形成厚度为3〜50nm的无机保护膜4。
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8.发明申请SELF-LIMITING REACTION DEPOSITION APPARATUS AND SELF-LIMITING REACTION DEPOSITION METHOD 审中-公开自限制反应沉积装置和自限制反应沉积方法公开(公告)号：US20130089665A1
公开(公告)日：2013-04-11
申请号：US13615737
申请日：2012-09-14
IPC分类号： C23C16/54 , C23C16/46 , C23C16/458
CPC分类号： C23C16/45551 , C23C16/545
摘要： A self-limiting reaction deposition apparatus includes a first guide roller, a second guide roller, and at least one first head. The first guide roller changes, while supporting a first surface of a base material conveyed by a roll-to-roll process, a conveying direction of the base material from a first direction to a second direction that is not parallel to the first direction. The second guide roller changes, while supporting the first surface of the base material, the conveying direction of the base material from the second direction to a third direction that is not parallel to the second direction. The at least one first head is disposed between the first guide roller and the second guide roller, faces a second surface opposite to the first surface of the base material, and discharges, towards the second surface, a raw material gas for self-limiting reaction deposition.
摘要翻译： 自限制反应沉积设备包括第一引导辊，第二引导辊和至少一个第一头。 第一引导辊在支撑通过卷绕处理传送的基材的第一表面的同时，改变基材从第一方向到不与第一方向平行的第二方向的输送方向。 第二引导辊在支撑基材的第一表面的同时，改变基材从第二方向到不与第二方向平行的第三方向的输送方向。 所述至少一个第一头设置在所述第一引导辊和所述第二引导辊之间，面向与所述基材的第一表面相对的第二表面，并且朝向所述第二表面排出用于自限制反应的原料气体 沉积
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公开(公告)号：US07531251B2
公开(公告)日：2009-05-12
申请号：US11329668
申请日：2006-01-11
IPC分类号： G11B5/66
CPC分类号： G11B5/738 , G11B5/70 , G11B5/72 , G11B5/7305
摘要： A magnetic recording medium includes a nonmagnetic support having a thickness less than 7 μm and a width of 8 mm; a ferromagnetic metal layer disposed on a surface of the nonmagnetic support; and a reinforcing layer disposed on the other surface of the nonmagnetic support. The magnetic recording medium has a flexural rigidity EI of 5.9×10−8 to 1.3×10−7 N·m (6.0×10−4 to 1.3×10−3 g·cm). The flexural rigidity EI is determined by the following equation: EI=(π/4−2/π)·W·a3/d·b×9.8×10−5 (wherein W is a load that causes an annular test piece having a radius of a cm and a width of b cm which is prepared by cutting a magnetic sheet formed of the magnetic recording medium to undergo a radial displacement d of 0.2πa).
摘要翻译： 磁记录介质包括厚度小于7μm，宽度为8mm的非磁性载体; 设置在所述非磁性载体的表面上的铁磁金属层; 以及设置在非磁性载体的另一个表面上的加强层。 磁记录介质的抗弯刚度EI为5.9×10 -8〜1.3×10 -7 N.m（6.0×10 -4〜1.3×10 -3 g·cm）。 弯曲刚度EI由以下等式确定：<？in-line-formula description =“In-line formula”end =“lead”？> EI =（pi / 4-2 / pi）.Wa3 / d .bx9.8x10-5 <？in-line-formula description =“In-line Formulas”end =“tail”？>（其中W是使半径为cm，宽度为 bcm，其通过切割由磁记录介质形成的磁片来进行径向位移d为0.2pia）。
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公开(公告)号：US06447652B1
公开(公告)日：2002-09-10
申请号：US09463004
申请日：2000-04-05
申请人： Shunji Amano , Hiroshi Hayashi , Ryoichi Hiratsuka
发明人： Shunji Amano , Hiroshi Hayashi , Ryoichi Hiratsuka
IPC分类号： C23C1434
CPC分类号： C23C16/52 , C23C14/547 , C23C14/562 , G01N21/65 , G01N21/8422 , G01N2021/656 , G11B5/72 , G11B5/8408
摘要： A Raman spectrum of a thin film which must be formed is measured in a thin-film forming step for forming the thin film on a member to be processed in an atmosphere, the pressure of which has been reduced. Moreover, the conditions under which the thin film is formed are controlled in accordance with a result of measurement of the Raman spectrum. At this time, the measurement of the Raman spectrum is continuously performed in an in-line manner while the thin film is being continuously formed on the elongated-sheet-like member to be processed. The measurement of the Raman spectrum is performed while the focal point of a probe of a Raman spectrometer is being controlled with respect to the member to be processed or while the output of a laser beam from the Raman spectrometer is being controlled. The thin film which must be. formed is, for example, a protective film of a magnetic recording medium. The protective film is, for example, a hard carbon film (a DLC film).
摘要翻译： 必须形成的薄膜的拉曼光谱是在薄膜形成步骤中测量的，该薄膜形成步骤用于在压力被降低的气氛中在待加工的构件上形成薄膜。 此外，根据拉曼光谱的测量结果来控制形成薄膜的条件。 此时，在被处理的细长片状构件上连续地形成薄膜的同时，以直线方式连续进行拉曼光谱的测定。 当拉曼光谱仪的探针的焦点相对于待加工的构件被控制或者来自拉曼光谱仪的激光束的输出被控制时，进行拉曼光谱的测量。 薄膜一定是。 形成例如是磁记录介质的保护膜。 保护膜例如是硬质碳膜（DLC膜）。
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