公开(公告)号：US08193571B2

公开(公告)日：2012-06-05

申请号：US12542276

申请日：2009-08-17

申请人： Ryota Katsumata ,  Masaru Kito ,  Yoshiaki Fukuzumi ,  Masaru Kidoh ,  Hiroyasu Tanaka ,  Megumi Ishiduki ,  Yosuke Komori ,  Hideaki Aochi ,  Yasuyuki Matsuoka

发明人： Ryota Katsumata ,  Masaru Kito ,  Yoshiaki Fukuzumi ,  Masaru Kidoh ,  Hiroyasu Tanaka ,  Megumi Ishiduki ,  Yosuke Komori ,  Hideaki Aochi ,  Yasuyuki Matsuoka

IPC分类号： H01L29/10 ,  H01L21/336

CPC分类号： H01L27/11578 ,  H01L27/11565 ,  H01L27/11575 ,  H01L27/11582 ,  H01L29/66833 ,  H01L29/792 ,  H01L29/7926

摘要： A stacked body is formed on a silicon substrate by stacking a plurality of insulating films and a plurality of electrode films alternately and through-holes are formed to extend in the stacking direction. Next, gaps are formed between the electrode films using etching the insulating films via the through-holes. Charge storage layers are formed along side faces of the through-holes and inner faces of the gaps, and silicon pillars are filled into the through-holes. Thereby, a nonvolatile semiconductor memory device is manufactured.

摘要翻译： 通过交替堆叠多个绝缘膜和多个电极膜，在硅基板上形成层叠体，并且形成贯通孔，以在层叠方向上延伸。 接下来，通过通孔蚀刻绝缘膜，在电极膜之间形成间隙。 电荷存储层沿着通孔的侧面和间隙的内表面形成，硅柱填充到通孔中。 由此，制造非易失性半导体存储器件。

公开(公告)号：US08178917B2

公开(公告)日：2012-05-15

申请号：US12408249

申请日：2009-03-20

申请人： Hiroyasu Tanaka ,  Ryota Katsumata ,  Masaru Kito ,  Yoshiaki Fukuzumi ,  Masaru Kidoh ,  Yosuke Komori ,  Hideaki Aochi ,  Megumi Ishiduki ,  Yasuyuki Matsuoka

发明人： Hiroyasu Tanaka ,  Ryota Katsumata ,  Masaru Kito ,  Yoshiaki Fukuzumi ,  Masaru Kidoh ,  Yosuke Komori ,  Hideaki Aochi ,  Megumi Ishiduki ,  Yasuyuki Matsuoka

IPC分类号： H01L29/792

CPC分类号： H01L27/11578 ,  H01L27/105 ,  H01L27/115 ,  H01L27/11573 ,  H01L27/11582

摘要： A non-volatile semiconductor storage device includes a first layer and a second layer. The first layer includes: a plurality of first conductive layers extending in parallel to a substrate and laminated in a direction perpendicular to the substrate; a first insulation layer formed on an upper layer of the plurality of first conductive layers; a first semiconductor layer formed to penetrate the plurality of first conductive layers; and a charge accumulation layer formed between the first conductive layers and the first semiconductor layer. Respective ends of the first conductive layers are formed in a stepwise manner in relation to each other in a first direction. The second layer includes: a plurality of second conductive layers extending in parallel to the substrate and laminated in a direction perpendicular to the substrate, the second conductive layers being formed in the same layer as the plurality of first conductive layers; and a second insulation layer formed on an upper layer of the plurality of second conductive layers. Respective ends of the second conductive layers are formed to align along a straight line extending in a direction substantially perpendicular to the substrate at a predetermined area.

