公开(公告)号：US20190164851A1

公开(公告)日：2019-05-30

申请号：US16047439

申请日：2018-07-27

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： JONGWOON YOO ,  DAEHA HWANG ,  YOUNG-GI MIN ,  SOOYONG PARK ,  JONGKOOK KIM

IPC: H01L21/66 ,  G01R1/02 ,  G01R31/28 ,  G01R1/04 ,  H01L23/00 ,  G11C29/04 ,  G11C29/56

Abstract: A test system includes automatic test equipment configured to test a device under test, and a test interface board configured to measure a second voltage applied to the device under test based on a first voltage supplied from the automatic test equipment. The test interface board includes a sensing wiring configured to transmit the measured second voltage to the automatic test equipment. The second voltage is measured at an interior location of the device under test.