公开(公告)号：US11982705B2

公开(公告)日：2024-05-14

申请号：US17690317

申请日：2022-03-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Youn Gon Oh ,  Ji Hun Kim ,  Sae Yun Ko ,  Gil Ho Gu ,  Dong Su Kim ,  Eun Hee Lee ,  Ho Chan Lee ,  Seong Sil Jeong ,  Seong Pyo Hong

IPC: G01R31/28 ,  H01L21/673 ,  H01L21/677

CPC classification number: G01R31/2831 ,  H01L21/6735 ,  H01L21/6773

Abstract: A substrate analysis apparatus is provided. The substrate analysis includes: an interlayer conveying module configured to transport a first FOUP; an exchange module which is connected to the interlayer conveying module, and configured to transfer a wafer from the first FOUP to a second FOUP; a pre-processing module configured to form a test wafer piece using the wafer inside the second FOUP; an analysis module configured to analyze the test wafer piece; and a transfer rail configured to transport the second FOUP containing the wafer and a tray containing the test wafer piece. The wafer includes a first identifier indicating information corresponding to the wafer, the test wafer piece includes a second identifier indicating information generated by the pre-processing module which corresponds to the test wafer piece, and the analysis module is configured to analyze the first identifier and the second identifier in connection with each other.

公开(公告)号：US11984338B2

公开(公告)日：2024-05-14

申请号：US17745595

申请日：2022-05-16

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Youn Gon Oh ,  Ji Hun Kim ,  Seung Gu Bang ,  Sung-Hoon Lee ,  Ho Chan Lee ,  Hyeong Seok Choo

IPC: H01L21/677 ,  B66C19/00

CPC classification number: H01L21/6773 ,  B66C19/00 ,  H01L21/67736

Abstract: A substrate transfer system capable of performing efficient distribution exchange between fabricating facilities is provided. The substrate transfer system includes a lower rail, an upper rail which is located above the lower rail from a ground plane, and extends to be parallel to the lower rail, a conveyor which extends to intersect the lower rail and the upper rail, below the lower rail, a first lower transport unit which transports a first carrier along the lower rail and unloads the first carrier onto the conveyor, and a first upper transport unit which transports a second carrier along the upper rail and unloads the second carrier onto the conveyor, wherein the conveyor includes a linear module which moves the first carrier and the second carrier in a linear direction, and a turning module which turns the first carrier and the second carrier.