摘要翻译： 非易失性半导体存储装置包括第一层和第二层。 第一层包括：多个第一导电层，其平行于衬底延伸并且在垂直于衬底的方向上层压; 形成在所述多个第一导电层的上层上的第一绝缘层; 形成为穿透所述多个第一导电层的第一半导体层; 以及形成在第一导电层和第一半导体层之间的电荷累积层。 第一导电层的相应端部在第一方向上相对于彼此以逐步的方式形成。 第二层包括：多个第二导电层，其平行于衬底延伸并且在垂直于衬底的方向上层叠，第二导电层形成在与多个第一导电层相同的层中; 以及形成在所述多个第二导电层的上层上的第二绝缘层。 形成第二导电层的相应端，沿着在预定区域上基本上垂直于衬底的方向延伸的直线对齐。

公开(公告)号：US08154103B2

公开(公告)日：2012-04-10

申请号：US12972243

申请日：2010-12-17

申请人： Hiroyasu Tanaka ,  Hideaki Aochi ,  Ryota Katsumata ,  Masaru Kidoh ,  Yoshiaki Fukuzumi ,  Masaru Kito ,  Yasuyuki Matsuoka

发明人： Hiroyasu Tanaka ,  Hideaki Aochi ,  Ryota Katsumata ,  Masaru Kidoh ,  Yoshiaki Fukuzumi ,  Masaru Kito ,  Yasuyuki Matsuoka

IPC分类号： H01L29/00 ,  H01L21/76

CPC分类号： H01L29/792 ,  H01L21/28282 ,  H01L27/11578 ,  H01L27/11582 ,  H01L29/0649 ,  H01L29/7923 ,  H01L29/7926

摘要： A semiconductor device has a substrate, a source region formed on the surface portion of the substrate, a first insulating layer formed on the substrate, a gate electrode formed on the first insulating layer, a second insulating layer formed on the gate electrode, a body section connected with the source region, penetrating through the first insulating layer, the gate electrode and the second insulating layer, and containing a void, a gate insulating film surrounding the body section, and formed between the body section and the gate electrode, and a drain region connected with the body section.

摘要翻译： 半导体器件具有衬底，形成在衬底的表面部分上的源极区域，形成在衬底上的第一绝缘层，形成在第一绝缘层上的栅电极，形成在栅电极上的第二绝缘层，主体 与源极区域连接，穿过第一绝缘层，栅电极和第二绝缘层，并且包含空隙，围绕主体部分的栅极绝缘膜，并且形成在主体部分和栅电极之间，并且 漏极区域与主体部分连接。

公开(公告)号：US20110111579A1

公开(公告)日：2011-05-12

申请号：US13010466

申请日：2011-01-20

申请人： Masaru Kito ,  Ryota Katsumata ,  Yoshiaki Fukuzumi ,  Masaru Kidoh ,  Hiroyasu Tanaka ,  Hideaki Aochi ,  Yasuyuki Matsuoka

发明人： Masaru Kito ,  Ryota Katsumata ,  Yoshiaki Fukuzumi ,  Masaru Kidoh ,  Hiroyasu Tanaka ,  Hideaki Aochi ,  Yasuyuki Matsuoka

IPC分类号： H01L21/20

CPC分类号： H01L27/11578 ,  H01L21/8221 ,  H01L27/0688 ,  H01L27/11573 ,  H01L27/11582 ,  H01L29/66833 ,  H01L29/7923 ,  H01L29/7926

摘要： A non-volatile semiconductor storage device has a plurality of memory strings with a plurality of electrically rewritable memory cells connected in series. Each of the memory strings includes: a memory columnar semiconductor extending in a direction perpendicular to a substrate; a tunnel insulation layer contacting the memory columnar semiconductor; a charge accumulation layer contacting the tunnel insulation layer and accumulating charges; a block insulation layer contacting the charge accumulation layer; and a plurality of memory conductive layers contacting the block insulation layer. The lower portion of the charge accumulation layer is covered by the tunnel insulation layer and the block insulation layer.

