公开(公告)号：US20160048081A1

公开(公告)日：2016-02-18

申请号：US14612648

申请日：2015-02-03

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： JUN-HO SIM ,  JUNG-IN PARK ,  KI-BEOM LEE ,  HI-KUK LEE ,  HYUN-SEOK KIM ,  KAB-JONG SEO ,  SANG-HYUN YUN ,  SANG-HYUN LEE ,  JUNG-CHUL HEO ,  JONG-JOO KIM ,  CHANG-HOON KIM

IPC: G03F7/20 ,  G02B26/08

CPC classification number: G03F7/70641 ,  G02B26/0833 ,  G03F7/2053 ,  G03F7/70291 ,  G03F7/70383 ,  G03F7/70391

Abstract: A maskless exposure device includes a stage on which a substrate is disposed, an optical head, and an optical source part. The optical head irradiates light to the substrate. The light source part provides the optical head with a light. The optical head irradiates the light, according to an average-focus distance, to the substrate. The average-focus distance is determined by averaging best-focus distances for a plurality of regions of the substrate, respectively.

Abstract translation: 无掩模曝光装置包括其上设置有基板的台，光学头和光源部。 光头将光照射到基板上。 光源部分为光头提供光。 光头根据平均焦距将光照射到基板上。 平均焦点距离分别通过对基板的多个区域的最佳聚焦距离进行平均来确定。