公开(公告)号：US09905813B2

公开(公告)日：2018-02-27

申请号：US15164922

申请日：2016-05-26

申请人： SAMSUNG DISPLAY CO., LTD.

发明人： Jaesoo Ha ,  Minsoo Kim ,  Mugyeom Kim ,  Muhyun Kim ,  Dongkyu Lee ,  Byungkook Lee ,  Suhwan Lee ,  Yonggu Lee ,  Jaeyoung Cho ,  Valeriy Prushinskiy

IPC分类号： H01L51/56 ,  H01L51/00 ,  H01L21/677 ,  H01L27/32 ,  B05B15/04 ,  B05B13/02 ,  H01L27/12

CPC分类号： H01L51/56 ,  B05B12/22 ,  B05B13/0221 ,  H01L21/67742 ,  H01L27/1214 ,  H01L27/3248 ,  H01L27/3262 ,  H01L51/001

摘要： An organic layer depositing apparatus includes a deposition unit which includes one or more deposition assemblies spaced a predetermined distance apart from a substrate to deposit a deposition material on the substrate, wherein the one or more deposition assemblies include: a deposition source; a deposition source nozzle unit; a first pattern sheet which includes a first patterning unit and a first overlap unit; and a second pattern sheet which includes a second patterning unit and a second overlap unit, wherein the first and second pattern sheets are arranged such that the first and second overlap units overlap each other.