公开(公告)号：US20170117475A1

公开(公告)日：2017-04-27

申请号：US15130061

申请日：2016-04-15

申请人： Samsung Display Co., Ltd.

发明人： Minsoo KIM ,  Mugyeom Kim ,  Valeriy Prushinskiy ,  Muhyun Kim ,  Dongkyu Lee ,  Byungkook Lee ,  Jaesoo Ha

IPC分类号： H01L51/00 ,  H01L27/32 ,  H01L51/56

CPC分类号： H01L51/0013 ,  C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  C23C14/56 ,  H01L27/3211 ,  H01L51/56 ,  H01L2227/323

摘要： An apparatus for depositing an organic layer includes a deposition unit including a deposition assembly spaced apart from a substrate. The deposition assembly includes a deposition source configured to heat a deposition material, a deposition source nozzle unit installed on the deposition source, a plurality of pattern sheets facing the deposition source nozzle unit, and a source shutter disposed between the deposition source and the plurality of pattern sheets. The deposition source nozzle unit includes a deposition nozzle. The plurality of pattern sheets include at least one of a plurality of first patterning slits and a plurality of second patterning slits. The source shutter is configured to allow the deposition material to pass through one of the plurality of pattern sheets depending on a relative location between the deposition source and the substrate.

公开(公告)号：US09905813B2

公开(公告)日：2018-02-27

申请号：US15164922

申请日：2016-05-26

申请人： SAMSUNG DISPLAY CO., LTD.

发明人： Jaesoo Ha ,  Minsoo Kim ,  Mugyeom Kim ,  Muhyun Kim ,  Dongkyu Lee ,  Byungkook Lee ,  Suhwan Lee ,  Yonggu Lee ,  Jaeyoung Cho ,  Valeriy Prushinskiy

IPC分类号： H01L51/56 ,  H01L51/00 ,  H01L21/677 ,  H01L27/32 ,  B05B15/04 ,  B05B13/02 ,  H01L27/12

CPC分类号： H01L51/56 ,  B05B12/22 ,  B05B13/0221 ,  H01L21/67742 ,  H01L27/1214 ,  H01L27/3248 ,  H01L27/3262 ,  H01L51/001

摘要： An organic layer depositing apparatus includes a deposition unit which includes one or more deposition assemblies spaced a predetermined distance apart from a substrate to deposit a deposition material on the substrate, wherein the one or more deposition assemblies include: a deposition source; a deposition source nozzle unit; a first pattern sheet which includes a first patterning unit and a first overlap unit; and a second pattern sheet which includes a second patterning unit and a second overlap unit, wherein the first and second pattern sheets are arranged such that the first and second overlap units overlap each other.