摘要翻译： 非易失性半导体存储装置具有多个具有串联连接的多个电可重写存储单元的存储器串。 每个存储器串包括：在垂直于衬底的方向上延伸的存储器柱状半导体; 与记录柱状半导体接触的隧道绝缘层; 与隧道绝缘层接触并积累电荷的电荷累积层; 与电荷累积层接触的块绝缘层; 以及与块绝缘层接触的多个存储器导电层。 电荷累积层的下部被隧道绝缘层和块绝缘层覆盖。

公开(公告)号：US07927926B2

公开(公告)日：2011-04-19

申请号：US12908546

申请日：2010-10-20

申请人： Ryota Katsumata ,  Masaru Kito ,  Hiroyasu Tanaka ,  Masaru Kidoh ,  Yoshiaki Fukuzumi ,  Hideaki Aochi ,  Yasuyuki Matsuoka

发明人： Ryota Katsumata ,  Masaru Kito ,  Hiroyasu Tanaka ,  Masaru Kidoh ,  Yoshiaki Fukuzumi ,  Hideaki Aochi ,  Yasuyuki Matsuoka

IPC分类号： H01L21/82

CPC分类号： H01L21/764 ,  H01L27/11551 ,  H01L27/11556 ,  H01L27/11575 ,  H01L27/11578

摘要： A non-volatile semiconductor storage device has a plurality of memory strings with a plurality of electrically rewritable memory cells connected in series. Each of the memory strings comprises: a first columnar semiconductor layer extending in a vertical direction to a substrate; a charge accumulation layer formed around the first columnar semiconductor layer via a first insulation layer; and a first conductive layer formed around the charge accumulation layer via a second insulation layer. Each of the first conductive layers is formed to expand in a two-dimensional manner, and air gaps are formed between the first conductive layers located there above and there below.

摘要翻译： 非易失性半导体存储装置具有多个具有串联连接的多个电可重写存储单元的存储器串。 每个存储器串包括：沿垂直方向延伸到衬底的第一柱状半导体层; 电荷累积层，经由第一绝缘层形成在第一柱状半导体层周围; 以及经由第二绝缘层形成在电荷累积层周围的第一导电层。 每个第一导电层被形成为以二维方式膨胀，并且在位于其上方和下方的第一导电层之间形成气隙。

公开(公告)号：US20110084331A1

公开(公告)日：2011-04-14

申请号：US12972243

申请日：2010-12-17

申请人： Hiroyasu Tanaka ,  Hideaki Aochi ,  Ryota Katsumata ,  Masaru Kidoh ,  Yoshiaki Fukuzumi ,  Masaru Kito ,  Yasuyuki Matsuoka

发明人： Hiroyasu Tanaka ,  Hideaki Aochi ,  Ryota Katsumata ,  Masaru Kidoh ,  Yoshiaki Fukuzumi ,  Masaru Kito ,  Yasuyuki Matsuoka

IPC分类号： H01L29/792

CPC分类号： H01L29/792 ,  H01L21/28282 ,  H01L27/11578 ,  H01L27/11582 ,  H01L29/0649 ,  H01L29/7923 ,  H01L29/7926

摘要： A semiconductor device has a substrate, a source region formed on the surface portion of the substrate, a first insulating layer formed on the substrate, a gate electrode formed on the first insulating layer, a second insulating layer formed on the gate electrode, a body section connected with the source region, penetrating through the first insulating layer, the gate electrode and the second insulating layer, and containing a void, a gate insulating film surrounding the body section, and formed between the body section and the gate electrode, and a drain region connected with the body section.

摘要翻译： 半导体器件具有衬底，形成在衬底的表面部分上的源极区域，形成在衬底上的第一绝缘层，形成在第一绝缘层上的栅电极，形成在栅电极上的第二绝缘层，主体 与源极区域连接，穿过第一绝缘层，栅电极和第二绝缘层，并且包含空隙，围绕主体部分的栅极绝缘膜，并且形成在主体部分和栅电极之间，并且 漏极区域与主体部分连接。

公开(公告)号：US07847342B2

公开(公告)日：2010-12-07

申请号：US12325023

申请日：2008-11-28

申请人： Yoshiaki Fukuzumi ,  Ryota Katsumata ,  Masaru Kidoh ,  Masaru Kito ,  Hiroyasu Tanaka ,  Hideaki Aochi ,  Yasuyuki Matsuoka

