METHOD OF FABRICATING SEMICONDUCTOR DEVICE
    1.
    发明申请
    METHOD OF FABRICATING SEMICONDUCTOR DEVICE 审中-公开
    制造半导体器件的方法

    公开(公告)号:US20150093867A1

    公开(公告)日:2015-04-02

    申请号:US14291047

    申请日:2014-05-30

    Inventor: Dong-Kyu LEE

    CPC classification number: H01L21/823462

    Abstract: A method for fabricating a semiconductor device includes preparing a substrate in which a first active region and a second active region are defined by a device isolation region, forming a channel region in the first active region and the second active region, respectively, forming a gate insulating layer on the first active region and a gate insulating layer on the second active region, a thickness of the gate insulating layer on the first active region being different from a thickness of the gate insulating layer on the second active region, and forming a first interface layer between the substrate and the gate insulating layer on the first active region and a second interface layer between the substrate and the gate insulating layer on the second active region.

    Abstract translation: 一种制造半导体器件的方法包括制备其中第一有源区和第二有源区由器件隔离区限定的衬底,分别在第一有源区和第二有源区中形成沟道区,形成栅极 第一有源区上的绝缘层和第二有源区上的栅极绝缘层,第一有源区上的栅极绝缘层的厚度与第二有源区上的栅极绝缘层的厚度不同,并且形成第一有源区 在第一有源区上的衬底和栅极绝缘层之间的界面层和在第二有源区上的衬底和栅极绝缘层之间的第二界面层。

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