发明人： Yoshiaki Fukuzumi ,  Ryota Katsumata ,  Masaru Kidoh ,  Masaru Kito ,  Hiroyasu Tanaka ,  Hideaki Aochi ,  Yasuyuki Matsuoka

IPC分类号： H01L27/115 ,  H01L21/336 ,  H01L29/792 ,  H01L21/8247

CPC分类号： H01L27/11578 ,  G11C16/0483 ,  H01L21/8221 ,  H01L27/115 ,  H01L27/11556

摘要： A non-volatile semiconductor storage device has a plurality of memory strings with a plurality of electrically rewritable memory cells connected in series. Each of the memory strings includes: a first columnar semiconductor layer extending in a direction perpendicular to a substrate and having a first hollow extending downward from its upper end; a first insulation layer formed in contact with the outer wall of the first columnar semiconductor layer; a second insulation layer formed on the inner wall of the first columnar semiconductor layer so as to leave the first hollow; and a plurality of first conductive layers formed to sandwich the first insulation layer with the first columnar semiconductor layer and functioning as control electrodes of the memory cells.

摘要翻译： 非易失性半导体存储装置具有多个具有串联连接的多个电可重写存储单元的存储器串。 每个存储器串包括：第一柱状半导体层，其在垂直于衬底的方向上延伸并具有从其上端向下延伸的第一中空; 形成为与第一柱状半导体层的外壁接触的第一绝缘层; 第二绝缘层，形成在第一柱状半导体层的内壁上以离开第一中空部; 以及形成为将第一绝缘层与第一柱状半导体层夹在中间并用作存储单元的控制电极的多个第一导电层。

公开(公告)号：US20090146206A1

公开(公告)日：2009-06-11

申请号：US12325023

申请日：2008-11-28

申请人： Yoshiaki Fukuzumi ,  Ryota Katsumata ,  Masaru Kidoh ,  Masaru Kito ,  Hiroyasu Tanaka ,  Hideaki Aochi ,  Yasuyuki Matsuoka

发明人： Yoshiaki Fukuzumi ,  Ryota Katsumata ,  Masaru Kidoh ,  Masaru Kito ,  Hiroyasu Tanaka ,  Hideaki Aochi ,  Yasuyuki Matsuoka

IPC分类号： H01L27/115 ,  H01L21/336 ,  H01L29/792 ,  H01L21/8247

CPC分类号： H01L27/11578 ,  G11C16/0483 ,  H01L21/8221 ,  H01L27/115 ,  H01L27/11556

摘要： A non-volatile semiconductor storage device has a plurality of memory strings with a plurality of electrically rewritable memory cells connected in series. Each of the memory strings includes: a first columnar semiconductor layer extending in a direction perpendicular to a substrate and having a first hollow extending downward from its upper end; a first insulation layer formed in contact with the outer wall of the first columnar semiconductor layer; a second insulation layer formed on the inner wall of the first columnar semiconductor layer so as to leave the first hollow; and a plurality of first conductive layers formed to sandwich the first insulation layer with the first columnar semiconductor layer and functioning as control electrodes of the memory cells.

摘要翻译： 非易失性半导体存储装置具有多个具有串联连接的多个电可重写存储单元的存储器串。 每个存储器串包括：第一柱状半导体层，其在垂直于衬底的方向上延伸并具有从其上端向下延伸的第一中空; 形成为与第一柱状半导体层的外壁接触的第一绝缘层; 第二绝缘层，形成在第一柱状半导体层的内壁上以离开第一中空部; 以及形成为将第一绝缘层与第一柱状半导体层夹在中间并用作存储单元的控制电极的多个第一导电层。

公开(公告)号：US20090090965A1

公开(公告)日：2009-04-09

申请号：US12244989

申请日：2008-10-03

申请人： Masaru KITO ,  Ryota Katsumata ,  Yoshiaki Fukuzumi ,  Masaru Kidoh ,  Hiroyasu Tanaka ,  Hideaki Aochi ,  Yasuyuki Matsuoka

发明人： Masaru KITO ,  Ryota Katsumata ,  Yoshiaki Fukuzumi ,  Masaru Kidoh ,  Hiroyasu Tanaka ,  Hideaki Aochi ,  Yasuyuki Matsuoka

IPC分类号： H01L29/792 ,  H01L21/336

CPC分类号： H01L27/11578 ,  H01L21/8221 ,  H01L27/0688 ,  H01L27/11573 ,  H01L27/11582 ,  H01L29/66833 ,  H01L29/7923 ,  H01L29/7926

摘要： A non-volatile semiconductor storage device has a plurality of memory strings with a plurality of electrically rewritable memory cells connected in series. Each of the memory strings includes: a memory columnar semiconductor extending in a direction perpendicular to a substrate; a tunnel insulation layer contacting the memory columnar semiconductor; a charge accumulation layer contacting the tunnel insulation layer and accumulating charges; a block insulation layer contacting the charge accumulation layer; and a plurality of memory conductive layers contacting the block insulation layer. The lower portion of the charge accumulation layer is covered by the tunnel insulation layer and the block insulation layer.

摘要翻译： 非易失性半导体存储装置具有多个具有串联连接的多个电可重写存储单元的存储器串。 每个存储器串包括：在垂直于衬底的方向上延伸的存储器柱状半导体; 与记录柱状半导体接触的隧道绝缘层; 与隧道绝缘层接触并积累电荷的电荷累积层; 与电荷累积层接触的块绝缘层; 以及与块绝缘层接触的多个存储器导电层。 电荷累积层的下部被隧道绝缘层和块绝缘层覆盖。

公开(公告)号：US08048798B2

公开(公告)日：2011-11-01

申请号：US12389977

申请日：2009-02-20

申请人： Masaru Kidoh ,  Masaru Kito ,  Ryota Katsumata ,  Yoshiaki Fukuzumi ,  Hiroyasu Tanaka ,  Megumi Ishiduki ,  Yosuke Komori ,  Hideaki Aochi ,  Yasuyuki Matsuoka

发明人： Masaru Kidoh ,  Masaru Kito ,  Ryota Katsumata ,  Yoshiaki Fukuzumi ,  Hiroyasu Tanaka ,  Megumi Ishiduki ,  Yosuke Komori ,  Hideaki Aochi ,  Yasuyuki Matsuoka

IPC分类号： H01L21/4763

CPC分类号： H01L27/11578 ,  H01L21/8221 ,  H01L27/11573 ,  H01L27/11575 ,  H01L27/11582

摘要： A method for manufacturing a nonvolatile semiconductor storage device, including: forming a first conductive layer so that it is sandwiched in an up-down direction by first insulating layers; forming a first hole so that it penetrates the first insulating layers and the first conductive layer; forming a first side wall insulating layer on a side wall facing the first hole; forming a sacrificing layer so that the sacrificing layer infills the first hole; forming a second conductive layer on an upper layer of the sacrificing layer so that the second conductive layer is sandwiched by the second insulating layer in an up-down direction; forming a second hole on a position which matches with the first hole so that the second hole penetrates the second insulating layer and the second conductive layer; forming a second side wall insulating layer on a side wall facing the second hole; removing the sacrificing layer after the formation of the second side wall insulating layer; and forming a semiconductor layer so that the semiconductor layer infills the first hole and the second hole after the removal of the sacrificing layer.

摘要翻译： 一种制造非易失性半导体存储装置的方法，包括：形成第一导电层，使其通过第一绝缘层沿上下方向夹持; 形成第一孔，使其穿透第一绝缘层和第一导电层; 在面向所述第一孔的侧壁上形成第一侧壁绝缘层; 形成牺牲层，使牺牲层填充第一孔; 在牺牲层的上层上形成第二导电层，使得第二导电层在上下方向上被第二绝缘层夹持; 在与所述第一孔匹配的位置上形成第二孔，使得所述第二孔穿过所述第二绝缘层和所述第二导电层; 在面向所述第二孔的侧壁上形成第二侧壁绝缘层; 在形成第二侧壁绝缘层之后去除牺牲层; 以及形成半导体层，使得半导体层在去除牺牲层之后填充第一孔和第二孔。